Micro-article processing system

Claim 2

A semiconductor bonding system comprising a feeder for feeding successively in an X-direction a number of semiconductor pellets with a given optical pattern, the pellets being arranged within a prescribed orientation as to the direction of movement; a detector for detecting a shift of a semiconductor pellet on the feeder, said detector having lighting means for applying a ray of light of a prescribed width to the semiconductor pellet, said ray extending in the direction perpendicular to the X-direction to said pellet; photoelectric converting means including a unidimensional photoelectric converting array arranged in a line in the Y-direction for receiving light bearing pattern information according to breaks in the reflected light caused by the pattern of said semiconductor pellet and giving an output signal including a pattern signal corresponding to said pattern and a reference signal indicating a datum point at each side of said pattern signal, and computing means for receiving said output signal and said reference signal, calculating the distances from said datum points to the pattern signal, and giving an output signal indicating X- and Y-directions of said semiconductor pellet on the basis of such calculation; and a bonding device having a bonding means and moving means to shift the bonding means in X- and Y-directions by the distances corresponding to the shift of the semiconductor pellet detected by said detector.

Claim 3

A system according to claim 1 wherein said pellet contains a V-shaped reflection pattern.

Claim 4

A system according to claim 2 wherein said reflection pattern comprises an aluminum film.

Claim 5

A system according to claim 1 wherein said pellet contains two opposed V-shaped reflecting patterns, the patterns with their projections forming a square.

Claim 6

A system according to claim 4 wherein said reflection patterns comprise an aluminum film.

Claim 7

A system according to claim 4, including means for detecting an angular shift in said pellet.

Claim 8

A system according to claim 2, wherein the outer edges of both legs of said V-shaped pattern are at an angle of 45 degrees with the line of direction of movement of the pellet.

Claim 9

A system according to claim 4 wherein the outer edges of both legs of each of said V-shaped patterns are at an angle of 45 degrees with the line of the direction of movement of the pellet.

Claim 10

A semiconductor bonding system comprising a feeder for feeding successively in an X-direction a number of semiconductor pellets with a given optical pattern, the pellets being arranged within a prescribed orientation as to the direction of movement; a detector for detecting a shift of a semiconductor pellet on the feeder, said detector having lighting means for applying a ray of light of a prescribed width to the semiconductor pellet, said lighting means including an optical system for applying a slit beam extending in the direction perpendicular to the X-direction to said pellet; photoelectric converting means for receiving light-bearing pattern information according to the pattern of said semiconductor pellet and giving an output signal including a pattern signal corresponding to said pattern and a reference signal indicating a datum point at each side of said pattern signal, said photoelectric converting means including a unidimensional photoelectric converting array having a number of uniform photoelectric converting elements arranged in a line in the Y-direction to receive reflected light of said beam from said pellet to give a pattern signal, photoelectric converting elements on both sides of the array providing said datum points, and computing means for receiving said output signal and said reference signal, calculating the distances from said datum points to the pattern signal, and giving an output signal indicating X- and Y-directions of said semiconductor pellet on the basis of such calculations; and a bonding device having bonding means and moving means to shift the bonding means in X- and Y-directions by the distances corresponding to the shift of the semiconductor pellet detected by said detector.

Claim 11

A semiconductor bonding system comprising a feeder for feeding successively in an X-direction a number of semiconductor pellets with a given optical pattern, the pellets being arranged within a prescribed orientation as to the direction of movement; a detector for detecting a shift of a semiconductor pellet on the feeder, said detector having lighting means for applying a ray of light of a prescribed width to the semiconductor pellet, said lighting means including an optical system for applying a slit beam extending in the direction perpendicular to the X-direction to said pellet; photoelectric converting means for receiving light-bearing pattern information according to the pattern of said semiconductor pellet and giving an output signal including a pattern signal corresponding to said pattern and a reference signal indicating a datum point at each side of said pattern signal, said photoelectric converting means including a unidimensional photoelectric converting array having a number of uniform photoelectric converting elements arranged in a line in the Y-direction to receive reflected light of said beam from said pellet to give a pattern signal, photoelectric converting elements on both sides of the array providing said datum points, and computing means for receiving said output signal and said reference signal, calculating the distances from said datum points to the pattern signal, and giving an output signal indicating X- and Y-directions of said semiconductor pellet on the basis of such calculations; and a bonding device having bonding means and moving means to shift the bonding means in X- and Y-directions by the distances corresponding to the shift of the semiconductor pellet detected by said detector.

Claim 12

A system according to claim 9 wherein said computing means gives a signal indicating a shift of the pellet in the Y-direction by calculating the respective distances between the photoelectric element giving said pattern signal and each of said datum point photoelectric elements as a function of the number of photoelectric elements disposed therebetween.

Claim 13

A system according to claim 10 wherein the X- and Y-direction relationships of said pattern are predetermined and said computing circuit gives a signal indicating the shift of the pellet in the X-direction derived from said shift in the Y-direction.

Claim 14

A system according to claim 9 wherein said photoelectric converting means is provided with a deflecting means for leading the light from a pellet to said photoelectric converting element array by changing the optical relative position of said pellet to said photoelectric converting element array.

Claim 15

A system according to claim 9 wherein said lighting means emits the beam outside of the pellet and said photoelectric converting means receives no reflected light of the portion of the beam outside the pellet.