Apparatus for depositing uniform films

Claim 2

Apparatus for forming a uniform film on a planar surface of a planar support the apparatus comprising a drivable turntable; means for removably locating the planar support on the turntable; a distributor, mounted for rotation with the turntable for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor having at least one portion extending axially from the turntable and defining a radially outwardly inclined conical surface for guiding the fluent material towards the planar surface; a housing for enclosing the turntable and the support; dispensing means defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the housing so that the outlet of the dispensing means is located over the distributor.

Claim 3

Apparatus as claimed in claim 1 wherein the housing comprises an optically transmissive top, a base, and a side wall section.

Claim 4

Apparatus as claimed in claim 2 further comprising means for causing gaseous material to flow through the housing over the location of the support and means for heating the gaseous material.

Claim 5

Apparatus as claimed in claim 3 further comprising a drive spindle means for driving the drivable turntable, the drive spindle means defining a gaseous material inlet passage and wherein the enclosure defines a gaseous material outlet passage, the means for causing gaseous material to flow through the housing including the gaseous material inlet and outlet passages.

Claim 6

Apparatus as claimed in claim 3 wherein the means for heating gaseous material comprises a flexible heater tape secured on the outside of the housing.

Claim 7

Apparatus for forming a uniform film on a planar surface surface of a planar support, the apparatus comprising: a drivable turntable defining an annular groove in its base; means for removably locating the planar support on the turntable; a distributor, releasably mounted on the turntable, for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor having at least one portion extending axially from the turntable and defining a radially outwardly extending conical surface for guiding fluent material towards the planar support; a housing for enclosing the turntable and support, the housing comprising an optically transmissive top, a base, a side wall section, a first upstanding annular flange secured to the base of the housing coaxially with the turntable, and a second upstanding annular flange secured to and arranged to lie within, but not in contact with the annular groove, the base defining a series of bleed holes between the flanges; dispensing means, defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the optically transmissive top coaxially with the turntable.

Claim 8

Apparatus for forming a uniform film on a planar surface surface of a planar support, the apparatus comprising: a drivable turntable defining an annular groove in its base; means for removably locating the planar support on the turntable; a distributor, releasably mounted on the turntable, for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor having at least one portion extending axially from the turntable and defining a radially outwardly extending conical surface for guiding fluent material towards the planar support; a housing for enclosing the turntable and support, the housing comprising an optically transmissive top, a base, a side wall section, a first upstanding annular flange secured to the base of the housing coaxially with the turntable, and a second upstanding annular flange secured to and arranged to lie within, but not in contact with the annular groove, the base defining a series of bleed holes between the flanges; dispensing means, defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the optically transmissive top coaxially with the turntable.

Claim 9

Apparatus as claimed in claim 6 wherein the dispensing means is a filtering syringe.

Claim 10

Apparatus as claimed in claim 7 further comprising means for causing gaseous material to flow through the housing over the location of the support and means for heating the gaseous material.

Claim 11

Apparatus as claimed in claim 8 further comprising a drive spindle means for driving the drivable turntable, the drive means defining a gaseous material inlet passage and wherein the enclosure defines a gaseous material outlet passage, the means for causing gaseous material to flow through the housing including the gaseous material inlet and outlet passages.

Claim 12

Apparatus for forming a uniform film on a planar surface of a planar support the apparatus comprising a drivable turntable; means for removably locating the planar support on the turntable; a distributor, mounted for rotation with the turntable for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor including a conical portion which extends axially from the turntable such that the apex of the cone is axially spaced from the turntable; a housing for enclosing the turntable and the support; dispensing means defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the housing so that the outlet of the dispensing means is located over the distributor.

Claim 13

Apparatus for forming a uniform film on a planar surface of a planar support the apparatus comprising a drivable turntable; means for removably locating the planar support on the turntable; a distributor, mounted for rotation with the turntable for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor including a conical portion which extends axially from the turntable such that the apex of the cone is axially spaced from the turntable; a housing for enclosing the turntable and the support; dispensing means defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the housing so that the outlet of the dispensing means is located over the distributor.

