US4171489A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Radiation mask structure
Assignee: AT&T Inc
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Filing: 1978-09-13
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Granted: 1979-10-16
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Expires: 1998-09-13
Abstract
Abstract {PG,1 The discovery that boron nitride and boron carbide films can be made in tension allows nondistorting radiation windows or masks to be realized. Both low and high pressure techniques for making the tensile films lead to related mask structures utilizing such films. The resulting structures are sufficiently distortion free to be useful for x-ray lithography.
Inventors
- 👤 Arthur C. Adams
- 👤 Cesar D. Capio
- 👤 Hyman J. Levinstein
- 👤 Ashok K. Sinha
- 👤 David N. Wang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 11:35
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
21 words
A radiation window arrangement comprising a tensile film of boron nitride, said film being bonded to a structurally stable support frame.
Claim 2
Dependent Claim
21 words
A radiation window arrangement comprising a tensile film of boron nitride, said film being bonded to a structurally stable support frame.
Claim 3
Dependent Claim
30 words
An arrangement in accordance with claim 1 wherein said support frame comprises Pyrex® glass and said film is formed on a layer of Kapton® stretched and bonded to said support.
Claim 4
Dependent Claim
13 words
An arrangement in accordance with claim 1 wherein said support frame comprises silicon.
Claim 5
Dependent Claim
16 words
An arrangement in accordance with claim 1 including thereon a pattern of material opaque to radiation.
Claim 6
Dependent Claim
15 words
An arrangement in accordance with claim 4 wherein said material opaque to radiation comprises gold.
Claim 7
Dependent Claim
18 words
An arrangement in accordance with claim 5 wherein said material comprises a lamellate structure of gold on tantalum.
Claim 8
Dependent Claim
37 words
An arrangement in accordance with claim 1 wherein said film is boron rich and is formed from a range of NH 3 /B 2 H 6 gas ratio in the range of from about 0.13 to 0.25.
Claim 9
Dependent Claim
25 words
An arrangement in accordance with claim 1 wherein said film is approximately stoichiometric BN and is doped with up to 10 atomic percent of silicon.
Claim 10
Dependent Claim
36 words
An arrangement in accordance with claim 8 wherein said film is formed from a gaseous mixture of SiH 4 /B 2 H 6 ≧0.07≦0.12 and NH 3 /B 2 H 6 =6.0 at 625 degrees C.
Claim 11
Dependent Claim
36 words
An arrangement in accordance with claim 7 wherein said film is boron rich and is formed from a range of NH 3 /B 2 H 6 gas ratio in the range of from 0.25 to 0.275.
Claim 12
Dependent Claim
23 words
An arrangement comprising a structurally stable ring and a transparent tensile film bonded to said ring, said film comprising an amorphous boron compound.
Claim 13
Dependent Claim
23 words
An arrangement comprising a structurally stable ring and a transparent tensile film bonded to said ring, said film comprising an amorphous boron compound.
Claim 14
Dependent Claim
35 words
An arrangement in accordance with claim 11 in which said film is boron nitride formed from a gaseous mixture of NH 3 /B 2 H 6 in a range of from about 0.13 to 0.25.
Claim 15
Dependent Claim
26 words
An arrangement in accordance with claim 12 in which said film comprises approximately stoichiometric boron nitride doped with up to about 10 atomic percent of silicon.
Claim 16
Dependent Claim
21 words
An arrangement in accordance with claim 13 in which said film is coated with relatively thin layers of BN in compression.
Claim 17
Dependent Claim
37 words
An arrangement in accordance with claim 11 in which said film is boron carbide formed from a gaseous mixture of C 2 H 2 /B 2 H 6 in a range of from about 0.03 to 0.05.
Claim 18
Dependent Claim
21 words
An arrangement in accordance with claim 12 in which said film is coated with relatively thin layers of BN in compression.
Claim 19
Dependent Claim
30 words
An arrangement in accordance with claim 1 wherein said support frame comprises Pyrex® glass and said film is formed on a layer of polyimide stretched and bonded to said support.
Claim 20
Dependent Claim
25 words
A radiation window (10) comprising a stable support frame (11), characterized by a tensile film (13) of an amorphous boron compound bonded to said frame.
Claim 21
Dependent Claim
25 words
A radiation window (10) comprising a stable support frame (11), characterized by a tensile film (13) of an amorphous boron compound bonded to said frame.
References Cited (Backward Citations)
US3742230A
Cited
US3873824A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-10-15 | 1983-04-16 | 1983-10-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-10-15 | 1987-04-16 | 1987-10-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-10-15 | 1991-04-16 | 1991-10-16 | $7700.00 | Window Closed / Lapsed |