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US4164607A Expired / Lapsed US ⏱️ 0.0 years remaining

Thin film resistor having a thin layer of resistive metal of a nickel, chromium, gold alloy

Assignee: BAE Systems National Security Solutions Inc
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Filing: 1977-04-04
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Granted: 1979-08-14
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Expires: 1997-04-04
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Abstract

Abstract High stability thin film resistors are made from an alloy comprising selected portions of nickel, chromium, and gold selected in a ratio to provide the desired temperature coefficient of resistance (TCR). The resistors are made by co-depositing gold with the nickel chromium alloy by a flash evaporation process. The evaporation process is carried out by feeding a nickel chromium wire, having a gold wire extending therealong to provide the desired composition, onto a heated tungsten strip within a vacuum system with substrates disposed in a position to obtain uniform deposition of the evaporated material thereon.

Inventors

  • 👤 Ronald A. Thiel
  • 👤 Edward H. Maurer

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 01:12
CPC Classifications
H; H01; H01C; H01C7/00; H01C7/006; H01C17/00; H01C17/06; H01C17/075; H01C17/08; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12535; Y10T428/12597; Y10T428/12611; Y10T428/12771; Y10T428/12778; Y10T428/12806; Y10T428/12826; Y10T428/12847; Y10T428/12854; Y10T428/12861; Y10T428/12889; Y10T428/12944; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 50 words
A thin film resistor comprising: a substrate of insulating material defining a support surface, and a thin layer of resistive metal comprising an alloy consisting of nickel, chromium, and gold of predetermined weight percentages wherein the percentage of gold is not greater than the combined percentage of nickel and chromium.
Claim 2
Dependent Claim 50 words
A thin film resistor comprising: a substrate of insulating material defining a support surface, and a thin layer of resistive metal comprising an alloy consisting of nickel, chromium, and gold of predetermined weight percentages wherein the percentage of gold is not greater than the combined percentage of nickel and chromium.
Claim 3
Dependent Claim 27 words
The thin film resistor of claim 1, wherein the percentage of gold in said alloy is less than the percentage of either of the other two metals.
Claim 4
Dependent Claim 22 words
The thin film resistor of claim 1, wherein the percentage of gold in said alloy varies between 10% and 50% by weight.
Claim 5
Dependent Claim 19 words
The thin film resistor of claim 1, wherein said layer of resistive metal is less than 5,000 angstroms thick.
Claim 6
Dependent Claim 15 words
The thin film resistor of claim 4, wherein said film is approximately 200 angstroms thick.
Claim 7
Dependent Claim 20 words
The thin film resistor of claim 1, comprising a thin layer of nickel covering said thin layer of resistive metal.
Claim 8
Dependent Claim 18 words
The thin film resistor of claim 6, comprising a thin layer of gold covering said layer of nickel.
Claim 9
Dependent Claim 19 words
The thin film resistor of claim 7, wherein the weight ratio of chrome to nickel is 3 to 2.
Claim 10
Dependent Claim 25 words
The thin film resistor of claim 1, wherein said predetermined percentages are selected to obtain a TCR of zero parts per million per degree centigrade.
Claim 11
Dependent Claim 34 words
The thin film resistor of claim 9, wherein said weight ratio of chrome to nickel in said alloy is 3 to 2 and the weight percentage of gold of said alloy is approximately 35%.
Claim 12
Dependent Claim 19 words
The thin film resistor of claim 10, wherein said layer of resistive metal is less than 5,000 angstroms thick.
Claim 13
Dependent Claim 20 words
The thin film resistor of claim 11, comprising a thin layer of nickel covering said thin layer of resistive metal.
Claim 14
Dependent Claim 18 words
The thin film resistor of claim 12, comprising a thin layer of gold covering said layer of nickel.
Claim 15
Dependent Claim 19 words
The thin film resistor of claim 4, wherein the weight ratio of chrome to nickel is 3 to 2.
Claim 16
Dependent Claim 23 words
The thin film resistor of claim 14, wherein the weight percentage of gold in said alloy varies between 10% to 50% by weight.

References Cited (Backward Citations)

US3296574A Cited
US3578420A Cited
DE2029265A1 Cited
US3833410A Cited
US3904461A Cited
US4021277A Cited
US4019168A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1982-08-13 1983-02-12 1983-08-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1986-08-13 1987-02-12 1987-08-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1990-08-13 1991-02-12 1991-08-14 $7700.00 Window Closed / Lapsed

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