Capacitive load cell

Claim 2

A sensor for receiving forces to be measured comprising a support, a force responsive deflectable diaphragm member having a main portion and a central portion, said main portion surrounding said central portion, means mounting the main portion of said diaphragm member to said support at location spaced radially outwardly from the central portion to permit deflection of said diaphragm member under force, said diaphragm member having a recess formed in the central portion, said recess being spaced from the means mounting the main portion of said diaphragm member to said support by said main portion, and said recess forming a wall section at the central portion substantially thinner than the main portion of said diaphragm member, and capacitive sensing means to sense deflection of said diaphragm member from a rest position comprising a capacitor plate member mounted directly to said diaphragm member for translatory movement therewith, said capacitor plate member being mounted to the main portion at a preselected position adjacent the recess and having a surface portion thereof facing a surface portion of the main portion of said diaphragm member, said surface portions changing in spacing with respect to said diaphragm member during deflection of said diaphragm member.

Claim 3

The combination specified in claim 1 wherein said recess is surrounded by a peripheral wall, and means physically connected to the peripheral wall and to the capacitor plate to support said capacitor plate with respect to said peripheral wall and thereby to said diaphragm member.

Claim 4

The combination specified in claim 2 wherein said means to support said capacitor plate comprises thin strip members without substantial bending strength fixed to the peripheral wall and to the capacitor plate member.

Claim 5

The combination specified in claim 1 and a load receiving boss in the center portion of said diaphragm member, said wall section connecting said load receiving boss to the main portion of said diaphragm member.

Claim 6

The combination specified in claim 4 wherein said wall section comprises a wall member extending generally perpendicular to said diaphragm member, and wherein said load receiving boss has a load receiving surface offset from the main portion of said diaphragm member.

Claim 7

The combination specified in claim 1 wherein said capacitor plate comprises a plate having a central opening therethrough, and an overload stop member attached to said diaphragm member through said well section and positioned to engage said support member when said diaphragm member deflects a predetermined amount, said overload stop member extending through the central opening of said capacitor plate.

Claim 8

The combination specified in claim 1 wherein said capacitor plate comprises an insulating member, a plurality of support clips physically attached directly to said diaphragm member, and to said diaphragm for supporting the capacitor plate, and a metal coating on portions of said capacitor plate facing said diaphragm member to form an electrically conductive surface.

Claim 9

The combination as specified in claim 1 wherein said means mounting said diaphragm member to said support comprises a thin wall section at the outer periphery of said diaphragm member providing substantially free edge support for said diaphragm member during deflection thereof.

Claim 10

A sensor for receiving forces to be measured comprising a support, a force responsive deflectable diaphragm member having a main portion and a central portion, said main portion surrounding said central portion, means mounting the main portion of said diaphragm member to said support at location spaced radially outwardly from the central portion to permit deflection of said diaphragm member under force, said diaphragm member having a recess formed in the central portion and encompassed by an interior annular wall of a diameter comprising an inner diameter of said main portion, said diaphragm member having an outer diameter adjacent said means mounting, the ratio of said inner diameter to said outer diameter being between substantially 0.3 and 0.7, said recess forming a wall section at the central portion substantially thinner than the main portion of said diaphragm member, and capacitive sensing means to sense deflection of said diaphragm member from a rest position comprising a capacitor plate member mounted directly to said diaphragm member for translatory movement therewith, said capacitor plate member being mounted at a preselected position not substantially closer to the central axis than said interior annular wall and having surface portions thereof facing a surface of said diaphragm member, said surface portions changing in spacing with respect to said diaphragm member during deflection of said diaphragm member.

Claim 11

A sensor for receiving forces to be measured comprising a support, a force responsive deflectable diaphragm member having a main portion and a central portion, said main portion surrounding said central portion, means mounting the main portion of said diaphragm member to said support at location spaced radially outwardly from the central portion to permit deflection of said diaphragm member under force, said diaphragm member having a recess formed in the central portion and encompassed by an interior annular wall of a diameter comprising an inner diameter of said main portion, said diaphragm member having an outer diameter adjacent said means mounting, the ratio of said inner diameter to said outer diameter being between substantially 0.3 and 0.7, said recess forming a wall section at the central portion substantially thinner than the main portion of said diaphragm member, and capacitive sensing means to sense deflection of said diaphragm member from a rest position comprising a capacitor plate member mounted directly to said diaphragm member for translatory movement therewith, said capacitor plate member being mounted at a preselected position not substantially closer to the central axis than said interior annular wall and having surface portions thereof facing a surface of said diaphragm member, said surface portions changing in spacing with respect to said diaphragm member during deflection of said diaphragm member.

Claim 12

The combination of claim 9 wherein said ratio is substantially 0.5.

Claim 13

The combination as specified in claim 1 wherein said recess is surrounded by a peripheral wall defining an inner edge of said main portion, and flexible clip means connected to the peripheral wall and depending therefrom, said capacitor plate having a central opening defined by a capacitor plate inner peripheral wall, and means to fix said flexible clip means to said inner peripheral wall of said capacitor plate.