US4213087A
Expired / Lapsed
US
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Method and device for testing electrical conductor elements
Assignee: AT&T Inc
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Filing: 1978-10-10
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Granted: 1980-07-15
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Expires: 1998-10-10
Abstract
Abstract A method and a device implementing the method are disclosed for testing electrical conductor elements in the manufacture of integrated circuit devices. The method is based on determining nonlinearity of electrical resistance, a quantity which was found to be closely related to reliability of conductor elements. The method calls for applying a repetitive train of pulses to an AC-coupled linear network across whose output terminals the element being tested is placed. The resulting average current through or voltage across the element provides a measure of nonlinearity of resistance.
Inventors
- 👤 Alan T. English
- 👤 Gabriel L. Miller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:58
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2853; G01R31/50; G01R31/58
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
83 words
In the manufacture of integrated circuit devices, a method for testing at least one electrical conductor element by determining nonlinearity of electrical resistance of said element as a function of current flowing in said element characterized in that said method comprises the steps of (1) electrically connecting said element to the output terminals of an AC-coupled linear electrical network whose input terminals are connected to an electrical wave generator, (2) activating said wave generator, and (3) measuring the average voltage across said element.
Claim 2
Dependent Claim
83 words
In the manufacture of integrated circuit devices, a method for testing at least one electrical conductor element by determining nonlinearity of electrical resistance of said element as a function of current flowing in said element characterized in that said method comprises the steps of (1) electrically connecting said element to the output terminals of an AC-coupled linear electrical network whose input terminals are connected to an electrical wave generator, (2) activating said wave generator, and (3) measuring the average voltage across said element.
Claim 3
Dependent Claim
87 words
In the manufacture of integrated circuit devices, a method for testing at least one electrical conductor element by determining nonlinearity of electrical resistance of said element as a function of current flowing in said element characterized in that said method comprises the steps of (1) electrically connecting said element to the output terminals of an AC-coupled linear electrical network whose input terminals are connected to an electrical wave generator, (2) activating said wave generator, and (3) measuring the resulting average current through or voltage across said element.
Claim 4
Dependent Claim
87 words
In the manufacture of integrated circuit devices, a method for testing at least one electrical conductor element by determining nonlinearity of electrical resistance of said element as a function of current flowing in said element characterized in that said method comprises the steps of (1) electrically connecting said element to the output terminals of an AC-coupled linear electrical network whose input terminals are connected to an electrical wave generator, (2) activating said wave generator, and (3) measuring the resulting average current through or voltage across said element.
Claim 5
Dependent Claim
14 words
Method of claim 2 in which said electrical network consists of a blocking capacitor.
Claim 6
Dependent Claim
13 words
Method of claim 2 in which said electrical network consists of a transformer.
Claim 7
Dependent Claim
16 words
Method of claim 2 in which said electrical wave generator produces a train of rectangular pulses.
Claim 8
Dependent Claim
35 words
Method of claim 5 in which the duty cycle of said wave generator is in the range of from ten percent to 40 percent or in the range of from 60 percent to 90 percent.
Claim 9
Dependent Claim
17 words
Method of claim 3 in which said average voltage is measured by means of a digital voltmeter.
Claim 10
Dependent Claim
17 words
Method of claim 2 in which said average current is measured by means of an operational amplifier.
Claim 11
Independent Claim
76 words
A device for testing at least one electrical conductor element by determining nonlinearity of electrical resistance of said element as a function of current flowing in said element characterized in that said device comprises (1) an electrical wave generator connected to the input terminals of an AC-coupled linear electrical network whose output terminals are connected to an averaging voltmeter and (2) means for electrically connecting said electrical conductor element to the output terminals of said network.
Claim 12
Independent Claim
76 words
A device for testing at least one electrical conductor element by determining nonlinearity of electrical resistance of said element as a function of current flowing in said element characterized in that said device comprises (1) an electrical wave generator connected to the input terminals of an AC-coupled linear electrical network whose output terminals are connected to an averaging voltmeter and (2) means for electrically connecting said electrical conductor element to the output terminals of said network.
Claim 13
Independent Claim
74 words
A device for testing at least one electrical conductor element by determining nonlinearity of electrical resistance of said element as a function of current flowing in said element characterized in that said device comprises (1) an electrical wave generator connected to the input terminals of an AC-coupled linear electrical network whose output terminals are connected to an averaging current or voltmeter and (2) means for electrically connecting said electrical conductor element to said network.
Claim 14
Independent Claim
74 words
A device for testing at least one electrical conductor element by determining nonlinearity of electrical resistance of said element as a function of current flowing in said element characterized in that said device comprises (1) an electrical wave generator connected to the input terminals of an AC-coupled linear electrical network whose output terminals are connected to an averaging current or voltmeter and (2) means for electrically connecting said electrical conductor element to said network.
Claim 15
Dependent Claim
14 words
Device of claim 10 in which said electrical network consists of a blocking capacitor.
Claim 16
Dependent Claim
13 words
Device of claim 10 in which said electrical network consists of a transformer.
Claim 17
Dependent Claim
16 words
Device of claim 10 in which said electrical wave generator produces a train of rectangular pulses.
Claim 18
Dependent Claim
35 words
Device of claim 13 in which said electrical wave generator has a duty cycle in the range of from ten percent to 40 percent or in the range of from 60 percent to 90 percent.
Claim 19
Dependent Claim
13 words
Device of claim 10 in which said averaging voltmeter is a digital voltmeter.
Claim 20
Dependent Claim
14 words
Device of claim 10 in which said averaging current meter comprises an operational amplifier.
Claim 21
Independent Claim
86 words
A method for testing an electrical conductor by determining nonlinearity of electrical resistance of said conductor as a function of current flowing in said conductor comprising applying a wave signal to the conductor such that either the time average of the current in said conductor or the time average of the voltage across said conductor is zero and such as to produce a voltage across said conductor or a current in said conductor, respectively, and measuring the time average of said voltage or said current, respectively.
Claim 22
Independent Claim
86 words
A method for testing an electrical conductor by determining nonlinearity of electrical resistance of said conductor as a function of current flowing in said conductor comprising applying a wave signal to the conductor such that either the time average of the current in said conductor or the time average of the voltage across said conductor is zero and such as to produce a voltage across said conductor or a current in said conductor, respectively, and measuring the time average of said voltage or said current, respectively.
References Cited (Backward Citations)
SU269293A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-07-15 | 1984-01-14 | 1984-07-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-07-15 | 1988-01-14 | 1988-07-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-07-15 | 1992-01-14 | 1992-07-15 | $7700.00 | Window Closed / Lapsed |