US4039371A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Etchant for polyimides
Assignee: International Business Machines Corp
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Filing: 1976-08-30
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Granted: 1977-08-02
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Expires: 1996-08-30
Abstract
Abstract A composition for etching polyimide based polymers comprised of a tetraalkyl ammonium hydroxide and an organic acid selected from the group of acetic acid, tartaric acid and oxalic acid.
Inventors
- 👤 Friedrich Brunner
- 👤 Peter Frasch
- 👤 Friedrich Schwerdt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 02:50
CPC Classifications
C; C08; C08J; C08J7/00; C08J7/12; G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; G03F7/322; H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; C08J2379/00; C08J2379/04; C08J2379/08; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/0346; H05K3/00; H05K3/0011; H05K3/0017
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
37 words
A process of etching a polyimide based polymer comprising contacting said polymer with an aqueous solution of a polyalkylammonium hydroxide and an organic acid selected from the group consisting of acetic acid, tartaric acid and oxalic acid.
Claim 2
Dependent Claim
37 words
A process of etching a polyimide based polymer comprising contacting said polymer with an aqueous solution of a polyalkylammonium hydroxide and an organic acid selected from the group consisting of acetic acid, tartaric acid and oxalic acid.
Claim 3
Dependent Claim
14 words
The process of claim 1 wherein said solution comprises tetramethylammonium hydroxide and acetic acid.
Claim 4
Dependent Claim
32 words
The process of claim 2 wherein said solution comprises about 2.2 to about 3.0 weight percent of said tetramethylammonium hydroxide and about 1.1 to about 1.5 weight percent of said acetic acid.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-08-01 | 1981-01-31 | 1981-08-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-08-01 | 1985-01-31 | 1985-08-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-08-01 | 1989-01-31 | 1989-08-02 | $7700.00 | Window Closed / Lapsed |