Method and apparatus for producing laser pulses with high reproducibility

Claim 1

A pulsed gas laser system comprising an elongated high voltage conductor having a back terminal end and a front end connected with a high voltage electrode, a capillary extending straight forwardly from said electrode axially with respect to said conductor to a front end having a grounded electrode forming a laser beam passage, said capillary being axially aligned with said conductor and containing gas between said electrodes and which gas after a delay period suddenly breaks down under high voltage on said high voltage terminal and produces a laser pulse through said passage, a shielding tube surrounding said conductor and capillary and connected with said grounded electrode and thereby forming a first capacitor, a second capacitor having one side connected with a source of high voltage and shunted by a high voltage switch to ground and a second side connected to the terminal end of said elongated conductor, said first and second capacitors being parts of cooperating interconnected circuits comprising a high voltage pulse-forming network, each circuit having capacitance, resistance and inductance relatively valued with respect to each other so as to produce a high voltage pulse upon actuation of said switch and which pulse rises to a maximum value on said second side of the capacitor, said maximum value being reached simultaneously with the termination of said delay period when said gas suddenly breaks down and produces said laser pulse, repetitive actuation of said switch causing the production of laser pulses with high pulse-to-pulse reproducibility.