Apparatus for polishing semiconductor wafers

Claim 2

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with a polishing pressure applied essentially uniformly over the area of said surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a generally flat exposed surface provided by an impervious polymeric material exhibiting direct solid-to-solid wetting characteristics at said exposed surface with the material of said wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polymeric material resistant to tensile separation forces and having sufficiently high static resistance to shear forces to prevent slippage of said wafer on said polymeric material from being caused by the passage of said polishing pad laterally across said wafer first side surface during polishing thereof, said sheet of wafer mounting material being volume compressible to absorb without deforming said wafer any asperities at said second side of said wafer or in the thickness thereof upon said uniform application of polishing pressure.

Claim 3

A polishing apparatus according to claim 1 wherein said bond provided by said wafer mounting material is repeatable and said volume compressiblity thereof is elastic, whereby said material is reusable for successive wafers to be polished.

Claim 4

A polishing apparatus according to claim 1 wherein said polymeric material has a thickness in the range of between about 5 and 50 mils.

Claim 5

A polishing apparatus according to claim 1 wherein said polymeric material has a hardness between about 10 and 100 Shore A as measured by ASTM Method D 785.

Claim 6

A polishing apparatus according to claim 1 wherein the volume compressibility of said sheet of mounting material is generally provided by a lamina of material adhesively secured to a lamina of polymeric material providing said exposed surface.

Claim 7

A polishing apparatus according to claim 5 wherein the resistance of said volume compressible material to the additional compression necessary to absorb said asperities is essentially the same as the resistance provided thereby to compression upon application of said polishing pressure.

Claim 8

A polishing apparatus according to claim 6 wherein said volume compressible material is selected to compress between about 1.5 and 10 mils when subjected to said polishing pressure.

Claim 9

In polishing apparatus having a backing plate on which a thin flat wafer is to be mounted with a front side surface thereof exposed to be polished, a polishing pad to engage said front side surface of said wafer with a polishing pressure applied essentially uniformly over the area of said surface, and drive means to cause relative lateral motion between said polishing pad and said surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a flat exposed surface provided by a solid lamina of a polymeric material exhibiting wetting characteristics at said surface with the material of said wafer to aid in adherence of the back side surface of a wafer intimately engaged therewith to said backing plate with a bond having sufficiently high static resistance to shear forces to prevent slippage of said wafer on said material from being caused by the passage of said polishing pad laterally across said wafer surface during polishing thereof, said sheet of material including a second lamina of material adhesively secured to said lamina of polymeric material which is volume compressible to absorb without deforming said wafer any asperities on the back side of said wafer or in the thickness thereof upon said uniform application of polishing pressure, said lamina of volume compressible material including a layer of a poromeric material and a more compressible layer of another volume compressible material.

Claim 10

In polishing apparatus having a backing plate on which a thin flat wafer is to be mounted with a front side surface thereof exposed to be polished, a polishing pad to engage said front side surface of said wafer with a polishing pressure applied essentially uniformly over the area of said surface, and drive means to cause relative lateral motion between said polishing pad and said surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a flat exposed surface provided by a solid lamina of a polymeric material exhibiting wetting characteristics at said surface with the material of said wafer to aid in adherence of the back side surface of a wafer intimately engaged therewith to said backing plate with a bond having sufficiently high static resistance to shear forces to prevent slippage of said wafer on said material from being caused by the passage of said polishing pad laterally across said wafer surface during polishing thereof, said sheet of material including a second lamina of material adhesively secured to said lamina of polymeric material which is volume compressible to absorb without deforming said wafer any asperities on the back side of said wafer or in the thickness thereof upon said uniform application of polishing pressure, said lamina of volume compressible material including a layer of a poromeric material and a more compressible layer of another volume compressible material.

Claim 11

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with a polishing pressure applied essentially uniformly over the area of said surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a generally flat exposed surface provided by a polymeric material exhibiting direct solid-to-solid wetting characteristics at said surface with the material of said wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polymeric material resistant to tensile separation forces and having sufficiently high static resistance to shear forces to prevent slippage of said wafer on said polymeric material from being caused by the passage of said polishing pad laterally across said wafer first side surface during polishing thereof, said sheet of wafer mounting material being volume compressible to absorb without deforming said wafer any asperities at said second side of said wafer or in the thickness thereof upon said uniform application of polishing pressure; and said polymeric material being selected from the group consisting of flexibilized polyvinyl chloride; ethylene ethyl acrylate; ethylene vinyl acetate; styrene ethylene; styrene butylene; vinyl chloride-acetate; the aliphatic polyamides; polyethylene; and urethanes.

Claim 12

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with a polishing pressure applied essentially uniformly over the area of said surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a generally flat exposed surface provided by a polymeric material exhibiting direct solid-to-solid wetting characteristics at said surface with the material of said wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polymeric material resistant to tensile separation forces and having sufficiently high static resistance to shear forces to prevent slippage of said wafer on said polymeric material from being caused by the passage of said polishing pad laterally across said wafer first side surface during polishing thereof, said sheet of wafer mounting material being volume compressible to absorb without deforming said wafer any asperities at said second side of said wafer or in the thickness thereof upon said uniform application of polishing pressure; and said polymeric material being selected from the group consisting of flexibilized polyvinyl chloride; ethylene ethyl acrylate; ethylene vinyl acetate; styrene ethylene; styrene butylene; vinyl chloride-acetate; the aliphatic polyamides; polyethylene; and urethanes.

