US4187140A
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Method for etching silicon and a residue and oxidation resistant etchant therefor
Assignee: International Business Machines Corp
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Filing: 1978-10-11
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Granted: 1980-02-05
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Expires: 1998-10-11
Abstract
Abstract There are provided quaternary etchants comprising ethylenediamine, pyrocatechol, water and a diazine as catalyst for the etching of polycrystalline or single crystal silicon over a wide temperature and etch rate range. The etchants provide residue free dissolution, and have etch rates which are essentially unchanged when exposed to oxygen. The etch rate of the etchants can be modulated by the change in concentrations of water and/or pyrocatechol. There is also provided a method for etching polycrystalline or single crystal silicon using the etchants of this invention.
Inventors
- 👤 Melvin Berkenblit
- 👤 Arnold Reisman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 05:36
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/126; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/644; H10P50/66; H10P50/663; H10P50/667
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
88 words
A residue and oxidation resistant etchant for the controlled etching of thin silicon films comprising; from about 700 ml to about 800 ml ethylenediamine, from about 110 g to about 130 g pyrocatechol, from about 40 ml to about 100 ml of water and a diazine or a derivative thereof in the amount of about the molar equivalent to from about 5 g pyrazine/l to about 10 g pyrazine/l ethylene diamine said etchant being operable in a temperature range of from about 20° C. to about 119° C.
Claim 2
Dependent Claim
88 words
A residue and oxidation resistant etchant for the controlled etching of thin silicon films comprising; from about 700 ml to about 800 ml ethylenediamine, from about 110 g to about 130 g pyrocatechol, from about 40 ml to about 100 ml of water and a diazine or a derivative thereof in the amount of about the molar equivalent to from about 5 g pyrazine/l to about 10 g pyrazine/l ethylene diamine said etchant being operable in a temperature range of from about 20° C. to about 119° C.
Claim 3
Dependent Claim
35 words
The residue and oxidation resistant etchant of claim 1 wherein said diazine or its derivative is selected from the group consisting of 1, 4 diazine, phthalazine, pyridopyrazine, phenazine, 2,5 dimethylpyrazine, 2,6 dimethylpyrazine, tetramethylpyrazine and phenylpyrazine.
Claim 4
Dependent Claim
29 words
The residue and oxidation resistant etchant of claim 2 wherein said etchant is operable in a preferred temperature in the range from about 50° C. to about 115° C.
Claim 5
Dependent Claim
51 words
The residue and oxidation resistant etchant of claim 3 wherein said ethylenediamine is present in the amount of 750 ml, pyrocatechol in the amount of 120 grams, water in the amount of 100 ml and a diazine in the amount of about the molar equivalent of about 6 g pyrazine/l ethylenediamine.
Claim 6
Dependent Claim
14 words
The residue and oxidation resistant etchant of claim 4 wherein said diazine is pyrazine.
Claim 7
Independent Claim
122 words
A method for the controlled etching of thin silicon films including the steps of: (a) Preparing an etch solution comprising from about 700 ml to about 800 ml ethylenediamine, from about 110 g to about 130 g pyrocatechol, from about 40 ml to about 100 ml of water and a diazine or a derivative thereof in the amount of about the molar equivalent of from about 5 g pyrazine/l to about 10 g pyrazine/l ethylene diamine (b) applying said etch solution to said silicon at a temperature range of from about 20° C. to about 119° C. and for a time sufficient to effect the desired etch pattern, and thereafter (c) quenching the etching of said silicon by the addition of water.
Claim 8
Independent Claim
122 words
A method for the controlled etching of thin silicon films including the steps of: (a) Preparing an etch solution comprising from about 700 ml to about 800 ml ethylenediamine, from about 110 g to about 130 g pyrocatechol, from about 40 ml to about 100 ml of water and a diazine or a derivative thereof in the amount of about the molar equivalent of from about 5 g pyrazine/l to about 10 g pyrazine/l ethylene diamine (b) applying said etch solution to said silicon at a temperature range of from about 20° C. to about 119° C. and for a time sufficient to effect the desired etch pattern, and thereafter (c) quenching the etching of said silicon by the addition of water.
Claim 9
Dependent Claim
34 words
A method according to claim 6 wherein said diazine is selected from the group consisting of 1, 4 diazine, 1, 2 diazine, phthalazine, pyridopyrazine, phenazine, 2, 5 dimethylpyrazine, 2, 6 dimethylpyrazine, tetramethylpyrazine and phenylpyrazine.
Claim 10
Dependent Claim
27 words
A method according to claim 7 wherein said silicon is etched at a preferred temperature in the range of from about 50° C. to about 115° C.
