← Back to Patent Explorer
US4213086A Expired / Lapsed US ⏱️ 0.0 years remaining

Selector device for the determination of the type of electroconductivity in semiconductor wafers

Assignee: Shin-Etsu Handotai Co Ltd
•
Filing: 1978-07-06
•
Granted: 1980-07-15
•
Expires: 1998-07-06
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A novel selector device for the determination of the conductivity-type in a semiconductor wafer utilizes the determination of the polarity of the electromotive force produced in the wafer by the Hall effect. The device comprises two pairs of probes in diagonal arrangement for supplying an electric current through the wafer and for detecting the electromotive force, respectively, by contacting the wafer surface, and a pair of permanent magnets positioned oppositely with the wafer in between to produce a magnetic field perpendicular to the wafer. One of the permanent magnets is located within the circumference determined by the probes.

Inventors

  • 👤 Yoshiya Iida
  • 👤 Shoichiro Ohga

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 10:44
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07314; G01R31/00; G01R31/26; G01R31/27; G01R31/275; G01R31/28; G01R31/302

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 180 words
A selector device for the determination of the type of electroconductivity in a semiconductor wafer utilizing the polarity of the electromotive force produced in the semiconductor wafer by the Hall effect, said device comprising first and second pairs of probes in a diagonal arrangement to be contacted with the surface of the semiconductor wafer under measurement, one of said pairs of probes supplying an electric current through the wafer, and the other of said pairs of probes detecting the electromotive force produced in the wafer by the Hall effect, and a pair of permanent magnets opposed to each other with a gap in which the semiconductor wafer to be measured is placed when under measurement, one of said permanent magnets being positioned within the circumference determined by said probes, wherein said one of said permanent magnets positioned within the circumference determined by said probes has dimensions such as to be confined within the circle or ellipse inscribed to a square or rhombus having corners at the contact points between said probes and the surface of the semiconductor wafer under measurement.
Claim 2
Dependent Claim 180 words
A selector device for the determination of the type of electroconductivity in a semiconductor wafer utilizing the polarity of the electromotive force produced in the semiconductor wafer by the Hall effect, said device comprising first and second pairs of probes in a diagonal arrangement to be contacted with the surface of the semiconductor wafer under measurement, one of said pairs of probes supplying an electric current through the wafer, and the other of said pairs of probes detecting the electromotive force produced in the wafer by the Hall effect, and a pair of permanent magnets opposed to each other with a gap in which the semiconductor wafer to be measured is placed when under measurement, one of said permanent magnets being positioned within the circumference determined by said probes, wherein said one of said permanent magnets positioned within the circumference determined by said probes has dimensions such as to be confined within the circle or ellipse inscribed to a square or rhombus having corners at the contact points between said probes and the surface of the semiconductor wafer under measurement.

References Cited (Backward Citations)

SU423068A1 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-07-15 1984-01-14 1984-07-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-07-15 1988-01-14 1988-07-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-07-15 1992-01-14 1992-07-15 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag