US4048508A
Expired / Lapsed
US
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Apparatus for doping a semiconductor crystalline rod
Assignee: Siemens AG
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Filing: 1975-08-11
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Granted: 1977-09-13
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Expires: 1995-08-11
Abstract
Abstract An apparatus for doping a semiconductor crystalline rod by nuclear or radiogenic reactions comprised of a hollow irradiation housing having axially and rotatably movable rod support means within the chamber thereof and a neutron conductive sleeve connected with the housing and providing communication between a neutron source and the housing chamber. Accurate and controlled doping of a semiconductor crystalline rod mounted on the rod support means within the housing chamber occurs via controlled rod movement in relation to the neutron source.
Inventors
- 👤 Joachim Martin
- 👤 Ernst Haas
- 👤 Manfred Schnoeller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:45
CPC Classifications
G; G21; G21K; G21K1/00; C; C30; C30B; C30B31/00; C30B31/20; G21K5/00; G21K5/08
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
133 words
An apparatus for predetermined and reproducible doping of a crystalline semiconductor rod by the formation of dopant atoms via radiogenic radiation initiated by irradiating such rod comprising: a housing having end and side walls joined together to define a hollow irradiation chamber therein; an axially and rotatably movable rod support means mounted on an end wall of said housing and extending into said chamber for supporting a semiconductor rod; a drive means operationally coupled with said rod support means for effecting controlled axial and rotational movement of said support means; a radiation source positioned outside said housing for producing a radiation field capable of initiating radiogenic reactions in a semiconductor rod; and a connection means mounted on a side wall of said housing for providing communication between said chamber and said radiation field.
Claim 2
Independent Claim
133 words
An apparatus for predetermined and reproducible doping of a crystalline semiconductor rod by the formation of dopant atoms via radiogenic radiation initiated by irradiating such rod comprising: a housing having end and side walls joined together to define a hollow irradiation chamber therein; an axially and rotatably movable rod support means mounted on an end wall of said housing and extending into said chamber for supporting a semiconductor rod; a drive means operationally coupled with said rod support means for effecting controlled axial and rotational movement of said support means; a radiation source positioned outside said housing for producing a radiation field capable of initiating radiogenic reactions in a semiconductor rod; and a connection means mounted on a side wall of said housing for providing communication between said chamber and said radiation field.
Claim 3
Dependent Claim
16 words
An apparatus as defined in claim 1 wherein said connection means includes a radiation conductor therein.
Claim 4
Dependent Claim
15 words
An apparatus as defined in claim 1 wherein said radiation source is a neutron source.
Claim 5
Dependent Claim
15 words
An apparatus as defined in claim 3 wherein said neutron source is a nuclear reactor.
Claim 6
Dependent Claim
39 words
An apparatus as defined in claim 1 wherein said housing is formed of a material selected from the group consisting of aluminum, a zirconium alloy having tin and iron therein, a high-grade steel, quartz and a polymerized hydrocarbon material.
Claim 7
Dependent Claim
14 words
An apparatus as defined in claim 5 wherein said housing is formed of polyethylene.
Claim 8
Dependent Claim
29 words
An apparatus as defined in claim 1 wherein said housing includes a gas inlet means and a gas outlet means for passage of a shielding gas through said chamber.
Claim 9
Dependent Claim
14 words
An apparatus as defined in claim 1 wherein said connection means is a tube.
Claim 10
Dependent Claim
23 words
An apparatus as defined in claim 1 wherein said neutron source is a nuclear source and said connection means includes a neutron conductor.
Claim 11
Dependent Claim
16 words
An apparatus as defined in claim 9 wherein said neutron conductor is a reflective glass tube.
Claim 12
Dependent Claim
14 words
An apparatus as defined in claim 9 wherein said neutron conductor comprises graphite blocks.
Claim 13
Dependent Claim
30 words
An apparatus as defined in claim 1 wherein said rod support means is formed of a material having a low absorption coefficient for the radiation used to irradiate said rod.
