Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
136 words
Apparatus for inspecting the surface of an object at an inspection position, comprising: a. source means for generating a relatively narrow collimated beam of radiation; b. scanning means, spaced from the inspection position, for effecting a substantially circularly shaped scan of said beam at the inspection position; c. reflector means, disposed between said scanning means and the inspection position, said reflector means having an aperture therein to allow passage of the scanning beam travelling toward the inspection position and having its reflective surface oriented angularly with respect to the axis of said scan so as to receive radiation from said object and reflect it toward an off-axis region; d. photodetector means located at said off-axis region; and e. lens means disposed between said reflector means and said photodetector means for focusing radiation on said photodetector means.
Claim 2
Dependent Claim
136 words
Apparatus for inspecting the surface of an object at an inspection position, comprising: a. source means for generating a relatively narrow collimated beam of radiation; b. scanning means, spaced from the inspection position, for effecting a substantially circularly shaped scan of said beam at the inspection position; c. reflector means, disposed between said scanning means and the inspection position, said reflector means having an aperture therein to allow passage of the scanning beam travelling toward the inspection position and having its reflective surface oriented angularly with respect to the axis of said scan so as to receive radiation from said object and reflect it toward an off-axis region; d. photodetector means located at said off-axis region; and e. lens means disposed between said reflector means and said photodetector means for focusing radiation on said photodetector means.
Claim 3
Dependent Claim
16 words
Apparatus as defined by claim 1 wherein said source means comprises a source of laser light.
Claim 4
Dependent Claim
30 words
Apparatus as defined by claim 2 further comprising second lens means disposed between the inspection position and said reflector means to focus energy from said object onto said reflector means.
Claim 5
Dependent Claim
15 words
Apparatus as defined by claim 2 wherein said scanning means comprises a tilted rotatable mirror.
Claim 6
Dependent Claim
15 words
Apparatus as defined by claim 3 wherein said scanning means comprises a tilted rotatable mirror.
Claim 7
Dependent Claim
51 words
Apparatus as defined by claim 4 further comprising a second reflective surface mounted on the rear of said reflector means; and wherein said source means is adapted to direct the beam toward said second reflective surface, said second reflective surface being oriented to reflect the beam toward said tilted rotatable mirror.
Claim 8
Dependent Claim
51 words
Apparatus as defined by claim 5 further comprising a second reflective surface mounted on the rear of said reflector means; and wherein said source means is adapted to direct the beam toward said second reflective surface, said second reflective surface being oriented to reflect the beam toward said tilted rotatable mirror.
Claim 9
Dependent Claim
17 words
Apparatus as defined by claim 6 wherein said second reflective surface is mounted centrally within said aperture.
Claim 10
Dependent Claim
17 words
Apparatus as defined by claim 7 wherein said second reflective surface is mounted centrally within said aperture.
Claim 11
Dependent Claim
16 words
Apparatus as defined by claim 6 wherein said second reflective surface is mounted adjacent said aperture.
Claim 12
Dependent Claim
16 words
Apparatus as defined by claim 7 wherein said second reflective surface is mounted adjacent said aperture.
Claim 13
Dependent Claim
29 words
Apparatus as defined by claim 2 further comprising detection means coupled to said photodetector for generating an occurrence indication when a predetermined characteristic is detected in the photodetector output.
Claim 14
Dependent Claim
29 words
Apparatus as defined by claim 5 further comprising detection means coupled to said photodetector for generating an occurrence indication when a predetermined characteristic is detected in the photodetector output.
Claim 15
Dependent Claim
29 words
Apparatus as defined by claim 7 further comprising detection means coupled to said photodetector for generating an occurrence indication when a predetermined characteristic is detected in the photodetector output.
Claim 16
Dependent Claim
29 words
Apparatus as defined by claim 9 further comprising detection means coupled to said photodetector for generating an occurrence indication when a predetermined characteristic is detected in the photodetector output.
Claim 17
Dependent Claim
49 words
Apparatus as defined by claim 5 further comprising a second reflective surface mounted on said second lens means; and wherein said source means is adapted to direct the beam toward said second reflective surface, said second reflective surface being oriented to reflect the beam toward said tilted rotatable mirror.
Claim 18
Dependent Claim
19 words
Apparatus as defined by claim 16 wherein said second reflective surface is centrally mounted on said second lens means.