US4132585A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of automatically monitoring and regenerating an etchant
Assignee: Individual
•
Filing: 1977-04-04
•
Granted: 1979-01-02
•
Expires: 1997-04-04
Abstract
Abstract The composition of etchant solution withdrawn from an etcher is monitored to diagnose a component deficiency. A light sensor is responsive to the color density of light rays passing through the etchant. A meter relay is responsive to the light sensor and if the color density of the etchant falls outside preset levels a pump is energized causing addition of a constituent component into the etchant. A second light sensor senses the color density of the light rays passing through the etchant after the addition of the constituent component. A second meter relay is responsive to the second light sensor. If no improvement of the etchant color is detected, the second meter relay causes the discontinuance of the constituent component addition and switches to the addition of another constituent component.
Inventors
- 👤 Keith E. Oxford
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 16:56
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/46; G; G01; G01N; G01N21/00; G01N21/75; G01N21/77; G01N21/78
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
99 words
A method of automatically monitoring the condition of an etchant in an etching machine and regenerating the same comprising the steps of: monitoring the changes in etchant composition to determine the condition of deficiency of the etchant, adding a constituent component to regenerate the etchant to a predetermined etching vigor, and monitoring the etchant after the addition of the constituent component to determine if the constituent component addition is causing a cure of the deficiency, discontinuing the addition of a constituent component if such addition fails to cure the deficiency, and adding another constituent component to cure the deficiency.
Claim 2
Independent Claim
99 words
A method of automatically monitoring the condition of an etchant in an etching machine and regenerating the same comprising the steps of: monitoring the changes in etchant composition to determine the condition of deficiency of the etchant, adding a constituent component to regenerate the etchant to a predetermined etching vigor, and monitoring the etchant after the addition of the constituent component to determine if the constituent component addition is causing a cure of the deficiency, discontinuing the addition of a constituent component if such addition fails to cure the deficiency, and adding another constituent component to cure the deficiency.
Claim 3
Dependent Claim
49 words
The method of claim 1 wherein: the step of monitoring the etchant composition to determine the condition of the deficiency comprises sensing the intensity of light transmitted through the etchant, and initiating constituent component addition in the event the light intensity falls outside a predetermined range of intensity parameters.
Claim 4
Dependent Claim
49 words
The method of claim 1 wherein: the step of monitoring the etchant after the addition comprises sensing the intensity of light transmitted through the etchant after the component addition, and the step of discontinuing the component addition when the light intensity falls between the predetermined range of intensity parameters.
Claim 5
Dependent Claim
33 words
The method of claim 1 wherein: The step of adding a constituent component comprises adding acid to the etchant, and the step of adding another constituent component comprising adding oxidizer to the etchant.
Claim 6
Dependent Claim
42 words
The method of claim 1 including the steps of: detecting flow from the etching machine prior to initiating the monitoring of the etchant step, and delaying the monitoring of the etchant step for a predetermined time period after etchant flow is detected.
Claim 7
Independent Claim
159 words
A method of automatically monitoring the condition of an etchant in an etching machine and regenerating the same comprising the steps of: monitoring the changes in etchant composition to determine the condition of deficiency of the etchant, adding a constituent component to regenerate the etchant to a predetermined etching vigor, monitoring the etchant after the addition of the constituent component to determine if the constituent component addition is causing a cure of the deficiency, the step of monitoring the etchant after the addition comprises sensing the intensity of light transmitted through the etchant after the component addition, discontinuing the component addition when the light intensity falls between the predetermined range of intensity parameters, discontinuing component addition, after a given time delay, if the light intensities fail to converge toward the predetermined range of intensity parameters, and switching to the addition of another constituent component, such addition continuing until the light intensity falls within the predetermined range of intensity parameters.
Claim 8
Independent Claim
159 words
A method of automatically monitoring the condition of an etchant in an etching machine and regenerating the same comprising the steps of: monitoring the changes in etchant composition to determine the condition of deficiency of the etchant, adding a constituent component to regenerate the etchant to a predetermined etching vigor, monitoring the etchant after the addition of the constituent component to determine if the constituent component addition is causing a cure of the deficiency, the step of monitoring the etchant after the addition comprises sensing the intensity of light transmitted through the etchant after the component addition, discontinuing the component addition when the light intensity falls between the predetermined range of intensity parameters, discontinuing component addition, after a given time delay, if the light intensities fail to converge toward the predetermined range of intensity parameters, and switching to the addition of another constituent component, such addition continuing until the light intensity falls within the predetermined range of intensity parameters.
Claim 9
Independent Claim
126 words
A method of automatically monitoring the condition of an etchant in an etching machine and regenerating the same comprising the steps of: circulating a quantity of etchant along a flow path, monitoring at a first position along the flow path the changes in etchant composition to determine the condition of deficiency of the etchant, adding a first constituent component to regenerate the etchant to a predetermined etching vigor, monitoring the etchant after the addition of the constituent component to determine if the constituent component addition is causing a cure of the defeciency, monitoring said etchant downstream of said addition of said first constituent, and discontinue the addition of said first constituent upon failure to detect an improvement and initiate the addition of a second constituent component.
Claim 10
Independent Claim
126 words
A method of automatically monitoring the condition of an etchant in an etching machine and regenerating the same comprising the steps of: circulating a quantity of etchant along a flow path, monitoring at a first position along the flow path the changes in etchant composition to determine the condition of deficiency of the etchant, adding a first constituent component to regenerate the etchant to a predetermined etching vigor, monitoring the etchant after the addition of the constituent component to determine if the constituent component addition is causing a cure of the defeciency, monitoring said etchant downstream of said addition of said first constituent, and discontinue the addition of said first constituent upon failure to detect an improvement and initiate the addition of a second constituent component.
Claim 11
Independent Claim
91 words
A method of automatically monitoring the condition of an etchant in an etching machine and regenerating the same comprising the steps of: monitoring the changes in etchant composition to determine the condition of deficiency of the etchant, alternately adding first and second constituent components to said etchant for predetermined time intervals, monitoring the etchant after each addition of a constituent component to determine if the constituent component addition is causing a cure of the deficiency, continuing to add the improving etchant upon detection of an improvement until said deficiency is cured.
Claim 12
Independent Claim
91 words
A method of automatically monitoring the condition of an etchant in an etching machine and regenerating the same comprising the steps of: monitoring the changes in etchant composition to determine the condition of deficiency of the etchant, alternately adding first and second constituent components to said etchant for predetermined time intervals, monitoring the etchant after each addition of a constituent component to determine if the constituent component addition is causing a cure of the deficiency, continuing to add the improving etchant upon detection of an improvement until said deficiency is cured.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-01-01 | 1982-07-03 | 1983-01-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-01-01 | 1986-07-03 | 1987-01-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-01-01 | 1990-07-03 | 1991-01-02 | $7700.00 | Window Closed / Lapsed |