Claim 13

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with polishing pressure applied essentially uniformly over the area of said first side surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a generally flat exposed surface provided by a solid impervious polymeric material that exhibits solid-to-solid wetting characteristics with the material of said wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polymeric material resistant to tensile separation forces and having sufficiently high static resistance to shear forces to prevent slippage of said wafer on said polymeric material from being caused by the passage of said polishing pad laterally across said wafer first side surface during polishing thereof.

Claim 14

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with polishing pressure applied essentially uniformly over the area of said first side surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a generally flat exposed surface provided by a solid impervious polymeric material that exhibits solid-to-solid wetting characteristics with the material of said wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polymeric material resistant to tensile separation forces and having sufficiently high static resistance to shear forces to prevent slippage of said wafer on said polymeric material from being caused by the passage of said polishing pad laterally across said wafer first side surface during polishing thereof.

Claim 15

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with a polishing pressure applied essentially uniformly over the area of said surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a generally flat exposed surface provided by flexibilized polyvinyl chloride exhibiting direct solid-to-solid wetting characteristics at said exposed surface with the material of said wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polyvinyl chloride, which bond is resistant to tensile separation forces and has a sufficiently high static resistance to shear forces to prevent slippage of said wafer on said exposed surface from being caused by the passage of said polishing pad laterally across said wafer first side surface during polishing thereof, said sheet of wafer mounting material being volume compressible to absorb without deforming said wafer any asperities at said second side of said wafer or in the thickness thereof upon said uniform application of polishing pressure.

Claim 16

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with a polishing pressure applied essentially uniformly over the area of said surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a generally flat exposed surface provided by flexibilized polyvinyl chloride exhibiting direct solid-to-solid wetting characteristics at said exposed surface with the material of said wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polyvinyl chloride, which bond is resistant to tensile separation forces and has a sufficiently high static resistance to shear forces to prevent slippage of said wafer on said exposed surface from being caused by the passage of said polishing pad laterally across said wafer first side surface during polishing thereof, said sheet of wafer mounting material being volume compressible to absorb without deforming said wafer any asperities at said second side of said wafer or in the thickness thereof upon said uniform application of polishing pressure.

Claim 17

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with polishing pressure applied essentially uniformly over the area of said first side surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a generally flat exposed surface provided by a solid polymeric material that exhibits solid-to-solid wetting characteristics with the material of said wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polymeric material, which bond is resistant to tensile separation forces and has a sufficiently high static resistance to shear forces to prevent slippage of said wafer on said polymeric material from being caused by the passage of said polishing pad laterally across said wafer surface during polishing thereof, and said polymeric material being selected from the group consisting of flexibilized polyvinyl chloride; ethylene ethyl acrylate; ethylene vinyl acetate; styrene ethylene; styrene butylene; vinyl chloride-acetate; the aliphatic polyamides; polyethylene; and urethanes.

Claim 18

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with polishing pressure applied essentially uniformly over the area of said first side surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement to the combination comprising a sheet of a wafer mounting material on said backing plate having a generally flat exposed surface provided by a solid polymeric material that exhibits solid-to-solid wetting characteristics with the material of said wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polymeric material, which bond is resistant to tensile separation forces and has a sufficiently high static resistance to shear forces to prevent slippage of said wafer on said polymeric material from being caused by the passage of said polishing pad laterally across said wafer surface during polishing thereof, and said polymeric material being selected from the group consisting of flexibilized polyvinyl chloride; ethylene ethyl acrylate; ethylene vinyl acetate; styrene ethylene; styrene butylene; vinyl chloride-acetate; the aliphatic polyamides; polyethylene; and urethanes.

Claim 19

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with polishing pressure applied essentially uniformly over the area of said first side surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement of the combination comprising a sheet of a wafer mounting material on said backing plate having a flat exposed surface provided by a flexibilized polyvinyl chloride that exhibits solid-to-solid wetting characteristics with the material of the wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polyvinyl chloride, which bond is resistant to tensile separation forces and has a sufficiently high static resistance to shear forces to prevent slippage of said wafer on said polymeric material from being caused by the passage of said polishing pad laterally across said wafer first side surface during polishing thereof.

Claim 20

In polishing apparatus having a backing plate on which a thin generally flat wafer is to be mounted with a first side surface thereof exposed to be polished, a polishing pad to engage said first side surface of said wafer with polishing pressure applied essentially uniformly over the area of said first side surface, and drive means to cause relative lateral motion between said polishing pad and said first side surface to polish the latter; the improvement of the combination comprising a sheet of a wafer mounting material on said backing plate having a flat exposed surface provided by a flexibilized polyvinyl chloride that exhibits solid-to-solid wetting characteristics with the material of the wafer to provide an intimate dry cohesive bond at the interface of a second side surface of a wafer and said polyvinyl chloride, which bond is resistant to tensile separation forces and has a sufficiently high static resistance to shear forces to prevent slippage of said wafer on said polymeric material from being caused by the passage of said polishing pad laterally across said wafer first side surface during polishing thereof.