US4116530A
Expired / Lapsed
US
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Optical waveguides grown by selective liquid phase epitaxy
Assignee: Texas Instruments Inc
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Filing: 1976-07-29
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Granted: 1978-09-26
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Expires: 1996-07-29
Abstract
Abstract This disclosure concerns optical waveguides of arcuate structure fabricated by selective liquid phase epitaxy. In integrated optical circuits requiring complex processing, it will be necessary to utilize at relatively low light losses bends, curves, and dividers in the waveguide section. The arcuate optical waveguides described herein have a region of higher index of refraction surrounded by lower effective index media to confine and propagate light between active components of an integrated optical circuit. Optical waveguides extending around bends are grown by selective liquid phase epitaxy employing a horizontal graphite boat with sliding compartments, wherein multiple layers of Ga 1-x Al x As(0≦x≦0.3) are grown. For a relatively low radius of curvature where r c = 10 mils, the angle is dominated by a sharp facet, with the faceting slowly decreasing as the radius of curvature increases, until at r c = 25 mils, substantially smooth sides are formed around the bend of the optical waveguide. One specific configuration of an arcuate optical waveguide structure is a y-shaped waveguide, where each of its legs may have a different specific radius of curvature.
Inventors
- 👤 David W. Bellavance
- 👤 Joe C. Campbell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 17:34
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/131; G02B6/122; G02B6/125
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
84 words
An epitaxially grown arcuate optical waveguide comprising: an arcuate semiconductor structure having a high index of refraction for guiding light, said structure having a radius of curvature in the range of about 25-125 mils, said structure having smooth side walls substantially free of faceting thereby preventing the scattering of light propagating therethrough into untrapped modes; at least one semiconductor barrier layer of low refractive index in contact with said arcuate optical waveguide; and a planarized semiconductor substrate for support of said arcuate optical waveguide.
Claim 2
Dependent Claim
84 words
An epitaxially grown arcuate optical waveguide comprising: an arcuate semiconductor structure having a high index of refraction for guiding light, said structure having a radius of curvature in the range of about 25-125 mils, said structure having smooth side walls substantially free of faceting thereby preventing the scattering of light propagating therethrough into untrapped modes; at least one semiconductor barrier layer of low refractive index in contact with said arcuate optical waveguide; and a planarized semiconductor substrate for support of said arcuate optical waveguide.
Claim 3
Dependent Claim
21 words
A structure as set forth in claim 1, wherein said composition of said waveguide structure comprises a Group III-V semiconductor material.
Claim 4
Dependent Claim
109 words
An optical waveguide of semiconductor material including a substrate and monolithic configuration epitaxially grown thereon of arcuate geometry comprising: a substrate of semiconductor material having a first index of refraction and a planarized surface, and a non-linear optical waveguide structure of arcuate geometry grown thereon having a second index of refraction higher than said first index of refraction, said structure having a radius of curvature in the range of about 25-125 mils, said structure having smooth sidewalls substantially free of faceting thereby preventing the scattering of light propagating therethrough into untrapped modes; said arcuate structure having radii of curvature that lie in a plane parallel to said substrate surface.
Claim 5
Dependent Claim
109 words
An optical waveguide of semiconductor material including a substrate and monolithic configuration epitaxially grown thereon of arcuate geometry comprising: a substrate of semiconductor material having a first index of refraction and a planarized surface, and a non-linear optical waveguide structure of arcuate geometry grown thereon having a second index of refraction higher than said first index of refraction, said structure having a radius of curvature in the range of about 25-125 mils, said structure having smooth sidewalls substantially free of faceting thereby preventing the scattering of light propagating therethrough into untrapped modes; said arcuate structure having radii of curvature that lie in a plane parallel to said substrate surface.
Claim 6
Dependent Claim
21 words
A structure as set forth in claim 3, wherein said composition of said waveguide structure comprises a Group III-V semiconductor material.
Claim 7
Dependent Claim
128 words
An optical waveguide of semiconductor material including a substrate and monolithic structural configurations epitaxially grown thereon of arcuate geometry comprising: a substrate of semiconductor material having a planarized surface, a first semiconductor structure grown thereon of arcuate geometry having a first index of refraction, and a second semiconductor structure of arcuate geometry comprising a light confining region grown onto said first structure having a second index of refraction higher than said first index of refraction, said second structure having a radius of curvature in the range of about 25-125 mils, said second structure having smooth sidewalls substantially free of faceting thereby preventing the scattering of light propagating therethrough into untrapped modes, said arcuate structures having radii of curvature that lie in a plane parallel to said substrate surface.
Claim 8
Dependent Claim
128 words
An optical waveguide of semiconductor material including a substrate and monolithic structural configurations epitaxially grown thereon of arcuate geometry comprising: a substrate of semiconductor material having a planarized surface, a first semiconductor structure grown thereon of arcuate geometry having a first index of refraction, and a second semiconductor structure of arcuate geometry comprising a light confining region grown onto said first structure having a second index of refraction higher than said first index of refraction, said second structure having a radius of curvature in the range of about 25-125 mils, said second structure having smooth sidewalls substantially free of faceting thereby preventing the scattering of light propagating therethrough into untrapped modes, said arcuate structures having radii of curvature that lie in a plane parallel to said substrate surface.
Claim 9
Dependent Claim
21 words
A structure as set forth in claim 5, wherein said composition of said waveguide structure comprises a Group III-V semiconductor material.
Claim 10
Dependent Claim
43 words
A structure as set forth in claim 5, wherein the single heterojunction arcuate waveguide structure is encapsulated by a third semiconductor structure having a relatively low index of refraction as compared to the refractive index of the second semiconductor light confining arcuate structure.
Claim 11
Dependent Claim
21 words
A structure as set forth in claim 7, wherein said composition of said waveguide structure comprises a Group III-V semiconductor material.
Claim 12
Dependent Claim
87 words
An integrated optical circuit of semiconductor material comprising: a substrate of semiconductor material having a planarized surface, at least one active optical device grown onto the planar surface of said substrate, and at least one arcuate optical waveguide of semiconductor material epitaxially grown connecting to said active optical device on said substrate surface, said waveguide having a radius of curvature in the range of about 25-125 mils, said waveguide having smooth sidewalls substantially free of faceting thereby preventing the scattering of light propagating therethrough into untrapped modes.
Claim 13
Dependent Claim
87 words
An integrated optical circuit of semiconductor material comprising: a substrate of semiconductor material having a planarized surface, at least one active optical device grown onto the planar surface of said substrate, and at least one arcuate optical waveguide of semiconductor material epitaxially grown connecting to said active optical device on said substrate surface, said waveguide having a radius of curvature in the range of about 25-125 mils, said waveguide having smooth sidewalls substantially free of faceting thereby preventing the scattering of light propagating therethrough into untrapped modes.
Claim 14
Dependent Claim
24 words
A circuit as set forth in claim 9 wherein said optical devices are selected from a group of lasers, modulators, directional couplers, and switches.
Claim 15
Dependent Claim
22 words
A circuit as set forth in claim 9, wherein said arcuate waveguides are suitable for carrying light information between active optical devices.
References Cited (Backward Citations)
US3850503A
Cited
US4007978A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-09-25 | 1982-03-27 | 1982-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-09-25 | 1986-03-27 | 1986-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-09-25 | 1990-03-27 | 1990-09-26 | $7700.00 | Window Closed / Lapsed |