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US4032955A Expired / Lapsed US ⏱️ 0.0 years remaining

Deep diode transistor

Assignee: General Electric Co
•
Filing: 1976-08-09
•
Granted: 1977-06-28
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Expires: 1996-08-09
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Abstract

Abstract A deep diode transistor includes at least one of the emitter, the collector and the base regions comprising recrystallized material of the semiconductor substrate embodying the transistor. Each region of recrystallized material is formed in situ by the migration of a melt of a metal-rich semiconductor material through the material of the substrate at a predetermined elevated temperature along a thermal gradient established in the substrate.

Inventors

  • 👤 Thomas R. Anthony
  • 👤 Harvey E. Cline

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 13:52
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/124; H10D62/125; H10D10/00; H10P; H10P95/00; H10P95/50

Claims Analysis

Total Claims: 25
Claim 1
Independent Claim 384 words
A semiconductor transistor comprising a body of semiconductor material having two opposed major surfaces forming respectively the top and bottom surfaces of the body, a predetermined level of resistivity, a predetermined first type conductivity, a preferred crystal structure and a vertical axis substantially perpendicular to the major opposed surfaces and aligned substantially parallel with a first preferred crystal axis of the material of the body; at least one of the opposed major surfaces having a predetermined crystal planar orientation which is one selected from the group consisting of (100), (110) and (111); at least three integral planar-like regions of alternate and opposite type conductivity formed in the body to form, respectively, the collector, the base, and the emitter regions of the transistor; at least one of the planar-like regions comprising recrystallized semiconductor material of the body having a predetermined type conductivity and a predetermined level of resistivity and so oriented within the body as to be aligned with a second preferred crystal axis of the material of the body; each of the planar-like regions extending between, and terminating in, the opposed major surfaces of the body, the region having a vertical aligned substantially parallel with the vertical axis of the body and opposed end surfaces, each of which is coextensive with a respective one of the opposed major surfaces; the recrystallized material is formed in situ by the migration of a melt of metal-rich semiconductor material of the body through the material of the body by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the first preferred crystal axis and the vertical axis of the body and has a predetermined level of concentration of the metal of the melt as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration and the metal is distributed substantially uniformly throughout the entire region; the metal consisting of at least one dopant impurity material to impart the type conductivity and level of resistivity to the planar region; a P-N junction formed by the abutting, contiguous surfaces of the material of each of the planar regions and the material of the body, and each P-N junction being substantially perpendicular to, and exposed at, the major opposed surfaces of the body.
Claim 2
Dependent Claim 384 words
A semiconductor transistor comprising a body of semiconductor material having two opposed major surfaces forming respectively the top and bottom surfaces of the body, a predetermined level of resistivity, a predetermined first type conductivity, a preferred crystal structure and a vertical axis substantially perpendicular to the major opposed surfaces and aligned substantially parallel with a first preferred crystal axis of the material of the body; at least one of the opposed major surfaces having a predetermined crystal planar orientation which is one selected from the group consisting of (100), (110) and (111); at least three integral planar-like regions of alternate and opposite type conductivity formed in the body to form, respectively, the collector, the base, and the emitter regions of the transistor; at least one of the planar-like regions comprising recrystallized semiconductor material of the body having a predetermined type conductivity and a predetermined level of resistivity and so oriented within the body as to be aligned with a second preferred crystal axis of the material of the body; each of the planar-like regions extending between, and terminating in, the opposed major surfaces of the body, the region having a vertical aligned substantially parallel with the vertical axis of the body and opposed end surfaces, each of which is coextensive with a respective one of the opposed major surfaces; the recrystallized material is formed in situ by the migration of a melt of metal-rich semiconductor material of the body through the material of the body by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the first preferred crystal axis and the vertical axis of the body and has a predetermined level of concentration of the metal of the melt as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration and the metal is distributed substantially uniformly throughout the entire region; the metal consisting of at least one dopant impurity material to impart the type conductivity and level of resistivity to the planar region; a P-N junction formed by the abutting, contiguous surfaces of the material of each of the planar regions and the material of the body, and each P-N junction being substantially perpendicular to, and exposed at, the major opposed surfaces of the body.
