US4193183A
Expired / Lapsed
US
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Infrared photolithographic process for constructing self-aligned electrodes
Assignee: National Semiconductor Corp
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Filing: 1978-06-26
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Granted: 1980-03-18
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Expires: 1998-06-26
Abstract
Abstract A process for constructing self-aligned electrodes overlying a surface of a semiconductor substrate is disclosed. The process utilizes a substrate which is substantially transparent to infrared radiation. One step of the process includes forming spaced apart ones of the electrodes with a conductive material that is highly absorbtive of infrared radiation. Subsequently, a continuous layer of heat sensitive polymer is formed over and between these spaced apart electrodes. The resulting structure is exposed to infrared radiation which heats the spaced apart electrodes. This heat polymerizes the heat sensitive polymer layer in all regions that directly overlie the spaced apart electrodes. These polymerized regions form a mask that is used to construct other electrodes between and in alignment with the spaced apart electrodes.
Inventors
- 👤 Thomas Klein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 20:37
CPC Classifications
H; H10; H10D; H10D44/00; H10D44/01; H10D44/041; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; Y; Y10; Y10S; Y10S148/00; Y10S148/004; Y10S148/093; Y10S438/00; Y10S438/942; Y10S438/945
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
194 words
A process for constructing self-aligned electrodes on an insulating layer lying on a surface of a semiconductor substrate having dopant impurity atoms of a first density comprised of the steps of: forming on said insulating layer, spaced apart polysilicon electrodes having dopant impurity atoms of a second density which is substantially greater than said first density; forming an insulating layer over said spaced apart polysilicon electrodes; forming on said insulating layer over said electrodes, a layer of polysilicon having dopant impurity atoms of a third density which is substantially less than said second density; forming a layer of image reversal material on said polysilicon layer; forming a layer of heat sensitive polymer on said image reversal layer; heating said spaced apart electrodes with infrared radiation to polymerize said heat sensitive polymer directly above said electrodes; removing the unpolymerized portions of said heat sensitive polymer layer and the underlying portions of said image reversal layer to expose the portions of said polysilicon layer lying between said spaced apart electrodes; forming an insulating layer on said exposed portions; and removing said polysilicon layer in the regions not covered by said insulating layer on said exposed portions.
Claim 2
Dependent Claim
194 words
A process for constructing self-aligned electrodes on an insulating layer lying on a surface of a semiconductor substrate having dopant impurity atoms of a first density comprised of the steps of: forming on said insulating layer, spaced apart polysilicon electrodes having dopant impurity atoms of a second density which is substantially greater than said first density; forming an insulating layer over said spaced apart polysilicon electrodes; forming on said insulating layer over said electrodes, a layer of polysilicon having dopant impurity atoms of a third density which is substantially less than said second density; forming a layer of image reversal material on said polysilicon layer; forming a layer of heat sensitive polymer on said image reversal layer; heating said spaced apart electrodes with infrared radiation to polymerize said heat sensitive polymer directly above said electrodes; removing the unpolymerized portions of said heat sensitive polymer layer and the underlying portions of said image reversal layer to expose the portions of said polysilicon layer lying between said spaced apart electrodes; forming an insulating layer on said exposed portions; and removing said polysilicon layer in the regions not covered by said insulating layer on said exposed portions.
Claim 3
Dependent Claim
17 words
A process according to claim 1, wherein said image reversal layer is Si 3 N 4 .
Claim 4
Dependent Claim
17 words
A process according to claim 1, wherein said image reversal layer is phosphorous doped SiO 2 .
Claim 5
Dependent Claim
14 words
A process according to claim 1, wherein said heat sensitive polymer is a photoresist.
Claim 6
Dependent Claim
14 words
A process according to claim 1, wherein said insulating layers are SiO 2 .
Claim 7
Dependent Claim
22 words
A process according to claim 1, wherein said second density is approximately 10 3 times larger than said first and third densities.
Claim 8
Dependent Claim
18 words
A process according to claim 1, wherein said second density is approximately 10 19 atoms/cm 3 or larger.
