US4094761A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Magnetion sputtering of ferromagnetic material
Assignee: Motorola Solutions Inc
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Filing: 1977-07-25
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Granted: 1978-06-13
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Expires: 1997-07-25
Abstract
Abstract A method for the magnetron sputtering of ferromagnetic material. An alloy of the ferromagnetic material is formed such that the alloy retains the desired characteristics of the material but the alloy has a Curie temperature that is below the sputtering temperature. In particular, the method can be applied to nickel by alloying the nickel with copper, platinum, or tin.
Inventors
- 👤 Richard W. Wilson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 09:39
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3426; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; H01F; H01F41/00; H01F41/14; H01F41/18; H01F41/183; H01J37/3402; H01J37/3405; H01J37/3408
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
56 words
An improved method for producing a magnetron sputtered film having the properties of a ferromagnetic material wherein the improvement comprises using a cathode target formed of said ferromagnetic material alloyed with a nonferromagnetic material to lower the Curie temperature of the alloy to less than the temperature maintained by said cathode target during the magnetron sputtering.
Claim 2
Dependent Claim
56 words
An improved method for producing a magnetron sputtered film having the properties of a ferromagnetic material wherein the improvement comprises using a cathode target formed of said ferromagnetic material alloyed with a nonferromagnetic material to lower the Curie temperature of the alloy to less than the temperature maintained by said cathode target during the magnetron sputtering.
References Cited (Backward Citations)
US4060470A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-06-12 | 1981-12-12 | 1982-06-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-06-12 | 1985-12-12 | 1986-06-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-06-12 | 1989-12-12 | 1990-06-13 | $7700.00 | Window Closed / Lapsed |