Claim 11
Dependent Claim
49 words
A method according to claim 8 wherein said ethylenediamine is present in the amount of about 750 ml, pyrocatechol in the amount of 120 grams, water in the amount of 100 ml and a diazine in the amount of about the molar equivalent of about 6 g pyrazine/l ethylenediamine.
Claim 12
Dependent Claim
44 words
A method according to claim 9 wherein said silicon is polycrystalline and said etching is quenched by immersing said etched polycrystalline silicon in hot water for about 10 seconds to 20 seconds and thereafter flushing the same with cold water for about 2 minutes.
Claim 13
Dependent Claim
67 words
A residue and oxidation resistant fast etchant for etching silicon comprising; from about 700 ml to about 800 ml ethylenediamine, from about 200 g to about 250 g pyrocatechol, from about 200 ml to about 250 ml of water and a diazine or a derivative thereof in the amount of about the molar equivalent of from about 5 g pyrazine/l to about 10 g pyrazine/l ethylene diamine.
Claim 14
Dependent Claim
67 words
A residue and oxidation resistant fast etchant for etching silicon comprising; from about 700 ml to about 800 ml ethylenediamine, from about 200 g to about 250 g pyrocatechol, from about 200 ml to about 250 ml of water and a diazine or a derivative thereof in the amount of about the molar equivalent of from about 5 g pyrazine/l to about 10 g pyrazine/l ethylene diamine.
Claim 15
Dependent Claim
24 words
The fast etchant of claim 10 wherein said etchant is operable in a temperature range of from about 100° C. to about 119° C.
Claim 16
Dependent Claim
25 words
The fast etchant of claim 12 wherein said etchant is operable in a preferred temperature range of from about 100° C. to about 115° C.
Claim 17
Dependent Claim
18 words
The fast etchant of claim 13 wherein said pyrocatechol is present in an amount of about 240 grams.
Claim 18
Dependent Claim
56 words
The fast etchant of claim 14 wherein said ethylenediamine is present in the amount of 750 ml, pyrocatechol is present in the amount of about 240 g, water is present in the amount of about 240 ml and a diazine is present in the amount of about the molar equivalent of about 6 g pyrazine/l ethylenediamine.
Claim 19
Dependent Claim
17 words
The fast etchant of claim 15 wherein said etchant is operable at a temperature of 115° C.
Claim 20
Independent Claim
117 words
A method for rapidly etching silicon films including the steps of: (a) preparing an etchant solution comprising from about 700 ml to about 800 ml ethylenediamine, from about 200 g to about 250 g pyrocatechol, from about 200 ml to about 250 ml of water and a diazine or a derivative thereof in the amount of about the molar equivalent of from about 5 g pyrazine/l to about 10 g pyrazine/l ethylenediamine (b) applying said etch solution to said silicon at a temperature range of from about 100° C. to about 119° C. and for a time sufficient to etch the desired amount of silicon (c) quenching the etching of said silicon by the addition of water.
Claim 21
Independent Claim
117 words
A method for rapidly etching silicon films including the steps of: (a) preparing an etchant solution comprising from about 700 ml to about 800 ml ethylenediamine, from about 200 g to about 250 g pyrocatechol, from about 200 ml to about 250 ml of water and a diazine or a derivative thereof in the amount of about the molar equivalent of from about 5 g pyrazine/l to about 10 g pyrazine/l ethylenediamine (b) applying said etch solution to said silicon at a temperature range of from about 100° C. to about 119° C. and for a time sufficient to etch the desired amount of silicon (c) quenching the etching of said silicon by the addition of water.
Claim 22
Dependent Claim
30 words
A method according to claim 17 wherein said diazine is selected from the group consisting of 1,4 diazine, 1,2 diazine, phthalazine, pyridopyrazine, phenazine, 2,5 dimethylpyrazine, 2,6 dimethylpyrazine, tetramethylpyrazine and phenylpyrazine.
Claim 23
Dependent Claim
25 words
A method according to claim 18 wherein said silicon is etched at preferred temperature in the range of about 100° C. to about 115° C.
Claim 24
Dependent Claim
52 words
A method according to claim 19 wherein ethylenediamine is present in the amount of 750 ml, pyrocatechol is present in the amount of 240 grams, water is present in the amount of 240 ml and a diazine is present in the amount of about the molar equivalent of 6 g pyrazine/l ethylenediamine.
Claim 25
Dependent Claim
16 words
A method according to claim 20 wherein said etching is at a temperature of 115° C.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-02-04 | 1983-08-06 | 1984-02-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-02-04 | 1987-08-06 | 1988-02-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-02-04 | 1991-08-06 | 1992-02-05 | $7700.00 | Window Closed / Lapsed |