US4203124A
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Low noise multistage avalanche photodetector
Assignee: AT&T Inc
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Filing: 1978-10-06
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Granted: 1980-05-13
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Expires: 1998-10-06
Abstract
Abstract Devices constructed according to the present invention provide low noise avalanche photodetectors. The devices are comprised of a sequence of at least four layers of semiconductor material of alternating opposed conductivity. In a first embodiment the layers form alternating homojunctions and heterojunctions at the interface between adjacent layers, and the bandgap of the layers on either side of the homojunctions decreases in the direction of the propagating signal. In another embodiment the layers form heterojunctions at the interfaces between adjacent layers; the layers are grouped into a sequence of pairs of layers where the bandgap of the two layers in each pair are substantially equal; and the bandgap of the layers in the sequence of pairs of layers decreases in the direction of the propagating signal. The effect of the structure of the multilayer device is to create traps for one sign of carrier and to prevent the trapped carrier from avalanching through amplification regions of the device.
Inventors
- 👤 James P. Gordon
- 👤 Robert E. Nahory
- 👤 Martin A. Pollack
- 👤 John M. Worlock
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 03:57
CPC Classifications
H; H10; H10F; H10F30/00; H10F30/20; H10F30/21; H10F30/26; H10D; H10D62/00; H10D62/80; H10D62/82; H10D62/824; H10F30/22; H10F30/225; H10F30/2255
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
94 words
In combination, a plurality of abutting layers of semiconductor material of alternating opposed conductivity type, said layers being grouped into a sequence of pairs of layers; characterized in that: the bandgap of the first layer and the bandgap of the second layer of each pair of said sequence of pairs of layers are substantially equal; the bandgaps of each pair of said sequence of pairs of layers are arranged in a decreasing sequence of sizes; and the second layer of at least one pair of said sequence of pairs of layers is lightly doped.
Claim 2
Dependent Claim
94 words
In combination, a plurality of abutting layers of semiconductor material of alternating opposed conductivity type, said layers being grouped into a sequence of pairs of layers; characterized in that: the bandgap of the first layer and the bandgap of the second layer of each pair of said sequence of pairs of layers are substantially equal; the bandgaps of each pair of said sequence of pairs of layers are arranged in a decreasing sequence of sizes; and the second layer of at least one pair of said sequence of pairs of layers is lightly doped.
Claim 3
Dependent Claim
35 words
The combination as defined in claim 1 wherein a homojunction is formed at the interface between the first layer and the second layer of at least one pair of said sequence of pairs of layers.
Claim 4
Dependent Claim
63 words
The combination as defined in claim 2 wherein the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are selected from the group consisting of quaternary compounds of InGaAsP, ternary compounds of InGaAs, ternary compounds of GaAsSb, ternary compounds of InSbAs, ternary compounds of InGaSb, binary compounds of CdTe, and Ge.
Claim 5
Dependent Claim
148 words
In combination, a plurality of abutting layers of semiconductor material of alternating opposed conductivity type, said layers being grouped into a sequence of pairs of layers: characterized in that: the bandgap of the first layer and the bandgap of the second layer of each pair of said sequence of pairs of layers are substantially equal; the bandgaps of each pair of said sequence of pairs of layers are arranged in a decreasing sequence of sizes; and the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are chosen from the group of pairs of layers consisting of Al 1-u Ga u As/In 1-x Ga x As y P 1-y , Al 1-u Ga u As v Sb 1-v /In 1-x Ga x As y P 1-y and InP/Al 1-z (In 1-y Ga y As) z .--.
Claim 6
Dependent Claim
148 words
In combination, a plurality of abutting layers of semiconductor material of alternating opposed conductivity type, said layers being grouped into a sequence of pairs of layers: characterized in that: the bandgap of the first layer and the bandgap of the second layer of each pair of said sequence of pairs of layers are substantially equal; the bandgaps of each pair of said sequence of pairs of layers are arranged in a decreasing sequence of sizes; and the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are chosen from the group of pairs of layers consisting of Al 1-u Ga u As/In 1-x Ga x As y P 1-y , Al 1-u Ga u As v Sb 1-v /In 1-x Ga x As y P 1-y and InP/Al 1-z (In 1-y Ga y As) z .--.
Claim 7
Dependent Claim
26 words
The combination as defined in claim 4 wherein the second layer from at least one pair of said sequence of pairs of layers is slightly doped.
