US4105335A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Interferometric optical phase discrimination apparatus
Assignee: Canon Inc
•
Filing: 1977-07-06
•
Granted: 1978-08-08
•
Expires: 1997-07-06
Abstract
Abstract Film of a known refractive index whose thickness is to be measured is illuminated by a white light beam. Two wave fronts from both sides of the film are directed to an interferometer. The wave fronts are out of phase in accordance with the thickness of the film. The two wave fronts are amplitude-split, respectively, by the beam splitter of the interferometer. Two of the split wave fronts are tilted by tilting means in the interferometer. The other two split wave fronts, as well as the two tilted wave fronts, are directed to an interference surface. Thus, there is formed a white interference pattern on the interference surface. The white interference pattern has a middle peak and two side peaks. The space interval between these peaks is measured by a scanner. By knowing the peak-to-peak interval, it is possible to discriminate the space interval between both sides of the film.
Inventors
- 👤 Nobuyoshi Tanaka
- 👤 Naoki Ayata
- 👤 Mitsuo Takeda
- 👤 Susumu Matsumura
- 👤 Kazuya Matsumoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 09:50
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/0209; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0675
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
167 words
An interferometric optical phase discrimination apparatus comprising: a source of broadband radiation emitted within a predetermined spectrum for illuminating a specimen having first and second surfaces; an interferometer to which two wave fronts coming from said first and second surface are directed, said interferometer having beam splitter means, tilting means and beam direction means so that said two wave fronts are each split by said beam splitter means, whereafter two of the wave fronts split by said beam splitter means are tilted by said tilting means with respect to the other two wave fronts split by said beam splitter means and all of said four split wave fronts are directed to an interference surface by said beam direction means, whereby an interference pattern appears on said interference surface; and scanning means for scanning said interference pattern and for determining the distance between a predetermined point on the interference pattern and one of peaks of the interference so that the optical phase may be discriminated from said distance.
Claim 2
Dependent Claim
167 words
An interferometric optical phase discrimination apparatus comprising: a source of broadband radiation emitted within a predetermined spectrum for illuminating a specimen having first and second surfaces; an interferometer to which two wave fronts coming from said first and second surface are directed, said interferometer having beam splitter means, tilting means and beam direction means so that said two wave fronts are each split by said beam splitter means, whereafter two of the wave fronts split by said beam splitter means are tilted by said tilting means with respect to the other two wave fronts split by said beam splitter means and all of said four split wave fronts are directed to an interference surface by said beam direction means, whereby an interference pattern appears on said interference surface; and scanning means for scanning said interference pattern and for determining the distance between a predetermined point on the interference pattern and one of peaks of the interference so that the optical phase may be discriminated from said distance.
Claim 3
Dependent Claim
13 words
An apparatus according to claim 1, wherein said interferometer is a Michelson's interferometer.
Claim 4
Dependent Claim
155 words
An optical phase discrimination apparatus comprising: a source of broadband radiation emitted within a predetermined spectrum for illuminating a specimen having first and second surfaces; beam splitting and tilting means for obtaining a first wave front coming from said first surface, a second wave front coming from said first surface and being tilted with respect to said first wave front, a third wave front coming from said second surface and a fourth wave front coming from said second surface and being tilted with respect to said third wave front; an interference surface to which said first, second, third and fourth wave fronts are directed so as to form an interference pattern of said four wave fronts; and scanning means for scanning said interference pattern and for determining a distance between a predetermined point on the interference pattern and one of peaks of the interference so that the optical phase may be discriminated from said distance.
Claim 5
Dependent Claim
155 words
An optical phase discrimination apparatus comprising: a source of broadband radiation emitted within a predetermined spectrum for illuminating a specimen having first and second surfaces; beam splitting and tilting means for obtaining a first wave front coming from said first surface, a second wave front coming from said first surface and being tilted with respect to said first wave front, a third wave front coming from said second surface and a fourth wave front coming from said second surface and being tilted with respect to said third wave front; an interference surface to which said first, second, third and fourth wave fronts are directed so as to form an interference pattern of said four wave fronts; and scanning means for scanning said interference pattern and for determining a distance between a predetermined point on the interference pattern and one of peaks of the interference so that the optical phase may be discriminated from said distance.