Claim 14

Apparatus as claimed in claim 10 wherein the distributor is releasably mounted on the turntable and comprises means for restraining the planar support from axial movement away from the turntable when the distributing means is mounted on the turntable.

Claim 15

Apparatus as claimed in claim 11 wherein the dispensing means is a filtering syringe.

Claim 16

Apparatus for forming a uniform film on a planar surface of a planar support the apparatus comprising a drivable turntable; means for removably locating the planar support on the turntable; a distributor, mounted for rotation with the turntable for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor including a portion which extends axially from the turntable and which is formed with a frusto-conical face and a central reservoir for receiving a charge of fluent material; a housing for enclosing the turntable and support; dispensing means defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the housing so that the outlet of the dispensing means is located over the distributor.

Claim 17

Apparatus for forming a uniform film on a planar surface of a planar support the apparatus comprising a drivable turntable; means for removably locating the planar support on the turntable; a distributor, mounted for rotation with the turntable for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor including a portion which extends axially from the turntable and which is formed with a frusto-conical face and a central reservoir for receiving a charge of fluent material; a housing for enclosing the turntable and support; dispensing means defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the housing so that the outlet of the dispensing means is located over the distributor.

Claim 18

Apparatus for forming a uniform film on a planar surface of a planar support, the apparatus comprising a drivable turntable defining an annular groove in its base; means for removably locating the planar support on the turntable; a distributor, releasably mounted on the turntable, for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor including a conical portion which extends axially from the turntable such that the apex of the cone is axially spaced from the turntable; a housing for enclosing the turntable and support, the housing comprising an optically transmissive top, a base, a side wall section, a first upstanding annular flange secured to the base of the housing, coaxially with the turntable, and a second upstanding annular flange secured to and arranged to lie within, but not in contact with the annular groove, the base defining a series of bleed holes between the flanges; dispensing means, defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the optically transmissive top coaxially with the turntable.

Claim 19

Apparatus for forming a uniform film on a planar surface of a planar support, the apparatus comprising a drivable turntable defining an annular groove in its base; means for removably locating the planar support on the turntable; a distributor, releasably mounted on the turntable, for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor including a conical portion which extends axially from the turntable such that the apex of the cone is axially spaced from the turntable; a housing for enclosing the turntable and support, the housing comprising an optically transmissive top, a base, a side wall section, a first upstanding annular flange secured to the base of the housing, coaxially with the turntable, and a second upstanding annular flange secured to and arranged to lie within, but not in contact with the annular groove, the base defining a series of bleed holes between the flanges; dispensing means, defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the optically transmissive top coaxially with the turntable.

Claim 20

Apparatus for forming a uniform film on a planar surface of a planar support, the apparatus comprising: a drivable turntable defining an annular groove in its base; means for removeably locating the planar support on the turntable; a distributor, releasably mounted on the turntable, for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor including a portion which extends axially from the turntable and which is formed with a frusto-conical face and a central reservoir for receiving a charge of fluent material; a housing for enclosing the turntable and support, the housing comprising an optically transmissive top, a base, a side wall section, a first upstanding flange secured to the base of the housing coaxially with the turntable, and a second upstanding annular flange secured to and arranged to lie within, but not in contact with the annular groove, the base defining a series of bleed holes between the flanges; dispensing means, defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the optically transmissive top coaxially with the turntable.

Claim 21

Apparatus for forming a uniform film on a planar surface of a planar support, the apparatus comprising: a drivable turntable defining an annular groove in its base; means for removeably locating the planar support on the turntable; a distributor, releasably mounted on the turntable, for distributing fluent material radially outwardly onto the planar surface of the planar support, the distributor including a portion which extends axially from the turntable and which is formed with a frusto-conical face and a central reservoir for receiving a charge of fluent material; a housing for enclosing the turntable and support, the housing comprising an optically transmissive top, a base, a side wall section, a first upstanding flange secured to the base of the housing coaxially with the turntable, and a second upstanding annular flange secured to and arranged to lie within, but not in contact with the annular groove, the base defining a series of bleed holes between the flanges; dispensing means, defining an outlet for delivering a charge of fluent material to the distributor; and means for locating the dispensing means in the optically transmissive top coaxially with the turntable.