Focusing ion accelerator

Claim 2

A low perveance focusing ion accelerator for producing an ion beam along an axis comprising: a screen electrode having a beam opening therein on said axis; means for producing ionic plasma upstream from the said beam opening; means for extracting and focussing an ion beam from said plasma through said beam opening, said means for extracting and focussing comprising an intermediate electrode and a final electrode, said intermediate electrode and said final electrode each having a beam opening therein on said axis, said beam openings being in alignment on said axis so that an ion beam can be delivered therethrough, said intermediate electrode being positioned between said screen electrode and said final electrode and configured to correspond to the shape of a selected equipotential voltage; means connected to said screen electrode, said intermediate electrode and said final electrode for maintaining selected relative potentials therebetween; and means for controlling the plasma density, said means for maintaining being connected to maintain substantially consistant the final electrode voltage while the intermediate electrode voltage is changed, and said means for controlling the plasma density changing the plasma density in accordance with intermediate electrode voltage to produce a beam of constant energy, and with beam focus and current varying with changes in intermediate electrode voltage.

Claim 3

The focusing ion accelerator of claim 1 wherein said means for controlling the potential on said electrodes includes means for adjusting the potential of said intermediate electrode above and below the potential of the preselected equipotential position on which said intermediate electrode is positioned.

Claim 4

A low perveance focussing ion accelerator for producing an ion beam along an axis comprising: a screen electrode having a beam opening therein on said axis; means for producing ionic plasma upstream from said beam opening; means for extracting and focussing an ion beam from said plasma through said beam opening, said means for extracting and focussing comprising an intermediate electrode and a final electrode, said intermediate electrode and said final electrode each having a beam opening therein on said axis, said beam openings being in alignment on said axis so that an ion beam can be delivered therethrough, said intermediate electrode being positioned between said screen electrode and said final electrode and configured to correspond to the shape of a selected equipotential voltage; means connected to said screen electrode, said intermediate electrode and said final electrode for maintaining selected relative potentials therebetween and including means for adjusting the potential of said intermediate electrode above and below the potential o the preselected equipotential position on which said intermediate electrode is positioned; and means for controlling the plasma density, said means for maintaining hoding the final electrode voltage substantially constant while the intermediate electrode voltage is changed, and the plasma density is changed in accordance with intermediate electrode voltage to produce a beam of constant energy, and with beam focus and current varying with changes in intermediate electrode voltage.

Claim 5

A low perveance focussing ion accelerator for producing an ion beam along an axis comprising: a screen electrode having a beam opening therein on said axis; means for producing ionic plasma upstream from said beam opening; means for extracting and focussing an ion beam from said plasma through said beam opening, said means for extracting and focussing comprising an intermediate electrode and a final electrode, said intermediate electrode and said final electrode each having a beam opening therein on said axis, said beam openings being in alignment on said axis so that an ion beam can be delivered therethrough, said intermediate electrode being positioned between said screen electrode and said final electrode and configured to correspond to the shape of a selected equipotential voltage; means connected to said screen electrode, said intermediate electrode and said final electrode for maintaining selected relative potentials therebetween and including means for adjusting the potential of said intermediate electrode above and below the potential o the preselected equipotential position on which said intermediate electrode is positioned; and means for controlling the plasma density, said means for maintaining hoding the final electrode voltage substantially constant while the intermediate electrode voltage is changed, and the plasma density is changed in accordance with intermediate electrode voltage to produce a beam of constant energy, and with beam focus and current varying with changes in intermediate electrode voltage.

Claim 6

A low perveance focussing ion accelerator for producing an ion beam along an axis comprising: a screen electrode having a beam opening therein on said axis; means for producing ionic plasma upstream from said beam opening and for controlling the density of the ionic plasma; means for extracting and focussing an ion beam from said plasma through said beam opening, said means for extracting and focussing comprising an intermediate electrode and a final electrode, said intermediate electrode and said final electrode each having a beam opening therein on said axis, said beam openings being in alignment on said axis so that an ion beam can be delivered therethrough, said intermediate electrode being positioned between said screen electrode and said final electrode and configured to correspond to the shape of a selected equipotential voltage; and means connected to said screen electrode, said intermediate electrode and said final electrode for maintaining selected relative potentials therebetween, including means for adjusting the potential of said intermediate electrode above and below the potential of the preselected equipotential position on which said intermediate electrode is positioned so that said plasma density and intermediate electrode voltage are held constant while said means for maintaining potential varies the voltage on said final electrode to provide a beam of varied focus and beam voltage with constant current.

