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US4075416A Expired / Lapsed US ⏱️ 0.0 years remaining

Electronic thin film circuit unit and method of making the same

Assignee: Robert Bosch GmbH
•
Filing: 1976-01-27
•
Granted: 1978-02-21
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Expires: 1996-01-27
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Abstract

Abstract After a valve metal layer on an insulating substrate has been metallized by sputtering on two layers of copper separated by an intermediate layer of iron, nickel or cobalt, and the combined circuit and component pattern has been etched out, followed by selectively etching away the metallization over the resistance components of the circuit, electroless deposited nickel and gold layers are successively applied to the remaining metallization and a solder layer is then applied on top by contact with liquid solder.

Inventors

  • 👤 Klaus Kuttner
  • 👤 Gunter Kruger
  • 👤 Fedor Modic

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 13:25
CPC Classifications
H; H10; H10D; H10D86/00; H10D86/80; H10D86/85

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 195 words
In a thin film electronic circuit unit comprising a substrate plate of insulating material, a patterned layer of a valve metal partly covering the substrate plate in accordance with a first and a second pattern, said first and second patterns being contiguous to each other in at least one location and respectively defining a first and a second portion of said valve metal layer, said first portion providing circuit elements and said second portion providing connecting conductors and areas for external contact and being provided with metallization, said metallization of said second valve metal layer portion including a first copper layer (4) on top of said valve metal layer, an intermediate layer (5) of a diffusion barrier metal on top of said first copper layer and a second copper layer (6) on top of said diffusion barrier metal layer, and a soft solder layer (7) provided on top of said metallization, the improvement wherein: said metallization further comprises five layers (4, 5, 6, 10, 11) of which one is a nickel layer (10) located on top of said second copper layer (6) and another is a gold layer (11) superimposed on said nickel layer (10).
Claim 2
Dependent Claim 195 words
In a thin film electronic circuit unit comprising a substrate plate of insulating material, a patterned layer of a valve metal partly covering the substrate plate in accordance with a first and a second pattern, said first and second patterns being contiguous to each other in at least one location and respectively defining a first and a second portion of said valve metal layer, said first portion providing circuit elements and said second portion providing connecting conductors and areas for external contact and being provided with metallization, said metallization of said second valve metal layer portion including a first copper layer (4) on top of said valve metal layer, an intermediate layer (5) of a diffusion barrier metal on top of said first copper layer and a second copper layer (6) on top of said diffusion barrier metal layer, and a soft solder layer (7) provided on top of said metallization, the improvement wherein: said metallization further comprises five layers (4, 5, 6, 10, 11) of which one is a nickel layer (10) located on top of said second copper layer (6) and another is a gold layer (11) superimposed on said nickel layer (10).
Claim 3
Dependent Claim 68 words
Improvement in a thin film circuit unit as defined in claim 1, wherein a layer of valve metal oxide (3) is provided on top of said first portion of said valve metal layer (2) and the thickness of said first portion of said valve metal layer is less than that of said second portion by an amount equal to the thickness of said valve metal oxide layer (3).
Claim 4
Dependent Claim 28 words
Improvement in a thin film circuit unit as defined in claim 1, in which said intermediate layer (5) between the first and second copper layers is of iron.
Claim 5
Dependent Claim 28 words
Improvement in a thin film circuit unit as defined in claim 1, in which said intermediate layer (5) between the first and second copper layers is of nickel.
Claim 6
Dependent Claim 28 words
Improvement in a thin film circuit unit as defined in claim 1, in which said intermediate layer (5) between the first and second copper layers is of cobalt.
Claim 7
Dependent Claim 21 words
Improvement in a thin film circuit unit as defined in claim 1, in which said valve metal layer is of tantalum.
Claim 8
Dependent Claim 23 words
Improvement in a thin film circuit unit as defined in claim 1, in which said soft solder layer (7) is of lead-tin solder.

References Cited (Backward Citations)

US3625758A Cited
US3423260A Cited
US3621442A Cited
US3576722A Cited
US3634159A Cited
US3778530A Cited
US3809797A Cited
US3781596A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1981-02-20 1981-08-22 1982-02-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1985-02-20 1985-08-22 1986-02-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1989-02-20 1989-08-22 1990-02-21 $7700.00 Window Closed / Lapsed

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