Claim 8
Dependent Claim
142 words
A reduced noise avalanche detector comprising: a substrate and a plurality of abutting layers of semiconductor material of alternating opposed conductivity type, said layers being grouped into a sequence of pairs of layers; characterized in that: the bandgap of the first layer and the bandgap of the second layer of each pair of said sequence of pairs of layers are substantially equal; the bandgaps of each pair of said sequence of pairs of layers are arranged in a decreasing sequence of sizes; and said reduced noise avalanche detector further comprises means for reverse biasing the junctions formed at the interface between the first layer and the second layer of each pair of said sequence of pairs of layers; and means for forward biasing the heterojunctions formed at the interface between the layers from different pairs of said sequence of pairs of layers.
Claim 9
Dependent Claim
142 words
A reduced noise avalanche detector comprising: a substrate and a plurality of abutting layers of semiconductor material of alternating opposed conductivity type, said layers being grouped into a sequence of pairs of layers; characterized in that: the bandgap of the first layer and the bandgap of the second layer of each pair of said sequence of pairs of layers are substantially equal; the bandgaps of each pair of said sequence of pairs of layers are arranged in a decreasing sequence of sizes; and said reduced noise avalanche detector further comprises means for reverse biasing the junctions formed at the interface between the first layer and the second layer of each pair of said sequence of pairs of layers; and means for forward biasing the heterojunctions formed at the interface between the layers from different pairs of said sequence of pairs of layers.
Claim 10
Dependent Claim
38 words
The reduced noise avalanche photodetector as defined in claim 6 wherein a homojunction is formed at the interface between the first layer and the second layer of at least one pair of said sequence of pairs of layers.
Claim 11
Dependent Claim
29 words
The reduced noise avalanche photodetector as defined in claim 6 wherein the second layer of at least one pair of said sequence of pairs of layers is lightly doped.
Claim 12
Dependent Claim
29 words
The reduced noise avalanche photodetector as defined in claim 7 wherein the second layer of at least one pair of said sequence of pairs of layers is lightly doped.
Claim 13
Dependent Claim
66 words
The reduced noise avalanche photodetector as defined in claim 7 wherein the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are selected from the group consisting of quaternary compounds of InGaAsP, ternary compounds of InGaAs, ternary compounds of GaAsSb, ternary compounds of InSbAs, ternary compounds of InGaSb, binary compounds of CdTe, and Ge.
Claim 14
Dependent Claim
66 words
The reduced noise avalanche photodetector as defined in claim 9, wherein the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are selected from the group consisting of quaternary compounds of InGaAsP, ternary compounds of InGaAs, ternary compounds of GaAsSb, ternary compounds of InSbAs, ternary compounds of InGaSb, binary compounds of CdTe, and Ge.
Claim 15
Dependent Claim
83 words
The reduced noise avalanche photodetector as defined in claim 6 wherein the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are chosen from the group of pairs of layers consisting of Al 1-u Ga u As/In 1-x Ga x As y P 1-y , Al 1-u Ga u As v Sb 1-v /In 1-x Ga x As y P 1-y and InP/Al 1-z (In 1-y Ga y As) z .
Claim 16
Dependent Claim
82 words
The reduced noise avalanche photodetector as defined in claim 8 wherein the materials for first layer and the second layer from at least one pair of said sequence of pairs of layers are chosen from the group of pairs of layers consisting of Al 1-u Ga u As/In 1-x Ga x As y P 1-y , Al 1-u Ga u As v Sb 1-v /In 1-x Ga x As y P 1-y and InP/Al 1-z (In 1-y Ga y As) z .
Claim 17
Dependent Claim
221 words
A reduced noise avalanche detector comprising: a plurality of abutting layers of semiconductor material of alternating opposed conductivity type, said layers being grouped into a sequence of pairs of layers; characterized in that: the bandgap of the first layer and the bandgap of the second layer of each pair of said sequence of pairs of layers are substantially equal; the bandgaps of each pair of said sequence of pairs of layers are arranged in a decreasing sequence of sizes; and said reduced noise avalanche detector further comprises a window substrate layer, for accepting incident radiation, disposed adjacent to the first layer of the pair of layers from said sequence of layers having the largest bandgap; electrode means formed on said window substrate layer, on the first layer of each pair of said sequence of pairs of layers other than the first layer of the first pair, and on the last layer of the last pair of said sequence of pairs of layers, whereby voltages may be applied to said electrode means to reverse bias the junctions formed at the interface between the first layer and the second layer of each pair of said sequence of pairs of layers and to forward bias the heterojunctions formed at the interface between the layers from different pairs of said sequence of pairs of layers.
