US4063192A
Expired / Lapsed
US
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Krypton fluoride excimer laser utilizing nitrogen trifluoride as a fluorine donor
Assignee: Northrop Grumman Systems Corp
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Filing: 1976-06-07
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Granted: 1977-12-13
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Expires: 1996-06-07
Abstract
Abstract A laser using an electron beam pump mixture of argon, krypton and nitrogen trifluoride. High power krypton fluoride laser emission is efficiently generated by employing nitrogen trifluoride as a fluorine donor.
Inventors
- 👤 Mani Lal Bhaumik
- 👤 Robert Spencer Bradford, Jr.
- 👤 Earl Rema Ault
- 👤 Philip Clyde Stevens
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 18:54
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/09; H01S3/097; H01S3/09707; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
88 words
A KrF laser comprising: a gas chamber, a pair of reflectors, one of which is only partially reflective, positioned opposite each other to define a laser ocsillator cavity which passes through the chamber, a gas mixture comprising Ar, Kr and NF 3 being fed to said chamber, and laser pump means for exciting the gas mixture, NF 3 operating as a fluorine donor to the Kr to form KrF, the pump means effecting a population inversion in the KrF whereby KrF laser emission passes through said partial reflector.
Claim 2
Dependent Claim
88 words
A KrF laser comprising: a gas chamber, a pair of reflectors, one of which is only partially reflective, positioned opposite each other to define a laser ocsillator cavity which passes through the chamber, a gas mixture comprising Ar, Kr and NF 3 being fed to said chamber, and laser pump means for exciting the gas mixture, NF 3 operating as a fluorine donor to the Kr to form KrF, the pump means effecting a population inversion in the KrF whereby KrF laser emission passes through said partial reflector.
Claim 3
Dependent Claim
21 words
The laser of claim 1 wherein said gas mixture comprises Ar, 1300: Kr, 65-260: NF 3 , 0.5-2 parts by volume.
Claim 4
Dependent Claim
28 words
The laser of claim 1 wherein said gas mixture comprises Ar, 1300: Kr, 130: NF 3 , 1 parts by volume at a total pressure of 2-3.5 atmospheres.
Claim 5
Dependent Claim
19 words
The laser of claim 1 wherein said pump means comprises an electron gun having a pulsed e beam output.
Claim 6
Dependent Claim
19 words
The laser of claim 3 wherein said pump means comprises an electron gun having a pulsed e beam output.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-12-12 | 1981-06-13 | 1981-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-12-12 | 1985-06-13 | 1985-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-12-12 | 1989-06-13 | 1989-12-13 | $7700.00 | Window Closed / Lapsed |