Claim 7

A low perveance focussing ion accelerator for producing an ion beam along an axis comprising: a screen electrode having a beam opening therein on said axis; means for producing ionic plasma upstream from said beam opening and for controlling the density of the ionic plasma; means for extracting and focussing an ion beam from said plasma through said beam opening, said means for extracting and focussing comprising an intermediate electrode and a final electrode, said intermediate electrode and said final electrode each having a beam opening therein on said axis, said beam openings being in alignment on said axis so that an ion beam can be delivered therethrough, said intermediate electrode being positioned between said screen electrode and said final electrode and configured to correspond to the shape of a selected equipotential voltage; and means connected to said screen electrode, said intermediate electrode and said final electrode for maintaining selected relative potentials therebetween, including means for adjusting the potential of said intermediate electrode above and below the potential of the preselected equipotential position on which said intermediate electrode is positioned so that said plasma density and intermediate electrode voltage are held constant while said means for maintaining potential varies the voltage on said final electrode to provide a beam of varied focus and beam voltage with constant current.

Claim 8

The low perveance ion accelerator of claim 1 wherein said plasma sheath at said beam opening is substantially planar and normal to said axis so that an ion beam is produced along said axis of particles moving along said axis in substantially parallel directions.

Claim 9

The low perveance ion accelerator of claim 1 wherein said screen electrode and said final electrode are shaped to produce equipotentials at said beam axis substantially normal to said beam axis.

Claim 10

A low perveance focusing ion accelerator for producing an ion beam along an axis comprising: a screen electrode having a beam opening therein on said axis; means for producing ionic plasma upstream from said beam opening; means for extracting and focussing an ion beam from said plasma through said beam opening, said means for extracting and focussing comprising an intermediate electrode and a final electrode, said intermediate electrode and said final electrode each having a beam opening therein on said axis, said beam openings being in alignment on said axis so that an ion beam can be delivered therethrough, said intermediate electrode being positioned between said screen electrode and said final electrode and configured to correspond to the shape of a selected equipotential voltage; and means connected to said screen electrode, said intermediate electrode and said final electrode to maintain selected relative potentials therebetween, the electrode perveance of said ion accelerator being below about P e = 1 × 10 -7 amps-volts -3/2 .

Claim 11

A low perveance focusing ion accelerator for producing an ion beam along an axis comprising: a screen electrode having a beam opening therein on said axis; means for producing ionic plasma upstream from said beam opening; means for extracting and focussing an ion beam from said plasma through said beam opening, said means for extracting and focussing comprising an intermediate electrode and a final electrode, said intermediate electrode and said final electrode each having a beam opening therein on said axis, said beam openings being in alignment on said axis so that an ion beam can be delivered therethrough, said intermediate electrode being positioned between said screen electrode and said final electrode and configured to correspond to the shape of a selected equipotential voltage; and means connected to said screen electrode, said intermediate electrode and said final electrode to maintain selected relative potentials therebetween, the electrode perveance of said ion accelerator being below about P e = 1 × 10 -7 amps-volts -3/2 .

Claim 12

A low perveance focussing ion accelerator for producing an ion beam along an axis comprising: a screen electrode having a beam opening therein on said axis; means for producing ionic plasma upstream from said beam opening; means for extracting and focussing an ion beam from said plasma through said beam opening, said means for extracting and focussing comprising an intermediate electrode and a final electrode, said intermediate electrode and said final electrode each having a beam opening therein on said axis, said beam openings being in alignment on said axis so that an ion beam can be delivered therethrough, said intermediate electrode being positioned between said screen electrode and said final electrode and configured to correspond to the shape of a selected equipotential voltage; means connected to said screen electrode, said intermediate electrode and said final electrode to maintain selected relative potentials therebetween; and means for controlling the plasma density, said means for controlling the plasma density holding the plasma density constant and said means connected to said screen electrode and said intermediate electrode holding the voltage therebetween constant while said means connected to said final electrode varies the final electrode voltage to provide a beam of varied focus and beam voltage with constant current.

Claim 13

A low perveance focussing ion accelerator for producing an ion beam along an axis comprising: a screen electrode having a beam opening therein on said axis; means for producing ionic plasma upstream from said beam opening; means for extracting and focussing an ion beam from said plasma through said beam opening, said means for extracting and focussing comprising an intermediate electrode and a final electrode, said intermediate electrode and said final electrode each having a beam opening therein on said axis, said beam openings being in alignment on said axis so that an ion beam can be delivered therethrough, said intermediate electrode being positioned between said screen electrode and said final electrode and configured to correspond to the shape of a selected equipotential voltage; means connected to said screen electrode, said intermediate electrode and said final electrode to maintain selected relative potentials therebetween; and means for controlling the plasma density, said means for controlling the plasma density holding the plasma density constant and said means connected to said screen electrode and said intermediate electrode holding the voltage therebetween constant while said means connected to said final electrode varies the final electrode voltage to provide a beam of varied focus and beam voltage with constant current.