Claim 6
Dependent Claim
17 words
An apparatus according to claim 3, wherein said beam splitting and tilting means includes a Wollaston prism.
Claim 7
Dependent Claim
17 words
An apparatus according to claim 3, wherein said beam splitting and tilting means includes a Rochon prism.
Claim 8
Dependent Claim
17 words
An apparatus according to claim 3, wherein said beam splitting and tilting means includes a Senarmont prism.
Claim 9
Dependent Claim
18 words
An apparatus according to claim 4 wherein said beam splitting and tilting means further includes polarizer and analyser.
Claim 10
Dependent Claim
143 words
An optical phase discrimination apparatus comprising: a source of broadband radiation emitted within a predetermined spectrum for illuminating a specimen having first and second surfaces; angular shear type birefringence prism means for obtaining a first wave front coming from said first surface, a second wave front coming from said first surface and being tilted with respect to said first wave front, a third wave front coming from said second surface and a fourth wave front coming from said second surface and being tilted with respect to said third wave front; an interference surface to which said first, second, third and fourth wave fronts are directed so as to form an interference pattern of said four wave fronts whereby the optical phase may be discriminated by determining the distance between a predetermined point on the interference pattern and one of peaks of the interference.
Claim 11
Dependent Claim
143 words
An optical phase discrimination apparatus comprising: a source of broadband radiation emitted within a predetermined spectrum for illuminating a specimen having first and second surfaces; angular shear type birefringence prism means for obtaining a first wave front coming from said first surface, a second wave front coming from said first surface and being tilted with respect to said first wave front, a third wave front coming from said second surface and a fourth wave front coming from said second surface and being tilted with respect to said third wave front; an interference surface to which said first, second, third and fourth wave fronts are directed so as to form an interference pattern of said four wave fronts whereby the optical phase may be discriminated by determining the distance between a predetermined point on the interference pattern and one of peaks of the interference.
Claim 12
Dependent Claim
32 words
An apparatus according to claim 8, further comprising: optical imaging means for imaging the interference pattern on an imaging plane and an array of directional photosensitive elements positioned at the imaging plane.
Claim 13
Dependent Claim
15 words
An apparatus according to claim 9, wherein said optical imaging means includes a cylindrical element.
Claim 14
Dependent Claim
168 words
An optical phase discrimination apparatus comprising: an illuminating optical system for illuminating a specimen having a source of broadband radiation emitted within a predetermined spectrum and a converging optical means for converging light beam coming from said source on the specimen; beam splitting and tilting means for obtaining a first wave front coming from said first surface, a second wave front coming from said first surface and being tilted with respect to said first wave front, a third wave front coming from said second surface and fourth wave front coming from said second surface and being tilted with respect to said third wave front; an interference surface to which said first, second, third and fourth wave fronts are directed so as to form an interference pattern of said four wave fronts whereby the optical phase may be discriminated by determining the distance between a predetermined point on the interference pattern and one of peaks of the interference so that the optical phase may be discriminated from said distance.
Claim 15
Dependent Claim
168 words
An optical phase discrimination apparatus comprising: an illuminating optical system for illuminating a specimen having a source of broadband radiation emitted within a predetermined spectrum and a converging optical means for converging light beam coming from said source on the specimen; beam splitting and tilting means for obtaining a first wave front coming from said first surface, a second wave front coming from said first surface and being tilted with respect to said first wave front, a third wave front coming from said second surface and fourth wave front coming from said second surface and being tilted with respect to said third wave front; an interference surface to which said first, second, third and fourth wave fronts are directed so as to form an interference pattern of said four wave fronts whereby the optical phase may be discriminated by determining the distance between a predetermined point on the interference pattern and one of peaks of the interference so that the optical phase may be discriminated from said distance.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-08-07 | 1982-02-06 | 1982-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-08-07 | 1986-02-06 | 1986-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-08-07 | 1990-02-06 | 1990-08-08 | $7700.00 | Window Closed / Lapsed |