US4213818A
Expired / Lapsed
US
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Selective plasma vapor etching process
Assignee: Signetics Corp
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Filing: 1979-01-04
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Granted: 1980-07-22
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Expires: 1999-01-04
Abstract
Abstract Selective plasma vapor etching process for performing operations on a solid body formed of at least two different materials capable of being vapor etched exposed at, at least, one surface of the body, with the body being disposed in a chamber having a partial vacuum therein. A gas plasma is created within the chamber to produce active species of atoms and molecules so that these species come into contact with the surface of the body to chemically react at least one of the materials with active species from the gas plasma to form a gas-non-gaseous chemical reaction by controlling the concentration and reaction kinetics of specific species, and by controlling the activation energy of the etching reactions to produce a difference in rates between the materials so that the etching is more selective to one material over the other. The species is also controlled by the frequency of the electromagnetic energy.
Inventors
- 👤 Kyle E. Lemons
- 👤 II Richard C. Blish
- 👤 Jan D. Reimer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 17:42
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P50/24; H10P50/242; H10P50/286; H10P50/287
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
145 words
In a selective vapor etching process for performing operations on a body formed of at least two different materials which are exposed at one surface of the body and in which the body is disposed in a chamber having a pressure below atmosphere therein, creating by electrodeless electromagnetic discharge within the chamber a gas plasma having active species of atoms and molecules, and wherein said gas plasma consists essentially of a binary mixture of 5 to 95 mole percent sulfur hexafluoride and the balance helium, so that the gas plasma comes into contact with the surface of the body to chemically react at least one of the materials with an active species in the gas plasma to form a gas-non-gaseous chemical reaction, and controlling the chemical kinetics of the reaction so that the reaction can be made selective to one of said two different materials.
Claim 2
Dependent Claim
145 words
In a selective vapor etching process for performing operations on a body formed of at least two different materials which are exposed at one surface of the body and in which the body is disposed in a chamber having a pressure below atmosphere therein, creating by electrodeless electromagnetic discharge within the chamber a gas plasma having active species of atoms and molecules, and wherein said gas plasma consists essentially of a binary mixture of 5 to 95 mole percent sulfur hexafluoride and the balance helium, so that the gas plasma comes into contact with the surface of the body to chemically react at least one of the materials with an active species in the gas plasma to form a gas-non-gaseous chemical reaction, and controlling the chemical kinetics of the reaction so that the reaction can be made selective to one of said two different materials.
Claim 3
Dependent Claim
21 words
The invention according to claim 1 wherein said gas plasma is used to preferentially etch silicon with respect to silicon dioxide.
Claim 4
Dependent Claim
29 words
The invention according to claim 1, wherein helium is present at less than 80 mole percent, to provide an etch ratio of SiO 2 to Si of about 0.1
Claim 5
Dependent Claim
39 words
The invention according to claim 1, wherein helium is present in the range of 80 to 95 mole percent to provide an etch ratio of SiO 2 to Si which decreases from 0.1 to 0.001 with increasing helium content.
Claim 6
Dependent Claim
134 words
In a selective vapor etching process for performing operations on a body formed of at least two different materials which are exposed at one surface of the body and in which the body is disposed in a chamber having a pressure below atmosphere therein, creating within the chamber a gas plasma having active species of atoms and molecules, and wherein said gas plasma consists essentially of a binary mixture of sulfur hexafluoride and oxygen, so that the gas plasma comes into contact with the surface of the body to chemically react at least one of the materials with an active species in the gas plasma to form a gas-non-gaseous chemical reaction, and controlling the chemical kinetics of the reaction so that the reaction can be made selective to one of said two different materials.
Claim 7
Dependent Claim
134 words
In a selective vapor etching process for performing operations on a body formed of at least two different materials which are exposed at one surface of the body and in which the body is disposed in a chamber having a pressure below atmosphere therein, creating within the chamber a gas plasma having active species of atoms and molecules, and wherein said gas plasma consists essentially of a binary mixture of sulfur hexafluoride and oxygen, so that the gas plasma comes into contact with the surface of the body to chemically react at least one of the materials with an active species in the gas plasma to form a gas-non-gaseous chemical reaction, and controlling the chemical kinetics of the reaction so that the reaction can be made selective to one of said two different materials.
Claim 8
Dependent Claim
30 words
The invention according to claim 5 wherein a gas plasma of over 10% sulfur hexafluoride and the balance oxygen is used to preferentially etch silicon with respect to organic photoresist.
Claim 9
Dependent Claim
31 words
The invention according to claim 5 wherein a gas plasma of less than 10% sulfur hexafluoride and the balance oxygen is used to preferentially etch organic photoresist with respect to silicon.
Claim 10
Dependent Claim
21 words
The invention according to claim 5 wherein said gas plasma is used to preferentially etch silicon with respect to silicon dioxide.
Claim 11
Dependent Claim
27 words
The invention according to claim 5 wherein said gas plasma is maintained at a pressure substantially between 0.4 to 0.8 Torr for maximum etch rate of silicon.
Claim 12
Dependent Claim
14 words
The invention according to claim 9 wherein said gas pressure is about 0.6 Torr.
Claim 13
Dependent Claim
132 words
In a selective vapor etching process for performing operations on a body formed of at least two different materials which are exposed at one surface of the body and in which the body is disposed in a chamber having a pressure below atmosphere therein, creating within the chamber a gas plasma having active species of atoms and molecules and consisting essentially of a binary mixture of silicon tetrafluoride and an oxidizing species so that the gas plasma comes into contact with the surface of the body to chemically react at least one of the materials with an active species in the gas plasma to form a gas-non-gaseous chemical reaction, and controlling the chemical kinetics of the reaction so that the reaction can be made selective to one of said two different materials.
Claim 14
Dependent Claim
132 words
In a selective vapor etching process for performing operations on a body formed of at least two different materials which are exposed at one surface of the body and in which the body is disposed in a chamber having a pressure below atmosphere therein, creating within the chamber a gas plasma having active species of atoms and molecules and consisting essentially of a binary mixture of silicon tetrafluoride and an oxidizing species so that the gas plasma comes into contact with the surface of the body to chemically react at least one of the materials with an active species in the gas plasma to form a gas-non-gaseous chemical reaction, and controlling the chemical kinetics of the reaction so that the reaction can be made selective to one of said two different materials.
Claim 15
Dependent Claim
20 words
The invention according to claim 11 wherein said plasma consists essentially of a binary mixture of silicon tetrafluoride and oxygen.
Claim 16
Dependent Claim
21 words
The invention according to claim 12 wherein said gas plasma is used to preferentially etch silicon dioxide with respect to silicon.
Claim 17
Dependent Claim
21 words
The invention according to claim 13 wherein said gas plasma consists essentially of over 60% oxygen and the balance silicon tetrafluoride.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-07-22 | 1984-01-21 | 1984-07-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-07-22 | 1988-01-21 | 1988-07-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-07-22 | 1992-01-21 | 1992-07-22 | $7700.00 | Window Closed / Lapsed |