US4135286A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering target fabrication method
Assignee: RTX Corp
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Filing: 1977-12-22
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Granted: 1979-01-23
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Expires: 1997-12-22
Abstract
Abstract A method for producing a cooled sputtering target assembly is described. The resultant target is also described. The material to be sputtered is provided in the form of powder which is hot isostatically pressed in a toroidal metallic container under conditions which promote compaction and bonding of the powder particles to form a fully dense material. The container is then partially removed from the target material except for a remnant around the outer surface. A cooling jacket is then fabricated and attached to the remnant of the container.
Inventors
- 👤 Robert J. Wright
- 👤 Ralph J. Hecht
- 👤 Richard J. Fenton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 22:14
CPC Classifications
B; B22; B22F; B22F7/00; B22F7/06; B22F7/08; B22F5/00; B22F5/10; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
108 words
A method for fabricating a fluid cooled sputtering target including the steps of: a. providing a toroidal container formed from a ductile metal; b. filling the container with a powder material whose composition is that of the desired target; c. evacuating the filled container and sealing it so as to maintain the powder filled container in an evacuated condition; d. isostatically compacting the container at an elevated temperature selected so that the powder is densified and bonded to the container; e. removing the container from the densified powder material except for a remnant around the outer periphery; f. joining a fluid cooling means to the outer contour remnant.
Claim 2
Independent Claim
108 words
A method for fabricating a fluid cooled sputtering target including the steps of: a. providing a toroidal container formed from a ductile metal; b. filling the container with a powder material whose composition is that of the desired target; c. evacuating the filled container and sealing it so as to maintain the powder filled container in an evacuated condition; d. isostatically compacting the container at an elevated temperature selected so that the powder is densified and bonded to the container; e. removing the container from the densified powder material except for a remnant around the outer periphery; f. joining a fluid cooling means to the outer contour remnant.
Claim 3
Dependent Claim
30 words
A method as in claim 1 wherein the target material contains a material selected from the group consisting of iron, cobalt, and nickel and mixtures thereof, aluminum, chromium, and yttrium.
Claim 4
Dependent Claim
40 words
A method as in claim 1 wherein the fluid cooling means are joined to the outer periphery of the container prior to the isostatic pressing step and the interior of the cooling means is open to the isostatic pressing media.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-01-22 | 1982-07-24 | 1983-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-01-22 | 1986-07-24 | 1987-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-01-22 | 1990-07-24 | 1991-01-23 | $7700.00 | Window Closed / Lapsed |