Process for the accomplishment of deep microengraving by a laser beam
Abstract
Abstract A process for deep micro-engraving of a material includes the steps of superpositioning a plurality of elementary layers of respectively alternating indices on the material. Each of the layers is individually transparent to a predetermined wavelength in vacuum, and has an optical thickness equal to one quarter of the predetermined wavelength. The process further includes forming a plurality of openings in the elementary layers; the openings correspond to regions to be engraved on the material, and uncover selected portions of the material. The material is then illuminated by a laser beam of sufficient power to engrave, by sublimation, the uncovered material portions. The laser has the predetermined wavelength, and the plurality of layers form a mirror for the laser beam, which have a relatively high threshold of damage from the laser, and absorb substantially no power from the laser beam.
Inventors
- 👤 Jacques Pelletier
- 👤 Francois Rinchet
Bibliographic Details
Claims Analysis
Total Claims: 5References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-03-06 | 1981-09-05 | 1982-03-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-03-06 | 1985-09-05 | 1986-03-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-03-06 | 1989-09-05 | 1990-03-07 | $7700.00 | Window Closed / Lapsed |