US4159909A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cathode target material compositions for magnetic sputtering
Assignee: Motorola Solutions Inc
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Filing: 1978-03-09
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Granted: 1979-07-03
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Expires: 1998-03-09
Abstract
Abstract A method for the magnetron sputtering of ferromagnetic material. An alloy of the ferromagnetic material is formed such that the alloy retains the desired characteristics of the material but the alloy has a Curie temperature that is below the sputtering temperature. In particular, the method can be applied to nickel by alloying the nickel with copper, platinum, or tin.
Inventors
- 👤 Richard W. Wilson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:19
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3426; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; H01F; H01F41/00; H01F41/14; H01F41/18; H01F41/183; H01J37/3402; H01J37/3405; H01J37/3408
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
57 words
A method for forming a cathode target for a magnetron sputtering apparatus, which comprises: forming said target of an alloy of a ferromagnetic material and a non-ferromagnetic material such that said alloy has a Curie temperature lower than the temperature attained by said cathode target during a sputtering operation and said alloy is amenable to magnetron sputtering.
Claim 2
Independent Claim
57 words
A method for forming a cathode target for a magnetron sputtering apparatus, which comprises: forming said target of an alloy of a ferromagnetic material and a non-ferromagnetic material such that said alloy has a Curie temperature lower than the temperature attained by said cathode target during a sputtering operation and said alloy is amenable to magnetron sputtering.
Claim 3
Dependent Claim
16 words
The method for forming a cathode target of claim 1 wherein said ferromagnetic material is nickel.
Claim 4
Dependent Claim
16 words
The method for forming a cathode target of claim 2 wherein said non-ferromagnetic material is copper.
Claim 5
Dependent Claim
28 words
The method for forming a cathode target of claim 2 wherein said non-ferromagnetic material is platinum present in said alloy in an amount of about forty atomic percent.
Claim 6
Dependent Claim
28 words
The method for forming a cathode target of claim 2 wherein said non-ferromagnetic material is tin present in said alloy in an amount of about ten atomic percent.
Claim 7
Dependent Claim
27 words
The method for forming a cathode target of claim 3 wherein said copper is present in said alloy in an amount between 30 and 35 atomic percent.
Claim 8
Independent Claim
46 words
a method for forming a cathode target material for use in magnetron sputter deposition which comprises forming an alloy of nickel with a sufficient amount of a non-ferromagnetic material to lower the Curie temperature of said alloy to a temperature below the normal sputter deposition temperature.
Claim 9
Independent Claim
46 words
a method for forming a cathode target material for use in magnetron sputter deposition which comprises forming an alloy of nickel with a sufficient amount of a non-ferromagnetic material to lower the Curie temperature of said alloy to a temperature below the normal sputter deposition temperature.
Claim 10
Dependent Claim
17 words
The method for forming a cathode target material of claim 7 wherein said non-ferromagnetic material is copper.
Claim 11
Dependent Claim
19 words
The method for forming a cathode target material of claim 8 comprising thirty to thirty-five atomic percent of copper.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-07-02 | 1983-01-01 | 1983-07-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-07-02 | 1987-01-01 | 1987-07-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-07-02 | 1991-01-01 | 1991-07-03 | $7700.00 | Window Closed / Lapsed |