Apparatus for microscopically viewing a specimen while detecting radiation particles therefrom

Claim 2

Apparatus for detecting species of radiation from a specimen while microscopically viewing the specimen, comprising: a primary mirror for receiving light directly from a specimen; a secondary mirror positioned to receive light on a first side from the specimen reflected from said primary mirror and to reflect it for viewing; and a detector for said radiation species disposed on the opposite side of said secondary mirror to receive said radiation species directly from the specimen.

Claim 3

The apparatus of claim 1 wherein said detector is disposed substantially in the optical shadow of said secondary mirror.

Claim 4

The apparatus of claim 2 wherein said primary mirror defines a central aperture for the transmission for viewing of light from the specimen reflected from said secondary mirror, said primary mirror, secondary mirror and detector being all on a single axis.

Claim 5

The apparatus of claim 1, further comprising means for limiting the extent of incidence on said detector of said radiation species from the specimen.

Claim 6

The apparatus of claim 4 wherein said limiting means comprises a collimator having wall structure for absorbing said radiation species and defining an elongated bore therethrough for receiving and transmitting said radiation species from the specimen.

Claim 7

The apparatus of claim 5 wherein the material of said wall structure comprises aluminum.

Claim 8

The apparatus of claim 5 wherein at least a portion of said elongated bore is shaped to transmit only said radiation species moving substantially parallel to said bore.

Claim 9

The apparatus of claim 7 wherein said bore portion has a ratio of length to diameter of approximately 5.

Claim 10

In a microscope objective having a concave primary mirror and a convex secondary mirror arranged coaxially and face to face, said primary mirror defining a central aperture for a light beam from a first side of said secondary mirror to pass therethrough, the improvement for enabling the detection of species of radiation from a specimen while microscopically viewing the specimen through said objective, comprising a detector for said radiation species disposed substantially in the optical shadow of said secondary mirror on the side of said secondary mirror opposite said first side to receive said radiation species directly from the specimen.

Claim 11

In a microscope objective having a concave primary mirror and a convex secondary mirror arranged coaxially and face to face, said primary mirror defining a central aperture for a light beam from a first side of said secondary mirror to pass therethrough, the improvement for enabling the detection of species of radiation from a specimen while microscopically viewing the specimen through said objective, comprising a detector for said radiation species disposed substantially in the optical shadow of said secondary mirror on the side of said secondary mirror opposite said first side to receive said radiation species directly from the specimen.

Claim 12

The improvement of claim 9, further comprising means for limiting the extent of incidence on said detector of said radiation species from the specimen.

Claim 13

The improvement of claim 10 wherein said limiting means comprises a collimator having wall structure for absorbing said radiation species and defining an elongated bore therethrough for receiving and transmitting said radiation species from the specimen.

Claim 14

Apparatus for detecting species of radiation from a specimen while microscopically viewing the specimen, comprising: an objective housing defining a cavity and an access opening into one end of said cavity generally centered along the axis of said cavity; collecting optics disposed in said cavity including a relatively large primary mirror having a central aperture on an optical axis generally aligned with said cavity axis facing said access opening and a relatively small secondary mirror on said optical axis facing said primary mirror; a detector for said radiation species on a radiation axis colinear with said optical axis facing away from said primary mirror and positioned so that said secondary mirror is between said primary mirror and said detector.

Claim 15

Apparatus for detecting species of radiation from a specimen while microscopically viewing the specimen, comprising: an objective housing defining a cavity and an access opening into one end of said cavity generally centered along the axis of said cavity; collecting optics disposed in said cavity including a relatively large primary mirror having a central aperture on an optical axis generally aligned with said cavity axis facing said access opening and a relatively small secondary mirror on said optical axis facing said primary mirror; a detector for said radiation species on a radiation axis colinear with said optical axis facing away from said primary mirror and positioned so that said secondary mirror is between said primary mirror and said detector.

Claim 16

The apparatus of claim 12 wherein said detector is disposed substantially in the optical shadow of said secondary mirror.

Claim 17

The apparatus of claim 12, further comprising a housing about said detector having an opening, generally centered along said radiation axis, for access to said detector from the direction in which said detector faces.

Claim 18

The apparatus of claim 14 wherein said detector housing is disposed substantially in the optical shadow of said secondary mirror.

Claim 19

The apparatus of claim 15, further comprising means for limiting the extent of incidence on said detector of said radiation species from a specimen.

Claim 20

The apparatus of claim 16 wherein said limiting means comprises a collimator having wall structure for absorbing said radiation species and defining an elongated bore generally centered along said radiation axis for transmitting said radiation species to said detector.

Claim 21

The apparatus of claim 17 wherein said limiting means is disposed substantially in the optical shadow of said secondary mirror.

Claim 22

The apparatus of claim 17 wherein the material of said wall structure comprises aluminum.

Claim 23

The apparatus of claim 17 wherein at least a portion of said elongated bore is shaped to transmit only said radiation species moving substantially parallel to said radiation axis.

Claim 24

The apparatus of claim 20 wherein said bore portion has a ratio of length to diameter of approximately 5.