Claim 9
Dependent Claim
180 words
A process for constructing self-aligned electrodes on an insulating layer lying on a surface of a semiconductor substrate having dopant impurity atoms of a first density comprised of the steps of: forming on said insulating layer, spaced apart polysilicon electrodes having dopant impurity atoms of a second density which is substantially greater than said first density; forming an insulating layer over said spaced apart polysilicon electrodes; forming on said insulating layer over said electrodes, a layer of polysilicon having dopant impurity atoms of a third density which is substantially less than said second density; forming an insulating layer on said polysilicon layer; forming a layer of heat sensitive polymer on said insulating layer lying on said polysilicon layer; heating said spaced apart electrodes with infrared radiation to polymerize said heatt sensitive polymer directly above said electrodes; removing said unpolymerized portions of said heat sensitive polymer layer; removing said insulating layer under the polymerized portions of said polymer layer to expose the portions of said polysilicon layer lying directly above said electrodes; and removing said exposed portions of said polysilicon layer.
Claim 10
Dependent Claim
180 words
A process for constructing self-aligned electrodes on an insulating layer lying on a surface of a semiconductor substrate having dopant impurity atoms of a first density comprised of the steps of: forming on said insulating layer, spaced apart polysilicon electrodes having dopant impurity atoms of a second density which is substantially greater than said first density; forming an insulating layer over said spaced apart polysilicon electrodes; forming on said insulating layer over said electrodes, a layer of polysilicon having dopant impurity atoms of a third density which is substantially less than said second density; forming an insulating layer on said polysilicon layer; forming a layer of heat sensitive polymer on said insulating layer lying on said polysilicon layer; heating said spaced apart electrodes with infrared radiation to polymerize said heatt sensitive polymer directly above said electrodes; removing said unpolymerized portions of said heat sensitive polymer layer; removing said insulating layer under the polymerized portions of said polymer layer to expose the portions of said polysilicon layer lying directly above said electrodes; and removing said exposed portions of said polysilicon layer.
Claim 11
Dependent Claim
17 words
A process according to claim 8, wherein said image reversal layer is Si 3 N 4 .
Claim 12
Dependent Claim
17 words
A process according to claim 8, wherein said image reversal layer is phosphorous doped SiO 2 .
Claim 13
Dependent Claim
14 words
A process according to claim 8, wherein said heat sensitive polymer is a photoresist.
Claim 14
Dependent Claim
14 words
A process according to claim 8, wherein said insulating layers are SiO 2 .
Claim 15
Dependent Claim
22 words
A process according to claim 8, wherein said second density is approximately 10 3 times larger than said first and third densities.
Claim 16
Dependent Claim
18 words
A process according to claim 8, wherein said second density is approximately 10 19 atoms/cm 3 or larger.
Claim 17
Dependent Claim
99 words
A process for constructing self-aligned electrodes overlying a surface of a semiconductor substrate that is substantially transparent to infrared radiation including the steps of: forming spaced apart ones of said electrodes with conductive means that is highly absorbative of infrared radiation; forming a continuous layer of heat sensitive polymer means over and between said spaced apart electrodes for polymerizing in response to heat applied thereto; and exposing the resulting structure to infrared radiation to heat said spaced apart electrodes and thereby heat and polymerize said heat sensitive polymer means in the regions lying directly above said spaced apart electrodes.
Claim 18
Dependent Claim
99 words
A process for constructing self-aligned electrodes overlying a surface of a semiconductor substrate that is substantially transparent to infrared radiation including the steps of: forming spaced apart ones of said electrodes with conductive means that is highly absorbative of infrared radiation; forming a continuous layer of heat sensitive polymer means over and between said spaced apart electrodes for polymerizing in response to heat applied thereto; and exposing the resulting structure to infrared radiation to heat said spaced apart electrodes and thereby heat and polymerize said heat sensitive polymer means in the regions lying directly above said spaced apart electrodes.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-03-18 | 1983-09-17 | 1984-03-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-03-18 | 1987-09-17 | 1988-03-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-03-18 | 1991-09-17 | 1992-03-18 | $7700.00 | Window Closed / Lapsed |