Apparatus for determining photoelectrically the position of at least one focusing plane of an image

Claim 2

In an apparatus for determining the position of a focusing plane of an image within an optical device comprising: along an optical axis, an optical correlator incorporating imaging optics for imaging an object into an image plane, at least one structure or grating acting as spatial frequency filter and mounted in or in the vicinity of said image plane of said imaging optics; further incorporating means for photoelectrically detecting associated with said spatial frequency filter; means for defining the entrance pupil of said imaging optics into a plurality of different regions being traversed by light fluxes emitted from said object as a set of light fluxes to be measured and to be imaged on said spatial frequency filter for being jointly modulated; means for splitting said set of light fluxes corresponding to the respective pupil regions into a pair of sets of partial light fluxes; means for causing a relative movement between said structure or grating and said image of said object; said means within said optical correlator for photoelectrically detecting further generating electrical output signals in response to respective ones of said partial light fluxes; and means for processing said signals to derive further electrical signals being indicative of the position of the focusing plane of the image; the improvement comprising: said means for defining the entrance pupil of said imaging system into a plurality of different regions comprising two rhombic prisms (19,20) in front of said optical imaging system, each of said prisms being laterally and symmetrically arranged with respect to said optical axis of said optical imaging system for enlarging the distance between gravity centers of said entrance pupil of said optical imaging system.

Claim 3

The apparatus of claim 1, wherein a double wedge (30-33) is positioned between said imaging optics and said means for splitting.

Claim 4

The apparatus of claim 2, wherein a pivotably supported plate (34) is mounted between said imaging optics and said double wedge and parallel to said means for splitting.

Claim 5

The apparatus of claim 1, further comprising means for generating a reference beam indicating mechanically acting changes affecting at least one of the measuring beams passing through halves of said entrance pupil, associated with at least one of said means for photoelectrically detecting (24) of which the output signals corresponding to the changes are used for display and/or correction of the changes or the effects from same.

Claim 6

The apparatus of claim 4, wherein said means for generating said reference beam comprises an illuminating device (22) emitting said reference beam thus illuminating an index carrier provided with at least one index (23) which is imaged by objective (10) and the reference beam so generated is introduced into the measuring beam of one pupil half in a direction opposite to the incidence of the object radiation, and optical means (21,25,26) for transferring the reference beam into the beam of the other pupil half and in direction of incidence of the object radiation is provided, said index carrier impinged by said reference beam being associated with at least one of said means for photoelectrically detecting (24) for the generation of signals corresponding to the offset between a nominal position and the projected index image.

Claim 7

The apparatus of claim 5, wherein two mirror systems (25,26) mounted on said rhombic prisms (19,20) are provided as the optical means for transferring the reference beam.

Claim 8

The apparatus of claim 6, wherein said mirror systems mounted on said rhombic prisms (19,20) are pentaprisms (25,26).

Claim 9

The apparatus of claim 5, wherein a mirror system (21,21') inserted between said rhombic prisms (19,20) is provided as the optical means for transferring the reference beam.

Claim 10

The apparatus of claim 5, wherein a structure or grating defining a given spatial frequency component is provided as the component determining the structure of the projected index.

Claim 11

The apparatus of claim 5, wherein an index carrier in the form of a structure or grating (11) defining a given spatial frequency component is associated with said means for photoelectrically detecting (24).

Claim 12

The apparatus of claim 10, wherein one wedge (30) of a double wedge is movably supported and has a given length that is traversed by the measuring beams and twice by the reference beam, said wedge faced in the areas of the reference beam by spatially fixed wedges (31,33), while operating jointly with a movably supported wedge (32) in the region of the measuring beams.

Claim 13

The apparatus of claim 11 wherein means are provided for controlling the motion of said one wedge (30) of the double wedge as a function of the output signals from said detector (24) of the reference beam and for controlling the motion of said supported wedge (32) as a function of the output signals from additional detectors (14 through 17) associated with the measuring beams.

