Automated pattern inspection system

Claim 2

An automated pattern inspection system comprising: first means for measuring an area value of an object digitized pattern, second means for computing a first square value of a boundary length from said area value, third means for detecting a boundary of said object digitized pattern, fourth means for computing a second square value of a length of said boundary detected by said third means, fifth means for computing a subtraction value between said first square value from said second means and said second square value from said fourth means, and sixth means for comparing said subtraction value from said fifth means with a reference level, whereby a condition of defect in said pattern is evaluated.

Claim 3

An automated pattern inspection system as claimed in claim 1, wherein said third means comprises seventh means for detecting first type picture elements forming boundary sides either in an X or Y direction, first counting means for counting the number of said first type picture elements, eighth means for detecting second type picture elements forming boundary sides both in the X and Y directions, and second counting means for counting the number of said second type picture elements, and said fourth means comprises a first square-law multiplier for computing a square value of said number of said first type picture elements, a second square-law multiplier for computing a square value of said number of said second type picture elements, and an adder for adding said square value from said first square-law multiplier to said square value from said second square-law multiplier, thereby deriving said second square value of said length of said boundary detected by said third means.

Claim 4

An automated pattern inspection system as claimed in claim 2, wherein said seventh means has first extracting means for extracting the binary contents in three picture elements located in succession in the Y direction, second extracting means for extracting the binary contents in three picture elements located in succession in the X direction, the middle picture element of which corresponds to the middle picture element of said three picture elements in the Y direction, first gate means receiving said binary contents from said first extracting means for detecting whether the side picture elements in said three successive picture elements in the Y direction have different binary contents, second gate means receiving said binary contents from said second extracting means for detecting whether the side picture elements in the X direction have different binary contents, an OR gate receiving output signals from said first and second extracting means for producing an OR output signal representing that said middle picture element forms a part of the boundary sides either in the X or Y direction, and a first AND gate receiving said output signals from said first and second extracting means for producing an AND output signal representing that said middle picture element forms a part of the boundary sides both in the X and Y directions, said OR output signal and said AND output signal being applied to said first and second counting means, respectively.

Claim 5

An automated pattern inspection system as claimed in claim 3, wherein each of said first and second gate means has a second AND gate receiving the binary contents from said middle and one side picture elements, a third AND gate receiving the binary contents from said middle and the other side picture elements, and an exclusive OR gate receiving AND output signals from said second and third AND gates.

Claim 6

An automated pattern inspection system as claimed in claim 3, wherein said first and second extracting means are formed by a two dimensional local memory having three successive lines of shift registers, the first and second shift registers of which have register elements corresponding respectively to one horizontal line period and the third shift register of which has at least two shift register elements, said three picture elements in the Y direction being derived from second shift register elements in said first, second and third shift registers and said three picture elements in the X direction being derived from first, second and third shift register elements in said second shift register.

Claim 7

An automated pattern inspection system as claimed in claim 4, wherein said first and second extracting means are formed by a two dimensional local memory having three successive lines of shift registers, the first and second shift registers of which have register elements corresponding respectively to one horizontal line period and the third shift register of which has at least two shift register elements, said three picture elements in the Y direction being derived from second shift register elements in said first, second and third shift registers and said three picture elements in the X direction being derived from first, second and third shift register elements in said second shift register.