Scanning photographic printer for integrated circuits

Claim 2

A scanning photographic printer for integrated circuits comprising: a source of a beam of light generally transmitted and centered along an optical axis; a first fixture which is rotatable about an axis of rotation and which includes a first mirror which is adjacent and inclined to the axis of rotation of the first fixture and affixed thereto, the first mirror being inclined also to the optical axis so that at least a portion of light is reflected away from the axis of rotation and is scanned through a sector as the mirror rotates, optical means disposed in the reflected beam of light and affixed to the first fixture for bringing the reflected beam of light to a first point of focus along a reflected beam optical axis defined by the optical means, a second mirror affixed to the first fixture for reflecting the beam of light so that the reflected beam optical axis is generally parallel to the axis of rotation, the second mirror reflecting the beam of light prior to the first point of focus, and a unitary power, nonreversing optical system aligned along the reflected beam optical axis beyond the first point of focus for bringing the reflected beam of light to a second point of focus; a second fixture which is radially translatable relative to the rotating first fixture and which includes means for positioning a partially transparent mask generally orthogonal to the reflected beam optical axis in the vicinity of first point of focus, and means for positioning an integrated circuit substrate to be photographically printed generally orthogonal to the reflected beam optical axis in the vicinity of the second point of focus; and means for translating the second fixture relative to the first fixture at a predetermined rate which is directly proportional to the velocity at which the reflected beam of light is scanned across the surface of the substrate, whereby the image of the mask is sequentially imposed on the integrated circuit substrate thereby photographically exposing the integrated circuit substrate.

Claim 3

A scanning photographic printer for integrated circuits according to claim 1, wherein there is further included means for rotating the first fixture at a predetermined rotational speed.

Claim 4

A scanning photographic printer for integrated circuits according to claim 2, wherein the beam of light from the source is essentially monochromatic.

Claim 5

A scanning photographic printer for integrated circuits according to claim 3, wherein the source is a laser.

Claim 6

A scanning photographic printer for integrated circuits comprising: a source of a beam of light generally transmitted and centered along an optical axis; a first fixture which is rotatable about an axis of rotation and which includes a central shaft about which the first fixture rotates, a facet being formed on an end of the shaft to define a first mirror which is adjacent and inclined to the axis of rotation of the first fixture and affixed thereto, the first mirror being inclined also to the optical axis so that at least a portion of light is reflected away from the axis of rotation and is scanned through a sector as the mirror rotates; optical means disposed in the reflected beam of light and affixed to the first fixture for bringing the reflected bean of light to a first point of focus along a reflected beam optical axis defined by the optical means, a second mirror affixed to the first fixture for reflecting the beam of light so that the reflected beam optical axis is generally parallel to the axis of rotation, the second mirror reflecting the beam of light prior to the first point of focus, and a unitary power, nonreversing optical system aligned along the reflected beam optical axis beyond the first point of focus for bringing the reflected beam of light to a second point of focus; a second fixture which is radially translatable relative to the rotating first fixture and which includes means for positioning a partially transparent mask generally orthogonal to the reflected beam optical axis in the vicinity of the first point of focus, and means for positioning an integrated circuit substrate to be photographically printed generally orthogonal to the reflected beam optical axis in the vicinity of the second point of focus; and means for translating the second fixture relative to the first fixture at a predetermined rate which is directly proportional to the rotational speed of the first fixture whereby the reflected beam of light is scanned sequentially across the surface of the mask and an image thereof is sequentially imposed on the integrated circuit substrate, thereby photographically exposing the integrated circuit substrate.

Claim 7

A scanning photographic printer for integrated circuits comprising: a source of a beam of light generally transmitted and centered along an optical axis; a first fixture which is rotatable about an axis of rotation and which includes a central shaft about which the first fixture rotates, a facet being formed on an end of the shaft to define a first mirror which is adjacent and inclined to the axis of rotation of the first fixture and affixed thereto, the first mirror being inclined also to the optical axis so that at least a portion of light is reflected away from the axis of rotation and is scanned through a sector as the mirror rotates; optical means disposed in the reflected beam of light and affixed to the first fixture for bringing the reflected bean of light to a first point of focus along a reflected beam optical axis defined by the optical means, a second mirror affixed to the first fixture for reflecting the beam of light so that the reflected beam optical axis is generally parallel to the axis of rotation, the second mirror reflecting the beam of light prior to the first point of focus, and a unitary power, nonreversing optical system aligned along the reflected beam optical axis beyond the first point of focus for bringing the reflected beam of light to a second point of focus; a second fixture which is radially translatable relative to the rotating first fixture and which includes means for positioning a partially transparent mask generally orthogonal to the reflected beam optical axis in the vicinity of the first point of focus, and means for positioning an integrated circuit substrate to be photographically printed generally orthogonal to the reflected beam optical axis in the vicinity of the second point of focus; and means for translating the second fixture relative to the first fixture at a predetermined rate which is directly proportional to the rotational speed of the first fixture whereby the reflected beam of light is scanned sequentially across the surface of the mask and an image thereof is sequentially imposed on the integrated circuit substrate, thereby photographically exposing the integrated circuit substrate.

Claim 8

A scanning photographic printer for integrated circuits according to claim 5, wherein the optical axis immediately prior to the first mirror is separate from and approximately parallel to the axis of rotation and wherein the first mirror is inclined at approximately at 45° angle to the optical axis and the axis of rotation.

Claim 9

A scanning photographic printer for integrated circuits according to claim 5, wherein there are further included a beam splitter disposed transversely to the optical axis prior to reflection by the first mirror, the beam splitter deflecting a portion of any light reflected back along the optical axis by the mask and integrated circuit substrate off the optical axis, a photodetector positioned to receive the reflected light deflected off the optical axis by the beam splitter and generating an electrical signal indicative of the intensity of the received light, and means responsive to the electrical signal for adjusting the relative lateral positions of the mask and integrated circuit substrate so that precise alignment of the image being imposed on the integrated circuit substrate with preexisting patterns may be maintained.

Claim 10

A scanning photographic printer for integrated circuits according to claim 7, wherein there are further included means attached to the first fixture electrically connected to the means responsive to the electrical signal for occluding the reflected beam of light prior to the first point of focus.

Claim 11

A scanning photographic printer for integrated circuits according to claim 5, wherein there are a plurality of facets formed on the end of the shaft and a like plurality of associated succeeding optical systems in the first fixture.

Claim 12

A scanning photographic printer for integrated circuits according to claim 9, wherein there are a plurality of a second fixtures positioned around the first fixture.

Claim 13

A scanning photographic printer for integrated circuits according to claim 10, wherein the optical axis prior to the first mirror is coaxial with the central shaft and wherein the beam of light illuminates all of the first mirrors equally.