Apparatus and method whereby wave energy is correlated with geometry of a manufactured part or the like or to positional relationships in a system

Claim 3

A method of inspecting geometrical characteristics of a sample object as claimed in claim 1 wherein the wave energy is continuous acoustic wave energy, wherein said characteristic is any phase difference between said original wave energy and said reflected wave energy and wherein the object is disposed within a gaseous medium.

Claim 4

A method as claimed in claim 2 wherein the wavelength of said acoustic wave energy is greater than the largest dimensional deviation to be sensed.

Claim 5

A method as claimed in claim 1 wherein the wave energy is electromagnetic energy in the microwave regions of the electromagnetic spectrum.

Claim 6

A method as claimed in claim 1 that further includes absorbing unnecessary wave energy.

Claim 7

A method as claimed in claim 1 wherein the wavelength of the wave energy is at least as large as the least dimension of the portion of the sample object checked.

Claim 8

A method as claimed in claim 1 wherein the differences θ A and θ B are derived from the same object but at different times so that any change in geometrical characteristics of the object over time may be detected.

Claim 9

A method of inspecting geometrical characteristics as claimed in claim 1 in which the wavelength of the wave energy is greater than the largest deviation to be sensed.

Claim 10

A method as claimed in claim 1 in which there is a substantial standoff between the source means and the object and between the object and the means detecting the reflected wave energy.

Claim 11

A method as claimed in claim 1 wherein said tolerance includes very close tolerances, as in dimension inspecting, but includes, as well, sensing of gross error in the object geometry.

Claim 12

A method as claimed in claim 1 wherein the characteristics θ A and θ B are time phases of the wave energy in each instance.

Claim 15

A method of inspecting geometrical characteristics of an object as claimed in claim 12 wherein said characteristic is any phase difference between said original wave energy and said reflected wave energy.

Claim 16

A method as claimed in claim 13 wherein said wave energy is acoustic wave energy.

Claim 17

A method as claimed in claim 13 wherein the wave energy is electromagnetic energy in the microwave regions of the electromagnetic spectrum.

Claim 18

A method as claimed in claim 12 that further includes absorbing unnecessary wave energy.

Claim 19

A method as claimed in claim 12 wherein the wavelength of the wave energy is at least as large as the least dimension of the portion of the sample object checked.

Claim 20

A method as claimed in claim 12 wherein the differences θ A and θ B are derived from the same object but at different times so that any change in the geometrical characteristics of the object over time may be detected.

Claim 23

A method as claimed in claim 19 in which the differences θ A and Δ B represent geometrical characteristics of a sample object and a standard object, respectively, and in which the differential θ.sub.Δ represents a level of disparity between the geometrical characteristics of the sample object and the standard object.

Claim 26

Apparatus for inspecting manufactured objects, that comprises: means directing wave energy upon a sample object to-be-inspected which reflects the same; means detecting the reflected wave energy; means comparing a characteristic of the reflected wave energy with the same characteristic of the original wave energy directed upon the sample object to note any difference θ A therebetween; means comparing the difference θ A with a difference θ B similarly obtained with respect to a standard object located substantially at the same position as the sample object to determine any difference θ.sub.Δ therebetween, the sample object being considered within manufacturing tolerance if the value θ.sub.Δ is within acceptable limits, said means detecting being operative to detect the reflected wave energy at a plurality of locations, said difference θ A being developed as a plurality of differences θ 1 ', θ 2 ' . . . , said difference θ B being developed as a plurality of differences θ 1 , θ 2 . . . , a corresponding differential being developed for each corresponding pair to develop data comprising θ 1 -θ 1 ', θ 2 -θ 2 ' . . . , the data thus developed providing information that is used to establish whether the sample object is within acceptable tolerance.

Claim 27

Apparatus for inspecting manufactured objects, that comprises: means directing wave energy upon a sample object to-be-inspected which reflects the same; means detecting the reflected wave energy; means comparing a characteristic of the reflected wave energy with the same characteristic of the original wave energy directed upon the sample object to note any difference θ A therebetween; means comparing the difference θ A with a difference θ B similarly obtained with respect to a standard object located substantially at the same position as the sample object to determine any difference θ.sub.Δ therebetween, the sample object being considered within manufacturing tolerance if the value θ.sub.Δ is within acceptable limits, said means detecting being operative to detect the reflected wave energy at a plurality of locations, said difference θ A being developed as a plurality of differences θ 1 ', θ 2 ' . . . , said difference θ B being developed as a plurality of differences θ 1 , θ 2 . . . , a corresponding differential being developed for each corresponding pair to develop data comprising θ 1 -θ 1 ', θ 2 -θ 2 ' . . . , the data thus developed providing information that is used to establish whether the sample object is within acceptable tolerance.

Claim 28

Apparatus as claimed in claim 22 wherein the means for directing wave energy includes a chamber that receives either the sample part or the standard part and transducer means operable to direct the wave energy into the chamber.