Claim 14
Dependent Claim
16 words
An apparatus as defined in claim 12 wherein said rod support means is composed of aluminum.
Claim 15
Dependent Claim
18 words
An apparatus as defined in claim 1 including means for cooling said rod support means and said housing.
Claim 16
Dependent Claim
23 words
An apparatus as defined in claim 1 wherein said rod support means comprises an upper rod clamp member and a lower socket member.
Claim 17
Dependent Claim
15 words
An apparatus as defined in claim 15 wherein said socket member is composed of aluminum.
Claim 18
Dependent Claim
38 words
An apparatus as defined in claim 1 including an axially movable absorber means positioned within said chamber and in working relation with said connection means so as to protect select portions of said rod from said radiation field.
Claim 19
Dependent Claim
18 words
An apparatus as defined in claim 17 wherein said absorber means is axially movable relative to said rod.
Claim 20
Dependent Claim
19 words
An apparatus as defined in claim 17 wherein said absorber means is axially movable relative to said radiation field.
Claim 21
Dependent Claim
27 words
An apparatus as defined in claim 17 wherein said absorber means includes walls of various thickness dependent on a desired doping program being produced along said rod.
Claim 22
Dependent Claim
35 words
An apparatus as defined in claim 17 wherein said radiation source is a neutron source and said absorber means is composed of a neutron-absorbing element selected from the group consisting of Cd, Gd and B.
Claim 23
Dependent Claim
25 words
An apparatus as defined in claim 21 wherein said absorber means is a vapor-deposited layer supported by a carrier body composed of an inert material.
Claim 24
Dependent Claim
24 words
An apparatus as defined in claim 21 wherein said absorber means is a vapor-deposited layer supported by the outer surface of said semiconductor rod.
Claim 25
Dependent Claim
28 words
An apparatus as defined in claim 21 wherein said absorber means is composed of a compound of said neutron-absorbing element, said compound being formed into a molded body.
Claim 26
Dependent Claim
13 words
An apparatus as defined in claim 24 wherein said compound is an oxide.
Claim 27
Dependent Claim
32 words
An apparatus as defined in claim 21 wherein said absorber means comprises a solution within a quartz container, said solution having a high concentration of high-radiation absorbing isotopes of said neutron-absorbing element.
Claim 28
Dependent Claim
23 words
An apparatus as defined in claim 1 wherein the side walls of said housing are at least partially formed of a radiation-reflective material.
Claim 29
Dependent Claim
34 words
An apparatus as defined in claim 1 wherein said drive means comprises a ferromagnetic core connected to said rod support means and drive electromagnets positioned outside said housing and operationally coupled with said core.
Claim 30
Dependent Claim
23 words
An apparatus as defined in claim 1 wherein said drive means includes a process computer for control of the rod support means movement.
Claim 31
Dependent Claim
39 words
An apparatus as defined in claim 1 wherein said rod support means comprises a plurality of rod-holding members for supporting a plurality of semiconductor rods on a rotatable palette adapted to rotate about a vertical axis of said rods.
Claim 32
Dependent Claim
15 words
An apparatus as defined in claim 21 wherein said absorber means comprises a molded body.
Claim 33
Dependent Claim
14 words
An apparatus as defined in claim 21 wherein said absorber means comprises a foil.
Claim 34
Dependent Claim
15 words
An apparatus as defined in claim 21 wherein said absorber means comprises a vapor-deposited layer.
Claim 35
Dependent Claim
15 words
An apparatus as defined in claim 1 wherein said radiation source comprises a particle accelerator.
Claim 36
Dependent Claim
15 words
An apparatus as defined in claim 1 wherein said radiation source comprises a radionucleide source.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-09-12 | 1981-03-14 | 1981-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-09-12 | 1985-03-14 | 1985-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-09-12 | 1989-03-14 | 1989-09-13 | $7700.00 | Window Closed / Lapsed |