US4185496A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film strain gage and process therefor
Assignee: Gould Inc
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Filing: 1978-08-28
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Granted: 1980-01-29
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Expires: 1998-08-28
Abstract
Abstract A thin film strain gage is deposited on a flexure beam under controlled deposition conditions such that the dielectric parts thereof are normally in a compressive state. During use, when the strain gage is flexed in a manner tending to place parts thereof in tension, the dielectric parts are instead maintained either in compression, which is their more resistant state against mechanical fracture, or only in slight tension. Specifically, the dielectric films are deposited by sputtering with the substrate negatively biased, with the deposition rate and substrate temperature maintained at predetermined levels for enhancing compressive deposition.
Inventors
- 👤 Thomas C. Tisone
- 👤 Barry F. T. Bolker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:28
CPC Classifications
G; G01; G01L; G01L1/00; G01L1/20; G01L1/22; G01L1/2287
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
57 words
In a strain gage having thin film resistors deposited on a flexure beam, the improvement comprising: at least one dielectric film in compression when said flexure beam is unstressed, arranged between the resistors and the flexure beam; and at least one dielectric film disposed over the film resistors, and compressingly stressed when said flexure beam is unstressed.
Claim 2
Dependent Claim
57 words
In a strain gage having thin film resistors deposited on a flexure beam, the improvement comprising: at least one dielectric film in compression when said flexure beam is unstressed, arranged between the resistors and the flexure beam; and at least one dielectric film disposed over the film resistors, and compressingly stressed when said flexure beam is unstressed.
Claim 3
Dependent Claim
47 words
In a thin film strain gage including a plurality of resistors and at least one dielectric thin film arranged on a flexure beam, the improvement comprising: said at least one dielectric thin film being deposited compressively stressed on said flexure beam when said flexure beam is unstressed.
Claim 4
Dependent Claim
47 words
In a thin film strain gage including a plurality of resistors and at least one dielectric thin film arranged on a flexure beam, the improvement comprising: said at least one dielectric thin film being deposited compressively stressed on said flexure beam when said flexure beam is unstressed.
Claim 5
Dependent Claim
75 words
A strain gage construction, comprising: a flexure beam having a surface that is deflected into a curve by a force applied thereto; a first dielectric film deposited on said surface; a resistance bridge deposited on said first dielectric film; and a second dielectric film deposited over said resistance bridge; said dielectric films being deposited with inherent compression sufficient to remain in a predetermined range of stress throughout all deflections of said beam surface during use.
Claim 6
Dependent Claim
75 words
A strain gage construction, comprising: a flexure beam having a surface that is deflected into a curve by a force applied thereto; a first dielectric film deposited on said surface; a resistance bridge deposited on said first dielectric film; and a second dielectric film deposited over said resistance bridge; said dielectric films being deposited with inherent compression sufficient to remain in a predetermined range of stress throughout all deflections of said beam surface during use.
Claim 7
Dependent Claim
25 words
A thin film strain gage of claim 2 wherein said at least one dielectric thin film is disposed between said flexure beam and said resistors.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-01-28 | 1983-07-30 | 1984-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-01-28 | 1987-07-30 | 1988-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-01-28 | 1991-07-30 | 1992-01-29 | $7700.00 | Window Closed / Lapsed |