Patent EP0036168A2 successfully refreshed from Google Patents.
US4080281A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for making metal films
Assignee: Individual
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Filing: 1976-09-22
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Granted: 1978-03-21
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Expires: 1996-09-22
Abstract
Abstract An apparatus for making metal films comprises an air tight chamber; a rotatable cylindrical cage to receive substrates therein, said rotatable cage constituting an anode; and cathode means of sputtering metal material disposed coaxially of said rotatable cylindrical cage. When a sputtering power source such as DC power source or asymmetrical AC power source is applied across the cage and the cathode of sputtering metal material, metal atoms are sputtered from the cathode means and then deposited on the substrates in the cage. The cage may have partitions or radial walls provided in a circumferential direction about the axis of rotation, so that the substrates may be received in the cage in a separate manner. Alternatively, the cage may be open at the inner periphery and in this case, the cathode means may be disposed inside of the cage.
Inventors
- 👤 Tsunehiko Endo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 19:58
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/223; C23C14/34
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
136 words
An apparatus for making metal films, comprising an air tight chamber, a rotatable cylindrical cage disposed within said chamber to receive substrates therein, said cylindrical cage constituting an anode and comprising an outer cylindrical wall, an inner cylindrical wall and a pair of radial side walls provided so as to close the annular space between said outer and inner cylindrical walls, said side walls of said cylindrical cage protruding from said inner cylindrical wall so that an additional substrate receiving space is formed, an outer cylindrical cathode disposed coaxially of and outside said cylindrical cage and adapted to be composed of sputtering material, means to rotate said rotatable cylindrical cage, and a sputtering power source connected across said rotatable cylindrical cage and said cathode, whereby sputtering material from said cathode is deposited on any said substrates.
Claim 2
Independent Claim
136 words
An apparatus for making metal films, comprising an air tight chamber, a rotatable cylindrical cage disposed within said chamber to receive substrates therein, said cylindrical cage constituting an anode and comprising an outer cylindrical wall, an inner cylindrical wall and a pair of radial side walls provided so as to close the annular space between said outer and inner cylindrical walls, said side walls of said cylindrical cage protruding from said inner cylindrical wall so that an additional substrate receiving space is formed, an outer cylindrical cathode disposed coaxially of and outside said cylindrical cage and adapted to be composed of sputtering material, means to rotate said rotatable cylindrical cage, and a sputtering power source connected across said rotatable cylindrical cage and said cathode, whereby sputtering material from said cathode is deposited on any said substrates.
Claim 3
Dependent Claim
34 words
An apparatus for making metal films as set forth in claim 1, including an inner cathode disposed within said cylindrical cage so that said additional substrate receiving space is exposed to said inner cathode.
Claim 4
Independent Claim
147 words
An apparatus for making metal films, comprising an air tight chamber, a rotatable cylindrical cage disposed within said chamber to receive substrates therein, said cylindrical cage constituting an anode, an inner cathode disposed coaxially of and inside and cylindrical cage, said cylindrical cage comprising an outer cylindrical wall, an inner cylindrical wall and a pair of radial side walls provided so as to close the annular space between said outer and inner cylindrical walls, said side walls of said cylindrical cage protruding inwardly from said inner cylindrical wall to form another substrate receiving space, an outer clyindrical cathode disposed coaxially of and outside said cylindrical cage and adapted to be composed of sputtering material, means to rotate said rotatable cylindrical cage, and a sputtering power source connected across said rotatable cylindrical cage and said cathodes, whereby, sputtering material from said cathodes is deposited on any said substrates.
Claim 5
Independent Claim
147 words
An apparatus for making metal films, comprising an air tight chamber, a rotatable cylindrical cage disposed within said chamber to receive substrates therein, said cylindrical cage constituting an anode, an inner cathode disposed coaxially of and inside and cylindrical cage, said cylindrical cage comprising an outer cylindrical wall, an inner cylindrical wall and a pair of radial side walls provided so as to close the annular space between said outer and inner cylindrical walls, said side walls of said cylindrical cage protruding inwardly from said inner cylindrical wall to form another substrate receiving space, an outer clyindrical cathode disposed coaxially of and outside said cylindrical cage and adapted to be composed of sputtering material, means to rotate said rotatable cylindrical cage, and a sputtering power source connected across said rotatable cylindrical cage and said cathodes, whereby, sputtering material from said cathodes is deposited on any said substrates.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-03-20 | 1981-09-19 | 1982-03-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-03-20 | 1985-09-19 | 1986-03-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-03-20 | 1989-09-19 | 1990-03-21 | $7700.00 | Window Closed / Lapsed |