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US4145470A Expired / Lapsed US ⏱️ 0.0 years remaining

Film resistor having a reduced temperature coefficient of resistance

Assignee: Nikon Corp
•
Filing: 1977-04-29
•
Granted: 1979-03-20
•
Expires: 1997-04-29
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Abstract

Abstract In a film resistor comprising a substrate of insulative material and a film of Cermet formed as resistance material on the substrate, a protective film of insulative material is formed on the surface of the film of Cermet to reduce the temperature coefficient of resistance of the film resistor. The protective film is formed of magnesium fluoride.

Inventors

  • 👤 Masaaki Matsuura

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 18:15
CPC Classifications
H; H01; H01C; H01C7/00; H01C7/06; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49082; Y10T29/49087; Y10T29/49098; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 57 words
A film resistor having a low temperature coefficient of resistance comprising a substrate of insulative material, a film of Cermet formed on the substrate as a resistance, and a protective film of insulative material formed on the Cermet film to reduce the temperature coefficient of resistance, the protective film being formed of magnesium fluoride (MgF 2 ).
Claim 2
Dependent Claim 57 words
A film resistor having a low temperature coefficient of resistance comprising a substrate of insulative material, a film of Cermet formed on the substrate as a resistance, and a protective film of insulative material formed on the Cermet film to reduce the temperature coefficient of resistance, the protective film being formed of magnesium fluoride (MgF 2 ).
Claim 3
Dependent Claim 39 words
A film resistor according to claim 1, further comprising an electrode film provided on said substrate and electrically connected to said film of Cermet, part of said electrode film overlapping part of the surface of said film of Cermet.
Claim 4
Dependent Claim 34 words
A film resistor according to claim 2, wherein said film of Cermet is composed of the order of 60-40% by weight of chromium and of the order of 40-60% by weight of silicon monoxide.
Claim 5
Dependent Claim 38 words
A film resistor according to claim 3, wherein said film of Cermet has a thickness of the order of 0.08 to 2.00 microns and said protective film has a thickness of the order of 0.03 to 2.00 microns.
Claim 6
Dependent Claim 17 words
A film resistor according to claim 4, wherein said substrate of insulative material is composed of glass.
Claim 7
Dependent Claim 17 words
A film resistor according to claim 4, wherein said substrate of insulative material is composed of alumina.
Claim 8
Independent Claim 64 words
A method of making a film resistor having a reduced temperature coefficient of resistance, comprising the steps of evaporating a film of Cermet as a resistance material onto a substrate of insulative material while heating said substrate, and evaporating onto the surface of said film of Cermet an insulative protective film formed of magnesium fluoride while heating said substrate and said film of Cermet.
Claim 9
Independent Claim 64 words
A method of making a film resistor having a reduced temperature coefficient of resistance, comprising the steps of evaporating a film of Cermet as a resistance material onto a substrate of insulative material while heating said substrate, and evaporating onto the surface of said film of Cermet an insulative protective film formed of magnesium fluoride while heating said substrate and said film of Cermet.
Claim 10
Dependent Claim 33 words
A method according to claim 7, wherein the heating temperature during the evaporation of said film of Cermet and said protective film is of the order of between 285° C and 315° C.
Claim 11
Dependent Claim 26 words
A method according to claim 7, further comprising the step of subjecting said film resistor to a heat treatment after the evaporation of said protective film.
Claim 12
Dependent Claim 33 words
A method according to claim 9, wherein said heat treatment comprises leaving said film resistor in air at a temperature of between about 300° C and 350° C for 2 to 4 hours.
Claim 13
Dependent Claim 37 words
A method according to claim 10, wherein after the evaporation of said film of Cermet, an electrode film is evaporated so that part of said film of Cermet and part of said electrode film overlap each other.

References Cited (Backward Citations)

US2761945A Cited
US3203830A Cited
US3356982A Cited
US3380156A Cited
US4038517A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1982-03-19 1982-09-18 1983-03-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1986-03-19 1986-09-18 1987-03-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1990-03-19 1990-09-18 1991-03-20 $7700.00 Window Closed / Lapsed

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