US4166384A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor transducer
Assignee: Hitachi Ltd
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Filing: 1978-09-06
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Granted: 1979-09-04
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Expires: 1998-09-06
Abstract
Abstract A semiconductor transducer comprising an improved strain-yielding body yielding a strain in response to the impartation of a force or displacement, and a semiconductor strain gauge bonded to the strain-yielding body. The improved strain-yielding body is made of an iron-nickel-cobalt alloy containing 28.2 to 31.0% by weight of nickel and 15.0 to 19.5% by weight of cobalt. This iron-nickel-cobalt alloy is initially heated up to a temperature above 600° C. for the purpose of standard heat treatment for removing its internal strain. After the standard heat treatment, the iron-nickel-cobalt alloy is subjected to cold working at a working rate of more than and including 60%, and is then subjected to heat treatment at a temperature between 350° C. and 600° C. The heat-treated iron-nickel-cobalt alloy is shaped into the predetermined form of the strain-yielding body.
Inventors
- 👤 Yasumasa Matsuda
- 👤 Kazuji Yamada
- 👤 Satoshi Shimada
- 👤 Motohisa Nishihara
- 👤 Tomio Yasuda
- 👤 Masatoshi Tsuchiya
- 👤 Ko Soeno
- 👤 Mitsuo Ai
- 👤 Takeo Nagata
- 👤 Yoshitaka Matsuoka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:12
CPC Classifications
G; G01; G01L; G01L1/00; G01L1/20; G01L1/22; G01L1/2287; G01L1/2293; G01L9/00; G01L9/0041; G01L9/0051; G01L9/0052; G01L9/0055
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
132 words
A semiconductor transducer comprising a cantilever yielding a strain in response to the impartation of a force or displacement, said cantilever being manufactured from a block of an iron-nickel-cobalt alloy subjected to standard heat treatment including heating the block up to a temperature above 600° C. for removing its internal strain, at least one pair of semiconductor strain gauge units exhibiting a piezoresistive effect, said semiconductor strain gauge units being bonded to at least one of the surfaces of said cantilever, and a die member fixedly supporting said cantilever thereon, wherein said block providing said cantilever is subjected to cold working at a working rate of more than and including 60% after said standard heat treatment and is then subjected to heat treatment at a temperature between 350° C. and 600° C.
Claim 2
Dependent Claim
132 words
A semiconductor transducer comprising a cantilever yielding a strain in response to the impartation of a force or displacement, said cantilever being manufactured from a block of an iron-nickel-cobalt alloy subjected to standard heat treatment including heating the block up to a temperature above 600° C. for removing its internal strain, at least one pair of semiconductor strain gauge units exhibiting a piezoresistive effect, said semiconductor strain gauge units being bonded to at least one of the surfaces of said cantilever, and a die member fixedly supporting said cantilever thereon, wherein said block providing said cantilever is subjected to cold working at a working rate of more than and including 60% after said standard heat treatment and is then subjected to heat treatment at a temperature between 350° C. and 600° C.
Claim 3
Dependent Claim
28 words
A semiconductor transducer as claimed in claim 1, wherein said iron-nickel-cobalt alloy contains 28.2 to 31.0% by weight of nickel and 15.0 to 19.5% by weight of cobalt.
Claim 4
Dependent Claim
125 words
A semiconductor transducer comprising a disc-shaped diaphragm yielding a strain in response to the impartation of a force or displacement, at least one pair of semiconductor strain gauge units exhibiting a piezoresistive effect, said semiconductor strain gauge units being bonded to one of the surfaces of said disc-shaped disphragm, and a die member fixedly supporting said disc-shaped diaphragm, wherein said disc-shaped diaphragm is manufactured from a block of an iron-nickel-cobalt alloy subjected to standard heat treatment including heating the block up to a temperature above 600° C. for removing its internal strain, said block being then subjected to cold working at a working rate of more than and including 60% and finally subjected to heat treatment at a temperature between 350° C. and 600° C.
Claim 5
Dependent Claim
125 words
A semiconductor transducer comprising a disc-shaped diaphragm yielding a strain in response to the impartation of a force or displacement, at least one pair of semiconductor strain gauge units exhibiting a piezoresistive effect, said semiconductor strain gauge units being bonded to one of the surfaces of said disc-shaped disphragm, and a die member fixedly supporting said disc-shaped diaphragm, wherein said disc-shaped diaphragm is manufactured from a block of an iron-nickel-cobalt alloy subjected to standard heat treatment including heating the block up to a temperature above 600° C. for removing its internal strain, said block being then subjected to cold working at a working rate of more than and including 60% and finally subjected to heat treatment at a temperature between 350° C. and 600° C.
Claim 6
Dependent Claim
28 words
A semiconductor transducer as claimed in claim 3, wherein said iron-nickel-cobalt alloy contains 28.2 to 31.0% by weight of nickel and 15.0 to 19.5% by weight of cobalt.
References Cited (Backward Citations)
US3446064A
Cited
US4019388A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-09-03 | 1983-03-05 | 1983-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-09-03 | 1987-03-05 | 1987-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-09-03 | 1991-03-05 | 1991-09-04 | $7700.00 | Window Closed / Lapsed |