US4144464A
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Device and method for noresonantly Raman shifting ultraviolet radiation
Assignee: United States Department of Energy
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Filing: 1978-01-25
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Granted: 1979-03-13
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Expires: 1998-01-25
Abstract
Abstract A device and method for nonresonantly Raman shifting broad band uv excimer laser radiation, which enhances preselected Stokes signals by varying the pressure of the Raman scattering medium, the focal interaction length of the incident radiation within the Raman scattering medium and its power density level. Gaseous molecular H 2 , D 2 , CH 4 (methane), HD and mixes thereof, and liquid N 2 are used as the Raman scattering medium to frequency shift the outputs of high power KrF and ArF lasers. A cable fed discharge with an unstable resonant cavity configuration is utilized to produce the output laser power levels required for operation.
Inventors
- 👤 Thomas R. Loree
- 👤 Dean L. Barker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 13:28
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/30; H01S3/305
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
62 words
A method of shifting ultraviolet radiation comprising: retaining a molecular gaseous medium in an irradiation cell at a preselected pressure; irradiating said molecular gaseous medium with said ultraviolet radiation at a predetermined power density and predetermined focal interaction length; enhancing power output of a preselected frequency signal by varying said preselected pressure, said predetermined power density and said predetermined focal interaction length.
Claim 2
Independent Claim
62 words
A method of shifting ultraviolet radiation comprising: retaining a molecular gaseous medium in an irradiation cell at a preselected pressure; irradiating said molecular gaseous medium with said ultraviolet radiation at a predetermined power density and predetermined focal interaction length; enhancing power output of a preselected frequency signal by varying said preselected pressure, said predetermined power density and said predetermined focal interaction length.
Claim 3
Independent Claim
79 words
A method of optimizing a preselected Stokes signal comprising: retaining a molecular gaseous medium in an irradiation cell at a preselected pressure; irradiating said molecular gaseous medium with ultraviolet radiation at a predetermined power density and focal interaction length to generate Raman shifted ultraviolet radiation; enhancing power output of said preselected Stokes signal by adjusting said preselected pressure such that increases of said preselected pressure above the saturated gain pressure increase the Raman conversion to lower order Stokes signals.
Claim 4
Independent Claim
79 words
A method of optimizing a preselected Stokes signal comprising: retaining a molecular gaseous medium in an irradiation cell at a preselected pressure; irradiating said molecular gaseous medium with ultraviolet radiation at a predetermined power density and focal interaction length to generate Raman shifted ultraviolet radiation; enhancing power output of said preselected Stokes signal by adjusting said preselected pressure such that increases of said preselected pressure above the saturated gain pressure increase the Raman conversion to lower order Stokes signals.
Claim 5
Independent Claim
117 words
A method of optimizing a preselected Stokes signal comprising: retaining a molecular gaseous medium in an irradiation cell at a preselected pressure; irradiating said molecular gaseous medium with ultraviolet radiation at a predetermined power density and focal interaction length to generate Raman shifted ultraviolet radiation; enhancing power output of said preselected Stokes signal by adjusting said preselected pressure, said predetermined power density and focal interaction length such that increases of said preselected pressure above the saturated gain pressure increase Raman conversion to lower order Stokes signals, while increases in said predetermined power density increase Raman conversion to higher order Stokes signals and increases in said predetermined focal interaction length increase Raman conversion to higher order Stokes signals.
Claim 6
Independent Claim
117 words
A method of optimizing a preselected Stokes signal comprising: retaining a molecular gaseous medium in an irradiation cell at a preselected pressure; irradiating said molecular gaseous medium with ultraviolet radiation at a predetermined power density and focal interaction length to generate Raman shifted ultraviolet radiation; enhancing power output of said preselected Stokes signal by adjusting said preselected pressure, said predetermined power density and focal interaction length such that increases of said preselected pressure above the saturated gain pressure increase Raman conversion to lower order Stokes signals, while increases in said predetermined power density increase Raman conversion to higher order Stokes signals and increases in said predetermined focal interaction length increase Raman conversion to higher order Stokes signals.
