US4146810A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Radiation heated acceleration
Assignee: International Business Machines Corp
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Filing: 1977-12-29
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Granted: 1979-03-27
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Expires: 1997-12-29
Abstract
Abstract In an ion implantation apparatus, a beam defining member such as the acceleration plate is constructed such that the member is maintained at a temperature above the condensation point of the vapor emanating from the source of charged particles, thereby preventing the vapor from condensing on the member and providing a self-cleaning effect.
Inventors
- 👤 William W. Hicks
- 👤 John H. Keller
- 👤 Joseph H. Koestner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:43
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/08; H01J37/09
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
85 words
In charged particle apparatus having a source of charged particles and a target toward which charged particles are directed, charged particle beam-defining means along the path from said source to said target comprising: a beam-shaping member having a beam-shaping aperture formed therein and capable of absorbing sufficient radiant heat from said source, so as to raise said member to a temperature above the condensation point of the vapor emanating from said source; and means for maintaining said member at a temperature above said condensation point.
Claim 2
Dependent Claim
85 words
In charged particle apparatus having a source of charged particles and a target toward which charged particles are directed, charged particle beam-defining means along the path from said source to said target comprising: a beam-shaping member having a beam-shaping aperture formed therein and capable of absorbing sufficient radiant heat from said source, so as to raise said member to a temperature above the condensation point of the vapor emanating from said source; and means for maintaining said member at a temperature above said condensation point.
Claim 3
Dependent Claim
22 words
The apparatus of claim 1 wherein said beam-shaping member includes a sheet of high spectral emissivity in face relationship with said source.
Claim 4
Dependent Claim
10 words
The apparatus of claim 1 wherein said sheet comprises tantalum.
Claim 5
Dependent Claim
30 words
The apparatus of claim 1 wherein said means for maintaining the member above the condensation point comprises a support adjacent said member having low spectral emissivity and/or poor thermal conductivity.
Claim 6
Dependent Claim
14 words
The apparatus of claim 4 wherein said support is slightly spaced from said sheet.
Claim 7
Dependent Claim
14 words
The apparatus of claim 4 wherein said support is formed of an insulative material.
Claim 8
Dependent Claim
23 words
The apparatus of claim 5 wherein said support is formed of material selected from the group consisting of copper, stainless steel, and ceramic.
Claim 9
Dependent Claim
23 words
The apparatus of claim 7 wherein said sheet is formed of a material selected from the group consisting of tantalum, titanium, and graphite.
Claim 10
Dependent Claim
14 words
The apparatus of claim 1 wherein said beam shaping member is an acceleration electrode.
Claim 11
Dependent Claim
10 words
The apparatus of claim 8 wherein said vapor includes arsenic.
References Cited (Backward Citations)
US3631282A
Cited
US4011449A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-03-26 | 1982-09-25 | 1983-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-03-26 | 1986-09-25 | 1987-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-03-26 | 1990-09-25 | 1991-03-27 | $7700.00 | Window Closed / Lapsed |