Claim 18
Dependent Claim
221 words
A reduced noise avalanche detector comprising: a plurality of abutting layers of semiconductor material of alternating opposed conductivity type, said layers being grouped into a sequence of pairs of layers; characterized in that: the bandgap of the first layer and the bandgap of the second layer of each pair of said sequence of pairs of layers are substantially equal; the bandgaps of each pair of said sequence of pairs of layers are arranged in a decreasing sequence of sizes; and said reduced noise avalanche detector further comprises a window substrate layer, for accepting incident radiation, disposed adjacent to the first layer of the pair of layers from said sequence of layers having the largest bandgap; electrode means formed on said window substrate layer, on the first layer of each pair of said sequence of pairs of layers other than the first layer of the first pair, and on the last layer of the last pair of said sequence of pairs of layers, whereby voltages may be applied to said electrode means to reverse bias the junctions formed at the interface between the first layer and the second layer of each pair of said sequence of pairs of layers and to forward bias the heterojunctions formed at the interface between the layers from different pairs of said sequence of pairs of layers.
Claim 19
Dependent Claim
38 words
The reduced noise avalanche photodetector as defined in claim 14 wherein a homojunction is formed at the interface between the first layer and the second layer of at least one pair of said sequence of pairs of layers.
Claim 20
Dependent Claim
29 words
The reduced noise avalanche photodetector as defined in claim 14 wherein the second layer of at least one pair of said sequence of pairs of layers is lightly doped.
Claim 21
Dependent Claim
29 words
The reduced noise avalanche photodetector as defined in claim 15 wherein the second layer of at least one pair of said sequence of pairs of layers is lightly doped.
Claim 22
Dependent Claim
66 words
The reduced noise avalanche photodetector as defined in claim 15 wherein the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are selected from the group consisting of quaternary compounds of InGaAsP, ternary compounds of InGaAs, ternary compounds of GaAsSb, ternary compounds of InSbAs, ternary compounds of InGaSb, binary compounds of CdTe, and Ge.
Claim 23
Dependent Claim
66 words
The reduced noise avalanche photodetector as defined in claim 17 wherein the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are selected from the group consisting of quaternary compounds of InGaAsP, ternary compounds of InGaAs, ternary compounds of GaAsSb, ternary compounds of InSbAs, ternary compounds of InGaSb, binary compounds of CdTe, and Ge.
Claim 24
Dependent Claim
83 words
The reduced noise avalanche photodetector as defined in claim 14 wherein the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are chosen from the group of pairs of layers consisting of Al 1-u Ga u As/In 1-x Ga x As y P 1-y , Al 1-u Ga u As v Sb 1-v /In 1-x Ga x As y P 1-y and InP/Al 1-z (In 1-y Ga y As) z .
Claim 25
Dependent Claim
83 words
The reduced noise avalanche photodetector as defined in claim 16 wherein the materials for the first layer and the second layer from at least one pair of said sequence of pairs of layers are chosen from the group of pairs of layers consisting of Al 1-u Ga u As/In 1-x Ga x As y P 1-y , Al 1-u Ga u As v Sb 1-v /In 1-x Ga x As y P 1-y and InP/Al 1-z (In 1-y Ga y As) z .
Claim 26
Dependent Claim
21 words
The reduced noise avalanche photodetector as defined in claim 14 wherein said window substrate layer is an antireflection dielectric interference coating.
Claim 27
Dependent Claim
41 words
The reduced noise avalanche photodetector as defined in claim 14 wherein said window substrate layer is a semiconductor material having a bandgap larger than the bandgap of the first layer of the first pair of said sequence of pairs of layers.
Claim 28
Dependent Claim
44 words
The reduced noise avalanche photodetector as defined in claim 14 wherein said window substrate layer comprises an antireflection dielectric interference coating deposited on a semiconductor material having a bandgap larger than the bandgap of the first pair of said sequence of pairs of layers.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-05-13 | 1983-11-12 | 1984-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-05-13 | 1987-11-12 | 1988-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-05-13 | 1991-11-12 | 1992-05-13 | $7700.00 | Window Closed / Lapsed |