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US4088489A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for the preparation of relief structures

Assignee: Siemens AG
•
Filing: 1975-07-24
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Granted: 1978-05-09
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Expires: 1995-07-24
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Abstract

Abstract The invention provides a method for the preparation of relief structures of highly heat-resistant polymers, using radiation-sensitive, soluble preliminary polymers in the form of polyaddition or polycondensation products of polyfunctional carbocyclic or heterocyclic compounds containing radiation-sensitive radicals in ester groups bound to said compounds with diamines, diisocyanates, bis-acid chlorides or dicarboxylic acids of cyclic structure. According to the invention, the polyfunctional compounds carrying the radiation-sensitive radicals have, besides carboxyl, carboxylic acid chloride, amino, isocyanate or hydroxyl groups suitable for addition and condensation reactions, radiation-reactive radicals in the ester-groups bound to the compounds, partly in ortho or peri position thereto of the following structure: ##STR1## wherein: R 1 = alkylene or aralkylene R 2 = h, ch 3 , cl R 3 = h

Inventors

  • 👤 Roland Rubner
  • 👤 Wolfgang Kleeberg
  • 👤 Eberhard Kuhn

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 07:15
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0388

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 227 words
In a method for the preparation of relief structures consisting of highly heat resistant polymers comprising the steps of applying a soluble, photo or radiation-sensitive prepolymer in the form of a film or foil to a substrate, said prepolymer being a poly-addition or poly-condensation prepolymer having repeating units of the formula ##STR4## wherein, X and D each comprise a carbocyclic and/or heterocyclic nucleus: G is selected from the group consisting of amide, urea or urethane linkages; R* is an organic radical containing a photo- or radiation induced di- or polymerizable olefinic double bond; and is a component of group COR*, said group bound to said nucleus in ortho or peri-position to G; F is a group capable of reacting with the carbonyl group of COR* to form a cyclic structure upon heating of the prepolymer to liberate R*OH; and wherein F is arranged in ortho- or peri-position to G; x is 1 or 2; and y is 0 or 2 exposing or irradiating the photo or radiation active layer through a negative pattern, dissolving or stripping the unexposed or unirradiated portions and annealing the relief structure obtained; the improvement which comprises using as said R*, a radical represented by the formula; ##STR5## wherein R 1 is alkylene or aralkylene; R 2 is selected from the group consisting of hydrogen, methyl and chlorine, and R 3 is hydrogen.
Claim 2
Dependent Claim 227 words
In a method for the preparation of relief structures consisting of highly heat resistant polymers comprising the steps of applying a soluble, photo or radiation-sensitive prepolymer in the form of a film or foil to a substrate, said prepolymer being a poly-addition or poly-condensation prepolymer having repeating units of the formula ##STR4## wherein, X and D each comprise a carbocyclic and/or heterocyclic nucleus: G is selected from the group consisting of amide, urea or urethane linkages; R* is an organic radical containing a photo- or radiation induced di- or polymerizable olefinic double bond; and is a component of group COR*, said group bound to said nucleus in ortho or peri-position to G; F is a group capable of reacting with the carbonyl group of COR* to form a cyclic structure upon heating of the prepolymer to liberate R*OH; and wherein F is arranged in ortho- or peri-position to G; x is 1 or 2; and y is 0 or 2 exposing or irradiating the photo or radiation active layer through a negative pattern, dissolving or stripping the unexposed or unirradiated portions and annealing the relief structure obtained; the improvement which comprises using as said R*, a radical represented by the formula; ##STR5## wherein R 1 is alkylene or aralkylene; R 2 is selected from the group consisting of hydrogen, methyl and chlorine, and R 3 is hydrogen.
Claim 3
Dependent Claim 15 words
The method of claim 1, wherein the radiation-reactive radical R* is a N-(m-β-oxyethoxy)phenyl maleimide radical.
Claim 4
Dependent Claim 18 words
The method of claim 1 wherein the radiation reactive radical R* is a N-oxymethyl or N-β-oxyethyl maleimide radical.
Claim 5
Dependent Claim 16 words
The method of claim 1 wherein the soluble pre-polymer is prepared in hexamethyl phosphoric acid triamide.

References Cited (Backward Citations)

US3475176A Cited
US3650746A Cited
US3858510A Cited
US3801638A Cited
US3753720A Cited
US3957512A Cited
US3847767A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1981-05-08 1981-11-07 1982-05-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1985-05-08 1985-11-07 1986-05-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1989-05-08 1989-11-07 1990-05-09 $7700.00 Window Closed / Lapsed

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