US4167413A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Making hybrid IC with photoresist laminate
Assignee: Motorola Solutions Inc
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Filing: 1977-11-14
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Granted: 1979-09-11
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Expires: 1997-11-14
Abstract
Abstract A hybrid integrated circuit package and a method for fabricating the package. The package comprises a ceramic substrate having a blank metallization and feedthroughs screen printed thereon. A ceramic seal ring is joined to the substrate to form the side walls of the package. The substrate metallization is plated with nickel and gold and external leads are brazed to the ends of the feedthroughs. As such the package is suitable for use with a large number of different integrated circuits. The package can be adapted for use with a particular integrated circuit function by selectively patterning the blank substrate metallization. This is accomplished by laminating a preformed piece of dry film photoresist material to the package bottom. This piece of photoresist is then exposed through a photographic mask using a collimated light source.
Inventors
- 👤 Allen E. Christ
- 👤 Dennis R. Sprague
- 👤 Bernhard A. Ziegner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:38
CPC Classifications
G; G03; G03F; G03F7/00; H; H10; H10W; H10W76/00; H10W76/10; H10W76/12; H10W76/15; H10W76/157; H10W90/00; H10W95/00
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
177 words
A method for making a hybrid integrated circuit package comprising the steps of: providing a ceramic substrate member; applying a blank metallized pad to said substrate member; applying metallized feedthroughs to said substrate member extending outwardly from said blank metallized pad toward the edge of said substrate member; joining a ceramic seal ring to said substrate member to surround said blank metallized pad, said metallized feedthroughs extending outwardly from said seal ring; plating said blank metallized pad and said metallized feedthroughs; connecting external leads to said feedthroughs; and patterning said blank metallized pad surrounded by said ceramic seal ring to accommodate a particular integrated circuit by cutting a piece of dry film photoresist material to the approximate interior dimensions of said seal ring; laminating said piece of dry film photoresist material to said blank metallized pad by simultaneously applying pressure and heat to said piece; exposing said piece of dry film photoresist material through a photographic mask using a collimated light source; and etching said blank metallized pad using said dry film photoresist material as a mask.
Claim 2
Independent Claim
177 words
A method for making a hybrid integrated circuit package comprising the steps of: providing a ceramic substrate member; applying a blank metallized pad to said substrate member; applying metallized feedthroughs to said substrate member extending outwardly from said blank metallized pad toward the edge of said substrate member; joining a ceramic seal ring to said substrate member to surround said blank metallized pad, said metallized feedthroughs extending outwardly from said seal ring; plating said blank metallized pad and said metallized feedthroughs; connecting external leads to said feedthroughs; and patterning said blank metallized pad surrounded by said ceramic seal ring to accommodate a particular integrated circuit by cutting a piece of dry film photoresist material to the approximate interior dimensions of said seal ring; laminating said piece of dry film photoresist material to said blank metallized pad by simultaneously applying pressure and heat to said piece; exposing said piece of dry film photoresist material through a photographic mask using a collimated light source; and etching said blank metallized pad using said dry film photoresist material as a mask.
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein said substrate member and said seal ring are joined by firing at about 1500° C.
Claim 4
Dependent Claim
23 words
The method of claim 2 wherein said blank metallized pad and said metallized feedthroughs are electroplated with sequential layers of nickel and gold.
Claim 5
Independent Claim
129 words
A method for making a hybrid integrated circuit package comprising the steps of: providing a ceramic substrate member; applying a refractory metal pattern to said substrate member, said pattern comprising a substrate pad and electrical feedthroughs; attaching a ceramic seal ring member to said ceramic substrate, said ceramic seal ring member extending above said ceramic substrate and surrounding said substrate pad; plating a metal layer onto said refractory metal pattern; patterning said substrate pad surrounded by said ceramic seal ring member by laminating a preformed piece of dry film photoresist material to said metal layer; selectively exposing said dry film photoresist material to ultraviolet radiation and developing said material to form a desired pattern; selectively etching the metal layer using said dry film photoresist material as an etch mask.
Claim 6
Independent Claim
129 words
A method for making a hybrid integrated circuit package comprising the steps of: providing a ceramic substrate member; applying a refractory metal pattern to said substrate member, said pattern comprising a substrate pad and electrical feedthroughs; attaching a ceramic seal ring member to said ceramic substrate, said ceramic seal ring member extending above said ceramic substrate and surrounding said substrate pad; plating a metal layer onto said refractory metal pattern; patterning said substrate pad surrounded by said ceramic seal ring member by laminating a preformed piece of dry film photoresist material to said metal layer; selectively exposing said dry film photoresist material to ultraviolet radiation and developing said material to form a desired pattern; selectively etching the metal layer using said dry film photoresist material as an etch mask.
References Cited (Backward Citations)
US2736065A
Cited
US3959061A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-09-10 | 1983-03-12 | 1983-09-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-09-10 | 1987-03-12 | 1987-09-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-09-10 | 1991-03-12 | 1991-09-11 | $7700.00 | Window Closed / Lapsed |