Force balancing assembly for transducers

Claim 2

A force balancing assembly for use in a force sensitive instrument comprising; a support member; a force sensing movable member means including at least one first hinge element for mounting said force sensing movable member on said support member a force restoring element; and means including at least one hinge element for mounting said force restoring element on said movable member wherein said means is effective to permit movement of said force restoring element with respect to said movable member.

Claim 3

The assembly of claim 1 wherein said support member and said movable member are substantially circular in configuration

Claim 4

The assembly of claim 1 wherein said force restoring element mounting means is secured to the opposite side of said movable member from said first hinge element.

Claim 5

The assembly of claim 1 wherein said movable member acts in conjunction with at least one pick-off element and wherein said force restoring element mounting means is aligned with an axis of the centroid of said pick-off element.

Claim 6

The assembly of claims 3 or 4 wherein said force restoring element mounting means hinge includes at least one flexure connecting said force restoring element to said movable member.

Claim 7

The assembly of claim 1 wherein said force restoring element mounting means hinge includes torsion members connecting said force restoring element to said movable member.

Claim 8

The force balancing assembly of claim 1 wherein said movable member is configured as a beam with said force restoring element secured to one end and a pick-off element secured to the other end.

Claim 9

The assembly of claim 1 wherein said movable member mounting means includes said first hinge elements arranged so as to permit said movable member to move linearly with respect to said support member.

Claim 10

A force balancing assembly for use in a force sensitive instrument comprising: a support ring; a force sensitive movable member including at least one capacitive pick-off plate; a first flexure for pendulously securing said movable member to said support ring; a force restoring coil; and a second flexure for pendulously connecting said force restoring coil to said movable member.

Claim 11

A force balancing assembly for use in a force sensitive instrument comprising: a support ring; a force sensitive movable member including at least one capacitive pick-off plate; a first flexure for pendulously securing said movable member to said support ring; a force restoring coil; and a second flexure for pendulously connecting said force restoring coil to said movable member.

Claim 12

The assembly of claim 9 wherein said first flexure is connected to the opposite side of said movable member from said second flexure.

Claim 13

The assembly of claim 9 wherein said second flexure is aligned with an axis of the centroid of said pick-off plate.

Claim 14

A proof mass assembly for use in an accelerometer that includes an upper and a lower magnet structure, comprising: a support ring interposed between and supported by the upper and lower magnet structures; a substantially planar force sensitive movable member configured to fit within said support ring including at least one capacitive pick-off plate secured to said movable member wherein said movable member is configured with a generally centrally located aperture; at least one flexure integrally connected to said ring and said movable member, effective to mount said movable member in general planar alignment with said support ring; a restoring force coil and support structure configured to fit within said aperture of said movable member; and at least one flexure integrally connected to said coil support structure and said movable member effective to mount said force coil within said aperture and to transmit a restoring force from said coil to said movable member.

Claim 15

A proof mass assembly for use in an accelerometer that includes an upper and a lower magnet structure, comprising: a support ring interposed between and supported by the upper and lower magnet structures; a substantially planar force sensitive movable member configured to fit within said support ring including at least one capacitive pick-off plate secured to said movable member wherein said movable member is configured with a generally centrally located aperture; at least one flexure integrally connected to said ring and said movable member, effective to mount said movable member in general planar alignment with said support ring; a restoring force coil and support structure configured to fit within said aperture of said movable member; and at least one flexure integrally connected to said coil support structure and said movable member effective to mount said force coil within said aperture and to transmit a restoring force from said coil to said movable member.

Claim 16

The assembly of claim 12 wherein said support ring, said movable member, each of said flexures and said force coil support structure are configured out of a unitary piece of fused quartz.

Claim 17

The assembly of claim 12 wherein said flexure connecting said support ring to said movable member is connected to said pick-off support member in a position substantially opposite to where said flexure connecting said force coil is connected to said movable member.

Claim 18

The assembly of claim 12 wherein said flexure connecting said force coil support structure to said movable member is located in alignment with an axis of the centroid of said pick-off plates.

Claim 19

A force balancing assembly for use in a force sensitive instrument comprising: a support member; a force responsive movable member; means including at least one hinge element for securing one end of said force responsive movable member to said support member; a force restoring element; means including at least one hinge element for securing said force restoring element to the other end of said movable member; and a pick-off element secured to said hinge end of said movable member.

Claim 20

A force balancing assembly for use in a force sensitive instrument comprising: a support member; a force responsive movable member; means including at least one hinge element for securing one end of said force responsive movable member to said support member; a force restoring element; means including at least one hinge element for securing said force restoring element to the other end of said movable member; and a pick-off element secured to said hinge end of said movable member.

Claim 21

The assembly of claim 16 wherein said movable element is a beam.

Claim 22

A force balancing assembly for use in a force sensitive instrument comprising: a support member; a force responsive movable member; means for securing said movable member to said support member such that said movable member is free to rotate about an axis; a force restoring element secured to said movable member by means of at least one hinge element on one side of said axis; and a pick-off element secured to said movable element on the other side of said axis.

Claim 23

A force balancing assembly for use in a force sensitive instrument comprising: a support member; a force responsive movable member; means for securing said movable member to said support member such that said movable member is free to rotate about an axis; a force restoring element secured to said movable member by means of at least one hinge element on one side of said axis; and a pick-off element secured to said movable element on the other side of said axis.

Claim 24

The assembly of claim 18 wherein said movable element is a beam and said securing means includes an axle secured to said beam along said axis.

Claim 25

The assembly of claim 19 wherein said securing means includes a pivot arrangement.

Claim 26

The assembly of claim 19 wherein said securing means includes a flexure securing each end of said axle to said support member.

Claim 27

The assembly of claim 19 wherein said securing means includes a torsional member securing each end of said axle to said support member.