Claim 14

In an apparatus for determining the position of a focusing plane of an image within an optical device comprising: along an optical axis, an optical correlator incorporating imaging optics for imaging an object into an image plane, at least one structure or grating acting as spatial frequency filter and mounted in or in the vicinity of said image plane of said imaging optics, further incorporating means for photoelectrically detecting associated with said spatial frequency filter; means for defining the entrance pupil of said imaging optics into a plurality of different regions being traversed by light fluxes emitted from said object as a set of light fluxes to be measured and to be imaged on said spatial frequency filter for being jointly modulated; means for splitting said set of light fluxes corresponding to the respective pupil regions into a pair of sets of partial light fluxes; means for causing a relative movement between said structure or grating and said image of said object; said means within said optical correlator for photoelectrically detecting further generating electrical output signals in response to respective ones of said partial light fluxes; and means for processing said signals to derive further electrical signals being indicative of the position of the focussing plane of the image, the improvement comprising: said means for defining the entrance pupil of said imaging system into a plurality of different regions comprising mirror systems (35,36;37,38) in front of said optical imaging system, each of said mirror systems being laterally and symmetrically arranged with respect to said optical axis of said optical imaging system for enlarging the distance between gravity centers of said entrance pupil of said optical imaging system.

Claim 15

In an apparatus for determining the position of a focusing plane of an image within an optical device comprising: along an optical axis, an optical correlator incorporating imaging optics for imaging an object into an image plane, at least one structure or grating acting as spatial frequency filter and mounted in or in the vicinity of said image plane of said imaging optics, further incorporating means for photoelectrically detecting associated with said spatial frequency filter; means for defining the entrance pupil of said imaging optics into a plurality of different regions being traversed by light fluxes emitted from said object as a set of light fluxes to be measured and to be imaged on said spatial frequency filter for being jointly modulated; means for splitting said set of light fluxes corresponding to the respective pupil regions into a pair of sets of partial light fluxes; means for causing a relative movement between said structure or grating and said image of said object; said means within said optical correlator for photoelectrically detecting further generating electrical output signals in response to respective ones of said partial light fluxes; and means for processing said signals to derive further electrical signals being indicative of the position of the focussing plane of the image, the improvement comprising: said means for defining the entrance pupil of said imaging system into a plurality of different regions comprising mirror systems (35,36;37,38) in front of said optical imaging system, each of said mirror systems being laterally and symmetrically arranged with respect to said optical axis of said optical imaging system for enlarging the distance between gravity centers of said entrance pupil of said optical imaging system.

Claim 16

The apparatus of claim 13, wherein a double wedge (30-33) is positioned between said imaging optics and said means for splitting.

Claim 17

The apparatus of claim 14, wherein a pivotably supported plate (34) is mounted between said imaging optics and said double wedge and parallel to said means for splitting.

Claim 18

The apparatus of claim 13, further comprising means for generating a reference beam indicating mechanically acting changes affecting at least one of the measuring beams passing through halves of said entrance pupil, associated with at least one of said means for photoelectrically detecting (24) of which the output signals corresponding to the changes are used for display and/or correction of the changes or of the effects of same.

Claim 19

The apparatus of claim 16, wherein said means for generating said reference beam comprises an illuminating device (22) emitting said reference beam thus illuminating an index carrier provided with at least one index which is imaged by objective (10), and the reference beam so generated is introduced into the measuring beam of one pupil half in a direction opposite to the incidence of the object radiation, and optical means (21,25,26) for transferring the reference beam into the beam of the other pupil half and in a direction of incidence of the object radiation is provided, said index carrier impinged by said reference beam being associated with at least one of said means for photoelectrically detecting (24) for the generation of signals corresponding to the offset between a nominal position and the projected index image.

Claim 20

The apparatus of claim 17, wherein a structure of grating defining a given spatial frequency component is provided as the component determining the structure of the projected index.

Claim 21

The apparatus of claim 17, wherein an index carrier in the form of a structure or grating (11) defining a given spatial frequency component is associated with said means for photoelectrically detecting (24).

Claim 22

The apparatus of claim 19, wherein one wedge (30) of a double wedge is movably supported and has a given length that is traversed by the measuring beam and twice by the reference beam, said wedge is faced in the areas of the reference beam by spatially fixed wedges (31,33) while operating jointly with a movably supported wedge (32) in the region of the measuring beams.

Claim 23

The apparatus of claim 20, wherein means are provided for controlling the motion of said one wedge (30) of the double wedge as a function of the output signals from said detector (24) of the reference beam and for controlling the motion of said supported wedge (32) as a function of the output signals from additional detectors (14 through 17) associated with the measuring beams.