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US4040874A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor element having a polymeric protective coating and glass coating overlay

Assignee: General Electric Co
•
Filing: 1977-01-10
•
Granted: 1977-08-09
•
Expires: 1997-01-10
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Abstract

Abstract A multilayer passivation-encapsulation for a semiconductor element is provided by a suitable polymer layer disposed on the device and overcoated with a glass layer for hermeticity.

Inventors

  • 👤 Alexander J. Yerman

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 11:50
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; H10W74/01; H10W74/10; H10W74/131; H10W74/137; H10W74/147; H10W74/47; H10W74/476; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31652; Y10T428/31663; Y10T428/31721

Claims Analysis

Total Claims: 27
Claim 1
Independent Claim 252 words
A semiconductor element comprising: a body of semiconductor material having at least two regions of opposite type conductivity and a P-N junction disposed between, and formed by the abutting surfaces of, each pair of regions of opposite type conductivity; an end portion of at least one P-N junction exposed at a surface of the body; a layer of a protective coating material disposed on the exposed end portion of the at least one P-N junction; the protective coating material is a polymer which is, when cured, one selected from the group consisting of the reaction product of a silicon-free organic diamine and an organic tetracarboxylic dianhydride, a silicon-free organic diamine, an organic tetracarboxylic dianhydride and a polysiloxane diamine and a blend of polyimide compound of recurring structural units of the formula: ##STR10## with a polyimide, as required, composed of recurring structural units of the formula: ##STR11## wherein the molar proportion of the latter is from 0 to 50 mol percent wherein R is a divalent hydrocarbon radical, R' is a monovalent hydrocarbon radical, R" is a tetravalent organic radical, Q is a divalent silicon-free organic radical which is the residue of an organic diamine, x is a whole number equal to at least 1 and advantageously from 1 to 8 and as high as 1 to 10,000 or more, m is an integer greater than 1 n is zero or an integer greater than 0, and at least one layer of a glass material disposed on the layer of protective coating material.
Claim 2
Dependent Claim 252 words
A semiconductor element comprising: a body of semiconductor material having at least two regions of opposite type conductivity and a P-N junction disposed between, and formed by the abutting surfaces of, each pair of regions of opposite type conductivity; an end portion of at least one P-N junction exposed at a surface of the body; a layer of a protective coating material disposed on the exposed end portion of the at least one P-N junction; the protective coating material is a polymer which is, when cured, one selected from the group consisting of the reaction product of a silicon-free organic diamine and an organic tetracarboxylic dianhydride, a silicon-free organic diamine, an organic tetracarboxylic dianhydride and a polysiloxane diamine and a blend of polyimide compound of recurring structural units of the formula: ##STR10## with a polyimide, as required, composed of recurring structural units of the formula: ##STR11## wherein the molar proportion of the latter is from 0 to 50 mol percent wherein R is a divalent hydrocarbon radical, R' is a monovalent hydrocarbon radical, R" is a tetravalent organic radical, Q is a divalent silicon-free organic radical which is the residue of an organic diamine, x is a whole number equal to at least 1 and advantageously from 1 to 8 and as high as 1 to 10,000 or more, m is an integer greater than 1 n is zero or an integer greater than 0, and at least one layer of a glass material disposed on the layer of protective coating material.
Claim 3
Dependent Claim 20 words
The semiconductor element of claim 1 wherein m is from 10 to 10,000 and n is from 1 to 10,000.
Claim 4
Dependent Claim 10 words
The semiconductor element of claim 1 wherein m is 0.
Claim 5
Dependent Claim 13 words
The semiconductor element of claim 3 wherein m is from 10 to 10,000.
Claim 6
Dependent Claim 28 words
The semiconductor element of claim 1 wherein the coefficient of thermal expansion of the glass material approximates the coefficient of thermal expansion of the material of the body.
Claim 7
Dependent Claim 10 words
The semiconductor element of claim 5 wherein n is 0.
Claim 8
Dependent Claim 26 words
The semiconductor element of claim 5 and including a second layer of glass comprising silicon dioxide disposed on the at least one layer of glass material.
Claim 9
Dependent Claim 23 words
The semiconductor element of claim 5 wherein the glass material is one selected from the group consisting of borosilicate glass and phosphosilicate glass.
Claim 10
Dependent Claim 26 words
The semiconductor element of claim 8 and including a second layer of glass comprising silicon dioxide disposed on the at least one layer of glass material.
Claim 11
Dependent Claim 20 words
The semiconductor element of claim 8 wherein the thickness of the glass material is from 0.1 micrometer to 10 micrometer.
Claim 12
Dependent Claim 16 words
The semiconductor element of claim 10 wherein the thickness of the glass material is 3 micrometers.
Claim 13
Dependent Claim 37 words
The semiconductor element of claim 11 and including a second layer of glass comprising silicon dioxide disposed on the at least one layer of glass material, and the thickness of the second layer of glass is 2000A.
Claim 14
Dependent Claim 12 words
The semiconductor element of claim 12 wherein the semiconductor material is silicon.
Claim 15
Dependent Claim 26 words
The semiconductor element of claim 12 wherein the glass material is borosilicate and comprises from 15 to 25 percent mol of B 2 O 3 therein.
Claim 16
Dependent Claim 21 words
The semiconductor element of claim 14 wherein the glass material comprises 19 ± 2 mol percent B 2 O 3 .
Claim 17
Dependent Claim 12 words
The semiconductor element of claim 15 wherein the semiconductor material is silicon.
Claim 18
Dependent Claim 26 words
The semiconductor element of claim 10 wherein the glass material is borosilicate and comprises from 15 to 25 mol percent of B 2 O 3 therein.
Claim 19
Dependent Claim 12 words
The semiconductor element of claim 17 wherein the semiconductor material is silicon.
Claim 20
Dependent Claim 20 words
The semiconductor element of claim 17 wherein m is from 10 to 10,000 and n is from 1 to 10,000.
Claim 21
Dependent Claim 21 words
The semiconductor element of claim 17 wherein the glass material comprises 19 ± 2 mol percent B 2 O 3 .
Claim 22
Dependent Claim 12 words
The semiconductor element of claim 20 wherein the semiconductor material is silicon.
Claim 23
Dependent Claim 40 words
The semiconductor element of claim 10 and including a second layer of glass comprising silicon dioxide disposed on the at least one layer of glass material, and the thickness of the second layer of glass is from 1000A to 5000A.
Claim 24
Dependent Claim 12 words
The semiconductor element of claim 22 wherein the semiconductor material is silicon.
Claim 25
Dependent Claim 26 words
The semiconductor element of claim 22 wherein the glass material is borosilicate and comprises from 15 to 25 mol percent of B 2 O 3 therein.
Claim 26
Dependent Claim 21 words
The semiconductor element of claim 24 wherein the glass material comprises 19 ± 2 mol percent B 2 O 3 .
Claim 27
Dependent Claim 12 words
The semiconductor element of claim 25 wherein the semiconductor material is silicon.

References Cited (Backward Citations)

US3160520A Cited
US3316465A Cited
US3415680A Cited
US3343049A Cited
US3447975A Cited
US3481781A Cited
US3615913A Cited
US3917495A Cited
US3806371A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-08-08 1981-02-07 1981-08-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-08-08 1985-02-07 1985-08-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-08-08 1989-02-07 1989-08-09 $7700.00 Window Closed / Lapsed

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