Claim 29

Apparatus as claimed in claim 23 wherein the transducer means is acoustic transducer means, wherein the wave energy is acoustic wave energy, wherein said characteristic is the phase of the wave energy and wherein the differences θ A and θ B are respectively any phase difference between the reflected acoustic wave energy and the original wave energy directed upon the sample part and the standard part, respectively.

Claim 30

Apparatus as claimed in claim 24 wherein the means detecting comprises microphones distributed within the chamber.

Claim 31

Apparatus as claimed in claim 22 that further includes means to receive said data comprising θ 1 - θ 1 ', θ 2 - θ 2 ' . . . and to combine the same with an array of sensitivities to provide an array of deviations d 1 , d 2 . . . from which acceptability of said object in terms of manufacturing tolerance is inferred.

Claim 32

Apparatus as claimed in claim 22 wherein the means directing said wave energy directs continuous wave energy upon said sample object and said standard object and wherein said data thus developed serves to permit determination of said tolerance to about 25.4 microns or better and yet permits a substantial standoff between the object inspected and the means directing the wave energy and the means detecting the reflected wave energy.

Claim 33

Apparatus for simultaneously inspecting geometrical characteristics over the surface of an object of arbitrary shape to provide tolerance information with regard to a plurality of dimensions of the object at said surface, that comprises, in combination: source means directing wave energy upon the object that reflects the same, the source means and the object being relatively close in physical relationship to one another but separated at least several wavelengths of the wave energy from one another; means detecting the reflected wave energy at a plurality of separated locations to provide an array of measurements with respect to the object and developing a signal θ A therefrom as to the wave energy detected at each location of said plurality of locations, which signal bears a relationship to geometrical characteristics of the object; means comparing the signal θ A derived from each location with a standard signal θ B representative of the geometrical characteristics of a standard as to corresponding location to determine any differential θ.sub.Δ therebetween with respect to each location to provide an array of differentials θ.sub.Δ ; and means combining the array of differentials θ.sub.Δ with an array of sensitivities to produce an array of deviations d, each deviation d being produced by a plurality of said differentials θ.sub.Δ.

Claim 34

Apparatus for simultaneously inspecting geometrical characteristics over the surface of an object of arbitrary shape to provide tolerance information with regard to a plurality of dimensions of the object at said surface, that comprises, in combination: source means directing wave energy upon the object that reflects the same, the source means and the object being relatively close in physical relationship to one another but separated at least several wavelengths of the wave energy from one another; means detecting the reflected wave energy at a plurality of separated locations to provide an array of measurements with respect to the object and developing a signal θ A therefrom as to the wave energy detected at each location of said plurality of locations, which signal bears a relationship to geometrical characteristics of the object; means comparing the signal θ A derived from each location with a standard signal θ B representative of the geometrical characteristics of a standard as to corresponding location to determine any differential θ.sub.Δ therebetween with respect to each location to provide an array of differentials θ.sub.Δ ; and means combining the array of differentials θ.sub.Δ with an array of sensitivities to produce an array of deviations d, each deviation d being produced by a plurality of said differentials θ.sub.Δ.

Claim 35

Apparatus as claimed in claim 28 in which the differences θ A and θ B represent geometrical characteristics of a sample object and a standard object, respectively, and in which the differential θ.sub.Δ represents a level of disparity between the geometrical characteristics of the sample object and the standard object.

Claim 36

Apparatus as claimed in claim 28 wherein the wavelength of the wave energy is much greater than the largest deviation in said sample part to be inspected.

Claim 37

Apparatus that comprises, in combination: source means directing wave energy upon an object that reflects the same, the source means and the object being relatively close in physical relationship to one another but separated from one another; means detecting the reflected wave energy at a plurality of separated locations to provide an array of measurements with respect to the object and developing signals θ 1 ', θ 2 ' . . . therefrom, which signals bear a relationship to geometrical characteristics of the object; means comparing the signals θ 1 ', θ 2 ' . . . with standard signals θ 1 , θ 2 . . . , respectively, representative of the geometrical characteristics of a standard to provide an array of differentials θ 1 - θ 1 ', θ 2 - θ 2 ' . . . ; and means to combine the array of differentials θ 1 - θ 1 ', θ 2 - θ 2 ' . . . with a sensitivity matrix S that gives the sensitivity of each differential θ 1 - θ1' . . . to produce an array of deviations d 1 , d 2 . . . , each deviation being produced by a plurality of said differentials θ 1 - θ 1 ', θ 2 - θ 2 ' . . . . .

Claim 38

Apparatus that comprises, in combination: source means directing wave energy upon an object that reflects the same, the source means and the object being relatively close in physical relationship to one another but separated from one another; means detecting the reflected wave energy at a plurality of separated locations to provide an array of measurements with respect to the object and developing signals θ 1 ', θ 2 ' . . . therefrom, which signals bear a relationship to geometrical characteristics of the object; means comparing the signals θ 1 ', θ 2 ' . . . with standard signals θ 1 , θ 2 . . . , respectively, representative of the geometrical characteristics of a standard to provide an array of differentials θ 1 - θ 1 ', θ 2 - θ 2 ' . . . ; and means to combine the array of differentials θ 1 - θ 1 ', θ 2 - θ 2 ' . . . with a sensitivity matrix S that gives the sensitivity of each differential θ 1 - θ1' . . . to produce an array of deviations d 1 , d 2 . . . , each deviation being produced by a plurality of said differentials θ 1 - θ 1 ', θ 2 - θ 2 ' . . . . .

