US4064029A
Expired / Lapsed
US
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Method of making an improved superconducting quantum interference device
Assignee: Energy Research and Development Administration ERDA
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Filing: 1977-02-08
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Granted: 1977-12-20
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Expires: 1997-02-08
Abstract
Abstract An improved superconducting quantum interference device is made by sputtering a thin film of an alloy of three parts niobium to one part tin in a pattern comprising a closed loop with a narrow region, depositing a thin film of a radiation shield such as copper over the niobium-tin, scribing a narrow line in the copper over the narrow region, exposing the structure at the scribed line to radiation and removing the deposited copper.
Inventors
- 👤 Cheng-Teh Wu
- 👤 Charles M. Falco
- 👤 Robert T. Kampwirth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 06:56
CPC Classifications
G; G01; G01R; G01R33/00; G01R33/02; G01R33/035; G01R33/0354; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0912; Y; Y10; Y10S; Y10S505/00; Y10S505/80; Y10S505/815; Y10S505/816; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49014
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
71 words
A method of making a thin-film SQUID on a substrate comprising the following steps: sputtering an alloy of three parts niobium to one part tin in a desired closed loop pattern on the substrate; depositing a shielding material over the sputtered alloy; removing a portion of the shielding material in a thin line across said loop in a desired region; exposing the line to particle radiation; and removing the shielding material.
Claim 2
Independent Claim
71 words
A method of making a thin-film SQUID on a substrate comprising the following steps: sputtering an alloy of three parts niobium to one part tin in a desired closed loop pattern on the substrate; depositing a shielding material over the sputtered alloy; removing a portion of the shielding material in a thin line across said loop in a desired region; exposing the line to particle radiation; and removing the shielding material.
Claim 3
Dependent Claim
27 words
The method of claim 1 wherein the closed pattern is photoetched to remove a portion of the alloy to leave a closed loop with a narrow region.
Claim 4
Dependent Claim
26 words
The method of claim 2 wherein the desired region for removing a portion of the shielding material is across the narrow region in the closed loop.
Claim 5
Dependent Claim
24 words
The method of claim 3 wherein the step of removing a portion of the shielding material comprises scratching a line in the shielding material.
Claim 6
Dependent Claim
11 words
The method of claim 3 wherein the shielding material is copper.
Claim 7
Dependent Claim
14 words
The method of claim 3 wherein the radiation is a beam of alpha particles.
Claim 8
Dependent Claim
19 words
The method of claim 3 wherein the shielding material is lead and the radiation is a beam of neutrons.
Claim 9
Independent Claim
79 words
A method of making a thin-film SQUID on a substrate of sapphire comprising the steps of: sputtering an alloy of three parts niobium to one part tin to a thickness in the range of 20 to 500 nanometers on the substrate; photoetching the alloy to leave a closed loop with a narrow region; depositing copper on the alloy to a thickness of about 400 nonometers; scratching substantially through the copper with a razor blade to cross the narrow region;
Claim 10
Independent Claim
79 words
A method of making a thin-film SQUID on a substrate of sapphire comprising the steps of: sputtering an alloy of three parts niobium to one part tin to a thickness in the range of 20 to 500 nanometers on the substrate; photoetching the alloy to leave a closed loop with a narrow region; depositing copper on the alloy to a thickness of about 400 nonometers; scratching substantially through the copper with a razor blade to cross the narrow region;
Claim 11
Dependent Claim
34 words
exposing the scratched area to radiation by alpha particles at an energy of about 50 KeV and a flux of about 10 14 ions per square centimeter; and removing the copper with nitric acid.
Claim 12
Dependent Claim
34 words
exposing the scratched area to radiation by alpha particles at an energy of about 50 KeV and a flux of about 10 14 ions per square centimeter; and removing the copper with nitric acid.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-12-19 | 1981-06-20 | 1981-12-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-12-19 | 1985-06-20 | 1985-12-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-12-19 | 1989-06-20 | 1989-12-20 | $7700.00 | Window Closed / Lapsed |