Claim 3
Dependent Claim 25 words
The semiconductor transistor of claim 1 wherein the semiconductor material is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 4
Dependent Claim 35 words
The semiconductor transistor of claim 2 wherein the material of the body is silicon of N-type conductivity, and the recrystallized material has P-type conductivity and the dopant impurity material in the recrystallized silicon is aluminum.
Claim 5
Dependent Claim 23 words
The semiconductor transistor of claim 1 wherein the preferred planar crystal orientation is (111), and the first crystal axis is < 111> .
Claim 6
Dependent Claim 27 words
The semiconductor transistor of claim 4 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 7
Dependent Claim 24 words
The semiconductor transistor of claim 5 wherein the material of the body is silicon of N-type conductivity, and the dopant impurity material is aluminum.
Claim 8
Dependent Claim 35 words
The semiconductor transistor of claim 4 wherein the second crystal axis is one selected from the group consisting of < 011> , < 101> , < 110> , < 112>, < 211>, and < 121>.
Claim 9
Dependent Claim 27 words
The semiconductor transistor of claim 7 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 10
Dependent Claim 24 words
The semiconductor transistor of claim 8 wherein the material of the body is silicon of N-type conductivity, and the dopant impurity material is aluminum.
Claim 11
Dependent Claim 23 words
The semiconductor transistor of claim 1 wherein the preferred planar crystal orientation is (100), and the first crystal axis is < 100> .
Claim 12
Dependent Claim 27 words
The semiconductor transistor of claim 10 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 13
Dependent Claim 24 words
The semiconductor transistor of claim 11 wherein the material of the body is silicon of N-type conductivity, and the dopant impurity material is aluminum.
Claim 14
Dependent Claim 24 words
The semiconductor transistor of claim 10 wherein the second crystal axis is one selected from the group consisting of < 011> and < 011>.
Claim 15
Dependent Claim 27 words
The semiconductor transistor of claim 13 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 16
Dependent Claim 24 words
The semiconductor transistor of claim 14 wherein the material of the body is silicon of N-type conductivity, and the dopant impurity material is aluminum.
Claim 17
Dependent Claim 23 words
The semiconductor transistor of claim 1 wherein the preferred planar crystal orientation is (110), and the first crystal axis is < 110> .
Claim 18
Dependent Claim 27 words
The semiconductor transistor of claim 16 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 19
Dependent Claim 24 words
The semiconductor transistor of claim 17 wherein the material of the body is silicon of N-type conductivity, and the dopant impurity material is aluminum.
Claim 20
Dependent Claim 15 words
The semiconductor transistor of claim 16 wherein the second crystal axis is < 110> .
Claim 21
Dependent Claim 27 words
The semiconductor transistor of claim 19 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 22
Dependent Claim 24 words
The semiconductor transistor of claim 20 wherein the material of the body is silicon of N-type conductivity, and the dopant impurity material is aluminum.
Claim 23
Dependent Claim 55 words
The semiconductor transistor of claim 1 wherein at least two of the regions of the transistor consists in part of recrystallized semiconductor material of the body, at least one of the regions has the same type conductivity as that of the body and the predetermined level of resistivity is different from that of the body.
Claim 24
Dependent Claim 24 words
The semiconductor transistor of claim 1 wherein the transistor is one of a plurality of semiconductor devices formed in the body of semiconductor material.
Claim 25
Dependent Claim 24 words
The semiconductor transistor of claim 22 wherein the transistor is one of a plurality of semiconductor devices formed in the body of semiconductor material.

References Cited (Backward Citations)

US2813048A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-06-27 1980-12-27 1981-06-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-06-27 1984-12-27 1985-06-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-06-27 1988-12-27 1989-06-28 $7700.00 Window Closed / Lapsed

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