Claim 39

Apparatus for inspecting objects, that comprises: means directing continuous acoustic wave energy upon a sample object to-be-inspected which reflects the same; means detecting the reflected wave energy; means comparing a characteristic of the reflected wave energy with the same characteristic of the original wave energy directed upon the sample object to note any difference θ A therebetween; means comparing the difference θ A with a difference θ B similarly obtained with respect to a standard object located substantially at the same position as the sample object to determine any difference θ.sub.Δ therebetween, the sample object being considered within manufacturing tolerance if the value θ.sub.Δ is within acceptable limits, said means detecting being operative to detect the reflected wave energy at a plurality of locations, said difference θ A being developed as a plurality of differences θ 1 ', θ 2 ' . . . , said difference θ B being developed as a plurality of differences θ 1 , θ 2 . . . , a corresponding differential being developed for each corresponding pair to develop data comprising θ 1 - θ 1 ', θ 2 - θ 2 ' . . . , the data thus developed providing information to establish whether the sample object is within acceptable tolerance.

Claim 40

Apparatus for inspecting objects, that comprises: means directing continuous acoustic wave energy upon a sample object to-be-inspected which reflects the same; means detecting the reflected wave energy; means comparing a characteristic of the reflected wave energy with the same characteristic of the original wave energy directed upon the sample object to note any difference θ A therebetween; means comparing the difference θ A with a difference θ B similarly obtained with respect to a standard object located substantially at the same position as the sample object to determine any difference θ.sub.Δ therebetween, the sample object being considered within manufacturing tolerance if the value θ.sub.Δ is within acceptable limits, said means detecting being operative to detect the reflected wave energy at a plurality of locations, said difference θ A being developed as a plurality of differences θ 1 ', θ 2 ' . . . , said difference θ B being developed as a plurality of differences θ 1 , θ 2 . . . , a corresponding differential being developed for each corresponding pair to develop data comprising θ 1 - θ 1 ', θ 2 - θ 2 ' . . . , the data thus developed providing information to establish whether the sample object is within acceptable tolerance.

Claim 41

Apparatus for inspecting objects, that comprises: means directing wave energy upon a sample object to-be-inspected which reflects the same; means detecting the reflected wave energy at a plurality of locations and providing a signal from each location; means comparing a characteristic of the reflected wave energy detected at each said location with the same characteristic of the original wave energy directed upon the sample object to note any difference therebetween; means comparing the difference derived from each location with a standard difference, as to the same location, similarly obtained with respect to a standard object located substantially at the same position as the sample object to determine any differential therebetween to provide an array of differentials; and means combining said array of differentials with an array of sensitivities to produce an array of deviations from which tolerance information as to said sample object is obtained, each deviation of the array of deviations being produced by a plurality of differentials of said array of differentials.

Claim 42

Apparatus for inspecting objects, that comprises: means directing wave energy upon a sample object to-be-inspected which reflects the same; means detecting the reflected wave energy at a plurality of locations and providing a signal from each location; means comparing a characteristic of the reflected wave energy detected at each said location with the same characteristic of the original wave energy directed upon the sample object to note any difference therebetween; means comparing the difference derived from each location with a standard difference, as to the same location, similarly obtained with respect to a standard object located substantially at the same position as the sample object to determine any differential therebetween to provide an array of differentials; and means combining said array of differentials with an array of sensitivities to produce an array of deviations from which tolerance information as to said sample object is obtained, each deviation of the array of deviations being produced by a plurality of differentials of said array of differentials.

Claim 43

Apparatus that employs geometrical characteristics of an object as a source of information with respect to the object; that comprises, in combination: means directing wave energy upon the object which reflects the same; means detecting the reflected wave energy at a plurality of separated locations to provide a signal from a characteristic of the reflected wave energy for each said location; means comparing the signal thus derived from the reflected wave energy detected at each location with a standard signal to determine any differential therebetween to provide an array of differentials; and means combining said array of differentials with an array of sensitivities to produce an array of deviations, each deviation being produced by a plurality of said differentials.

Claim 44

Apparatus that employs geometrical characteristics of an object as a source of information with respect to the object; that comprises, in combination: means directing wave energy upon the object which reflects the same; means detecting the reflected wave energy at a plurality of separated locations to provide a signal from a characteristic of the reflected wave energy for each said location; means comparing the signal thus derived from the reflected wave energy detected at each location with a standard signal to determine any differential therebetween to provide an array of differentials; and means combining said array of differentials with an array of sensitivities to produce an array of deviations, each deviation being produced by a plurality of said differentials.