US4024835A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spinner chuck for non-circular substrates
Assignee: HP Inc
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Filing: 1975-10-06
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Granted: 1977-05-24
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Expires: 1995-10-06
Abstract
Abstract A spinner chuck having a recessed portion for receiving non-circular substrates is used to alleviate uneven build-up of photoresist coatings applied on the substrate. Openings are disposed in the base of the recess about the periphery thereof whereby to drain off coating material spun off into the volume between the substrate and chuck sidewall defining said recess.
Inventors
- 👤 Friedrich Scheu
- 👤 Glenn W. Weberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 18:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/162
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
156 words
A spinner chuck for holding a substrate material of predetermined thickness while the substrate is spun to distribute a coating material applied to its top surface, said spinner chuck comprising: a base portion; and an upper portion coupled to the base portion and having a flat surface on the top thereof, said flat surface having a recessed area for receiving and holding by vacuum the substrate material, the base of the recess having a plurality of openings spaced about the periphery thereof, means for establishing a vacuum pull through said openings, the depth of the recessed area being substantially equal to the thickness of the substrate material and greater in cross-sectional area than that of the substrate whereby coating material spinning off into the volume between the substrate and the sidewall defining the recess is drained off through said openings for producing uniform distribution of the applied coating material over the top surface of the substrate.
Claim 2
Dependent Claim
156 words
A spinner chuck for holding a substrate material of predetermined thickness while the substrate is spun to distribute a coating material applied to its top surface, said spinner chuck comprising: a base portion; and an upper portion coupled to the base portion and having a flat surface on the top thereof, said flat surface having a recessed area for receiving and holding by vacuum the substrate material, the base of the recess having a plurality of openings spaced about the periphery thereof, means for establishing a vacuum pull through said openings, the depth of the recessed area being substantially equal to the thickness of the substrate material and greater in cross-sectional area than that of the substrate whereby coating material spinning off into the volume between the substrate and the sidewall defining the recess is drained off through said openings for producing uniform distribution of the applied coating material over the top surface of the substrate.
Claim 3
Dependent Claim
15 words
The spinner chuck in claim 1 wherein the flat surface is of a circular shape.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-05-23 | 1980-11-22 | 1981-05-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-05-23 | 1984-11-22 | 1985-05-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-05-23 | 1988-11-22 | 1989-05-24 | $7700.00 | Window Closed / Lapsed |