US4049523A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of and device for providing thin layers by cathode sputtering
Assignee: US Philips Corp
•
Filing: 1976-06-10
•
Granted: 1977-09-20
•
Expires: 1996-06-10
Abstract
Abstract A mould and supporting dish for dry-compressed powder targets which are constructed so that adsorbed residual gases can readily escape during the evacuation process of the cathode sputtering device via substantially all the surfaces of the powder target, so that the powder target is not torn or its structure damaged during the evacuation process. The adsorbed residual gases can escape through apertures in the bottom and side wall of the supporting dish.
Inventors
- 👤 Ralf-Dieter Boehnke
- 👤 Waldemar Gotze
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 08:23
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
47 words
In a method of providing thin layers on a substrate by cathode sputtering from a compressed powder target in a vacuum, the improvement wherein any gases adsorbed in the compressed powder target are removed therefrom through surface pores including pores in the bottom surface of the target.
Claim 2
Dependent Claim
47 words
In a method of providing thin layers on a substrate by cathode sputtering from a compressed powder target in a vacuum, the improvement wherein any gases adsorbed in the compressed powder target are removed therefrom through surface pores including pores in the bottom surface of the target.
Claim 3
Dependent Claim
36 words
A method as claimed in claim 1, characterized in that gases adsorbed in the powder target are removed from the target via all outer surfaces of the target during the evacuation of the cathode sputtering device.
Claim 4
Dependent Claim
67 words
A supporting dish for supporting a compressed powder target, the bottom surface and side surfaces of said dish having apertures extending normal to the surfaces, in which the apertures on the surfaces adapted to face the target are formed as funnels which change into neck portions and emerge into parallel extending ducts which are provided on the surfaces of the supporting dish remote from the powder target.
Claim 5
Dependent Claim
67 words
A supporting dish for supporting a compressed powder target, the bottom surface and side surfaces of said dish having apertures extending normal to the surfaces, in which the apertures on the surfaces adapted to face the target are formed as funnels which change into neck portions and emerge into parallel extending ducts which are provided on the surfaces of the supporting dish remote from the powder target.
Claim 6
Dependent Claim
12 words
The supporting dish of claim 3 consisting of an electrically conductive material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-09-19 | 1981-03-21 | 1981-09-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-09-19 | 1985-03-21 | 1985-09-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-09-19 | 1989-03-21 | 1989-09-20 | $7700.00 | Window Closed / Lapsed |