Claim 7
Independent Claim
69 words
A device for optimizing a preselected Stokes signal comprising: irradiation cell means containing a molecular gaseous medium at a preselected pressure; means for focusing coherent ultraviolet radiation at a predetermined power density and focal interaction length within said irradiation cell means to nonresonantly Raman shift said coherent ultraviolet radiation; means for modifying said preselected pressure of said molecular gaseous medium to enhance power output of said preselected Stokes signal.
Claim 8
Independent Claim
69 words
A device for optimizing a preselected Stokes signal comprising: irradiation cell means containing a molecular gaseous medium at a preselected pressure; means for focusing coherent ultraviolet radiation at a predetermined power density and focal interaction length within said irradiation cell means to nonresonantly Raman shift said coherent ultraviolet radiation; means for modifying said preselected pressure of said molecular gaseous medium to enhance power output of said preselected Stokes signal.
Claim 9
Dependent Claim
14 words
The device of claim 4 wherein said molecular gaseous medium comprises H 2 .
Claim 10
Dependent Claim
14 words
The device of claim 4 wherein said molecular gaseous medium comprises D 2 .
Claim 11
Dependent Claim
12 words
The device of claim 4 wherein said molecular gaseous medium comprises methane.
Claim 12
Dependent Claim
20 words
The device of claim 4 wherein said molecular gaseous medium comprises a mixture of H 2 and D 2 .
Claim 13
Dependent Claim
12 words
The device of claim 4 wherein said molecular gaseous medium comprises HD.
Claim 14
Dependent Claim
18 words
The device of claim 4 wherein said molecular gaseous medium comprises a mixture of H 2 and methane.
Claim 15
Independent Claim
109 words
A device for generating coherent radiation at a predetermined wavelength in the ultraviolet spectral region comprising: means for producing a coherent ultraviolet output signal; irradiation cell means containing a molecular gaseous medium at a preselected pressure; means for focusing said coherent ultraviolet output signal at a predetermined power density and predetermined focal interaction length within said irradiation cell means to nonresonantly Raman shift said coherent ultraviolet output signal; means for adjusting said preselected pressure to optimize a preselected Stokes signal of said nonresonantly Raman shifted coherent ultraviolet output signal such that increases of said preselected pressure above the saturated gain pressure increase Raman conversion to lower order Stokes signals.
Claim 16
Independent Claim
109 words
A device for generating coherent radiation at a predetermined wavelength in the ultraviolet spectral region comprising: means for producing a coherent ultraviolet output signal; irradiation cell means containing a molecular gaseous medium at a preselected pressure; means for focusing said coherent ultraviolet output signal at a predetermined power density and predetermined focal interaction length within said irradiation cell means to nonresonantly Raman shift said coherent ultraviolet output signal; means for adjusting said preselected pressure to optimize a preselected Stokes signal of said nonresonantly Raman shifted coherent ultraviolet output signal such that increases of said preselected pressure above the saturated gain pressure increase Raman conversion to lower order Stokes signals.
Claim 17
Dependent Claim
14 words
The device of claim 11 wherein said molecular gaseous medium comprises H 2 .
Claim 18
Dependent Claim
14 words
The device of claim 11 wherein said molecular gaseous medium comprises D 2 .
Claim 19
Dependent Claim
12 words
The device of claim 1 wherein said molecular gaseous medium comprises methane.
Claim 20
Dependent Claim
20 words
The device of claim 11 wherein said molecular gaseous medium comprises a mixture of H 2 and D 2 .
Claim 21
Dependent Claim
12 words
The device of claim 11 wherein said molecular gaseous medium comprises HD.
Claim 22
Dependent Claim
18 words
The device of claim 11 wherein said molecular gaseous medium comprises a mixture of H 2 and methane.
