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Oxygen sensor having thin film electrolyte

Assignee: Universal Oil Products Co
•
Filing: 1975-09-15
•
Granted: 1977-08-09
•
Expires: 1995-09-15
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Abstract

Abstract Oxygen sensor incorporating a thin film electrolyte such as yttria stabilized zirconia sputtered onto a substrate produces an electrical signal in response to differences in oxygen partial pressures. The electrical signal changes rapidly enough for useful operation at temperatures which are substantially lower than those required by conventional oxygen sensors having a rigid, self-supporting thimble, tubular, or disc type electrolyte. For example, rapidly responding signals have been generated at temperatures below 200° C whereas state of the art devices such as those used for sensing exhaust gases in automotive vehicles require temperatures higher than about 400° C.

Inventors

  • 👤 Carl F. Bauer
  • 👤 Lawrence B. Welsh
  • 👤 Karl J. Youtsey
  • 👤 Frank R. Szofran

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 13:53
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/26; G01N27/403; G01N27/406; G01N27/407; G01N27/4071

Claims Analysis

Total Claims: 15
Claim 1
Independent Claim 78 words
A thin film oxygen sensor comprising a substrate; a reference electrode coating on the substrate; an oxide-electrode interface region; a thin film layer of solid electrolyte having a thickness of less than about 1.5 μm; and a porous measuring electrode coating on the electrolyte; said oxide-electrode interface region being positioned between and in intimate contact with said reference electrode coating and said solid electrolyte so as to provide a stable reference oxygen partial pressure at the reference electrode.
Claim 2
Dependent Claim 78 words
A thin film oxygen sensor comprising a substrate; a reference electrode coating on the substrate; an oxide-electrode interface region; a thin film layer of solid electrolyte having a thickness of less than about 1.5 μm; and a porous measuring electrode coating on the electrolyte; said oxide-electrode interface region being positioned between and in intimate contact with said reference electrode coating and said solid electrolyte so as to provide a stable reference oxygen partial pressure at the reference electrode.
Claim 3
Dependent Claim 15 words
The oxygen sensor of claim 1 wherein said electrolyte comprises zirconia doped with 6-10% yttria.
Claim 4
Dependent Claim 18 words
The oxygen sensor of claim 1 wherein said electrolyte has a thickness of less than about 0.5 μm.
Claim 5
Dependent Claim 18 words
The oxygen sensor of claim 1 wherein said electrolyte has a thickness of less than about 0.1 μm.
Claim 6
Dependent Claim 11 words
The oxygen sensor of claim 1 wherein said substrate is non-metallic.
Claim 7
Dependent Claim 15 words
The oxygen sensor of claim 1 wherein said oxide-electrode interface region comprises a metal oxide.
Claim 8
Dependent Claim 18 words
The oxygen sensor of claim 1 wherein said oxide-electrode interface region comprises the metal of the reference electrode.
Claim 9
Dependent Claim 18 words
The oxygen sensor of claim 1 wherein said oxide-electrode interface region comprises oxides of a plurality of metals.
Claim 10
Dependent Claim 20 words
The oxygen sensor of claim 1 wherein said oxide-electrode interface region comprises a plurality of oxides of a single metal.
Claim 11
Dependent Claim 77 words
A thin film oxygen sensor comprising a metal substrate which performs as a reference electrode; an oxide-electrode interface region; a thin film layer of solid electrolyte having a thickness of less than about 1.5 μm; and a porous measuring electrode coating on the electrolyte; said oxide-electrode interface region being positioned between and in intimate contact with said reference electrode and said solid electrolyte so as to provide a stable reference oxygen partial pressure at the reference electrode.
Claim 12
Dependent Claim 77 words
A thin film oxygen sensor comprising a metal substrate which performs as a reference electrode; an oxide-electrode interface region; a thin film layer of solid electrolyte having a thickness of less than about 1.5 μm; and a porous measuring electrode coating on the electrolyte; said oxide-electrode interface region being positioned between and in intimate contact with said reference electrode and said solid electrolyte so as to provide a stable reference oxygen partial pressure at the reference electrode.
Claim 13
Dependent Claim 13 words
The oxygen sensor of claim 10 where said metal substrate is stainless steel.
Claim 14
Dependent Claim 18 words
The oxygen sensor of claim 10 wherein said electrolyte has a thickness of less than about 0.5 μm.
Claim 15
Dependent Claim 18 words
The oxygen sensor of claim 10 wherein said electrolyte has a thickness of less than about 0.1 μm.

References Cited (Backward Citations)

US3378478A Cited
US3578578A Cited
US3619381A Cited
US3719576A Cited
US3768259A Cited
US3914169A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-08-08 1981-02-07 1981-08-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-08-08 1985-02-07 1985-08-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-08-08 1989-02-07 1989-08-09 $7700.00 Window Closed / Lapsed

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