Abstract A solid state pH measuring electrode having the pH measuring electrode structure formed by successive layers on an insulating substrate with an outer pH sensitive glass layer being deposited on a supporting solid electrolyte layer by RF sputtering. The reference electrode is similarly formed by depositing an outer layer of glass onto a supporting solid electrolyte layer by RF sputtering with the temperature expansion of the glass and supporting solid electrolyte structure being selected to produce a differential expansion causing random cracking of the glass layer during temperature cycling of the reference electrode. A combination structure is provided wherein the pH measuring electrode and the reference electrode are formed on opposite sides of the same electrically insulating substrate with a thermal compensating element being included in the integrated package.
A method of making a reference electrode comprising the steps of depositing a metallic layer on an electrically insulating substrate, depositing a solid electrolyte layer on said metallic layer, depositing a glass layer on said electrolyte layer with a coefficient of thermal expansion mismatched with respect to a coefficient of thermal expansion of said electrolyte layer to produce cracking of said glass layer during a predetermined temperature cycle and exposing said electrode to said temperature cycle.
Claim 2
Independent Claim
76 words
A method of making a reference electrode comprising the steps of depositing a metallic layer on an electrically insulating substrate, depositing a solid electrolyte layer on said metallic layer, depositing a glass layer on said electrolyte layer with a coefficient of thermal expansion mismatched with respect to a coefficient of thermal expansion of said electrolyte layer to produce cracking of said glass layer during a predetermined temperature cycle and exposing said electrode to said temperature cycle.
Claim 3
Dependent Claim
22 words
A method of making a reference electrode as set forth in claim 1 wherein said glass layer is deposited by RF sputtering.
Claim 4
Dependent Claim
46 words
A method of making a reference electrode as set forth in claim 1 and including the further steps of providing an electrical connection to said metallic layer and encapsulating said substrate, said metallic layer and a portion of said glass layer while exposing said electrical connection.