Claim 23
Independent Claim
111 words
A device for optimizing a preselected Stokes signal comprising: irradiation cell means containing a molecular gaseous medium at a preselected pressure; means for focusing coherent ultraviolet radiation at a predetermined power density and focal interaction length within said irradiation cell means to nonresonantly Raman shift said coherent ultraviolet radiation; means for modifying said preselected pressure and said predetermined power density and focal interaction length such that higher pressures of said molecular gaseous medium above the saturated gain pressure increase Raman conversion to lower order Stokes signals, while greater power densities increase Raman conversion to higher order Stokes signals and longer focal interaction lengths increase Raman conversion to higher order Stokes signals.
Claim 24
Independent Claim
111 words
A device for optimizing a preselected Stokes signal comprising: irradiation cell means containing a molecular gaseous medium at a preselected pressure; means for focusing coherent ultraviolet radiation at a predetermined power density and focal interaction length within said irradiation cell means to nonresonantly Raman shift said coherent ultraviolet radiation; means for modifying said preselected pressure and said predetermined power density and focal interaction length such that higher pressures of said molecular gaseous medium above the saturated gain pressure increase Raman conversion to lower order Stokes signals, while greater power densities increase Raman conversion to higher order Stokes signals and longer focal interaction lengths increase Raman conversion to higher order Stokes signals.
Claim 25
Dependent Claim
14 words
The device of claim 18 wherein said molecular gaseous medium comprises H 2 .
Claim 26
Dependent Claim
14 words
The device of claim 18 wherein said molecular gaseous medium comprises D 2 .
Claim 27
Dependent Claim
12 words
The device of claim 18 wherein said molecular gaseous medium comprises methane.
Claim 28
Dependent Claim
20 words
The device of claim 18 wherein said molecular gaseous medium comprises a mixture of H 2 and D 2 .
Claim 29
Dependent Claim
12 words
The device of claim 18 wherein said molecular gaseous medium comprises HD.
Claim 30
Dependent Claim
18 words
The device of claim 18 wherein said molecular gaseous medium comprises a mixture of H 2 and methane.
Claim 31
Independent Claim
142 words
A device for generating coherent radiation at a predetermined wavelength in the ultraviolet spectral region comprising: means for producing a coherent ultraviolet output signal; irradiation cell means containing a molecular gaseous medium at a preselected pressure; means for focusing said coherent ultraviolet output signal at a plurality of predetermined power densities and focal interaction lengths within said irradiation cell means to nonresonantly Raman shift said coherent ultraviolet output signal; means for adjusting said preselected pressure to optimize a preselected Stokes signal of said nonresonantly Raman shifted coherent ultraviolet output signal; whereby increases of said preselected pressure above the saturated gain pressure increase Raman conversion to lower order Stokes signals, while increases in said predetermined power density increase the Raman conversion to higher order Stokes signals and increases in said predetermined focal interaction length increase the Raman conversion to higher order Stokes signals.
Claim 32
Independent Claim
142 words
A device for generating coherent radiation at a predetermined wavelength in the ultraviolet spectral region comprising: means for producing a coherent ultraviolet output signal; irradiation cell means containing a molecular gaseous medium at a preselected pressure; means for focusing said coherent ultraviolet output signal at a plurality of predetermined power densities and focal interaction lengths within said irradiation cell means to nonresonantly Raman shift said coherent ultraviolet output signal; means for adjusting said preselected pressure to optimize a preselected Stokes signal of said nonresonantly Raman shifted coherent ultraviolet output signal; whereby increases of said preselected pressure above the saturated gain pressure increase Raman conversion to lower order Stokes signals, while increases in said predetermined power density increase the Raman conversion to higher order Stokes signals and increases in said predetermined focal interaction length increase the Raman conversion to higher order Stokes signals.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-03-12 | 1982-09-11 | 1983-03-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-03-12 | 1986-09-11 | 1987-03-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-03-12 | 1990-09-11 | 1991-03-13 | $7700.00 | Window Closed / Lapsed |