Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
104 words
Apparatus for supporting a substrate means to be operated upon, comprising chuck means for holding said substrate means, mask means disposed adjacent to said substrate means, first means for confining a first layer of thermally conductive conformable material between said mask means and said substrate means, second means for confining a second layer of thermally conductive, conformable material between said substrate and said chuck means, and charging means for establishing an electrical charge on said mask to produce a force field between said mask means and said substrate means, said first and second layers providing accurate positioning and thermal stabilization of said mask means.
Claim 2
Dependent Claim
104 words
Apparatus for supporting a substrate means to be operated upon, comprising chuck means for holding said substrate means, mask means disposed adjacent to said substrate means, first means for confining a first layer of thermally conductive conformable material between said mask means and said substrate means, second means for confining a second layer of thermally conductive, conformable material between said substrate and said chuck means, and charging means for establishing an electrical charge on said mask to produce a force field between said mask means and said substrate means, said first and second layers providing accurate positioning and thermal stabilization of said mask means.
Claim 3
Dependent Claim
28 words
The apparatus recited in claim 1 wherein said first means includes a cavity in said mask means, and said second means includes a cavity in said chuck means.
Claim 4
Dependent Claim
19 words
The apparatus recited in claim 1 wherein said first layer in said first means is of a gaseous nature.
Claim 5
Dependent Claim
19 words
The apparatus recited in claim 1 wherein said second layer in said second means is a thermally conductive liquid.
Claim 6
Dependent Claim
27 words
The apparatus recited in claim 3 wherein said gaseous layer exerts sufficient pressure to maintain said mask means spaced a prescribed distance apart from said substrate means.
Claim 7
Dependent Claim
29 words
The apparatus recited in claim 1 wherein said charging means includes filament means for emitting charged particles which are absorbed by said mask means to impart a charge thereto.
Claim 8
Dependent Claim
23 words
The apparatus recited in claim 1 wherein said charging means includes an electrical source connected between said mask means and said substrate means.
Claim 9
Dependent Claim
28 words
The apparatus recited in claim 6 including grid means disposed between said charging means and said mask means to control the charged particles emitted by said filament means.
Claim 10
Dependent Claim
57 words
The apparatus recited in claim 8 wherein said grid means includes first and second grids, said first grid disposed between said filament means and said second grid whereby said first grid controls the low energy electron current from said filament means and said second grid establishes a field free region between said grids and said mask means.
Claim 11
Dependent Claim
25 words
The apparatus recited in claim 8 including source means connected to said grid means to control the energy of electrons emitted by said filament means.
Claim 12
Dependent Claim
15 words
The apparatus recited in claim 1 wherein said mask means includes a relatively thin membrane.
Claim 13
Dependent Claim
13 words
The apparatus recited in claim 1 wherein second layer comprises a polymer material.
Claim 14
Dependent Claim
23 words
The apparatus recited in claim 1 wherein said charging means includes an electrical supply connected between said mask means and said substrate means.