US4021735A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for making a metal to semiconductor contact
Assignee: Siltronic AG
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Filing: 1975-10-22
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Granted: 1977-05-03
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Expires: 1995-10-22
Abstract
Abstract A method and apparatus for making a reproducible, pressure and surface coant metal to semiconductor contact for voltage capacitance measurements on semiconductor samples with mercury as the metal component, wherein the mercury is pressed through a contact tubule having a constant diameter against a semiconductor surface by means of a movable pressure piston under a reproducible constant pressure from a supply vessel.
Inventors
- 👤 Fritz Vieweg-Gutberlet
- 👤 Peter Siegesleitner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 12:52
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/2607; G01R31/2637
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
81 words
A method for producing a reproducible, pressure constant and surface constant metal to semiconductor contact for voltage capacitance measurements on semiconductor samples with mercury as the metal component, comprising the step of pressing mercury under reproducible constant pressure from a supply vessel against the semiconductor surface through a contact tubule having a constant diameter; and applying the mercury which is pressed under the constant pressure to an expansion vessel to exert uniform contact reproducible pressure onto the surface of the semiconductor.
Claim 2
Independent Claim
81 words
A method for producing a reproducible, pressure constant and surface constant metal to semiconductor contact for voltage capacitance measurements on semiconductor samples with mercury as the metal component, comprising the step of pressing mercury under reproducible constant pressure from a supply vessel against the semiconductor surface through a contact tubule having a constant diameter; and applying the mercury which is pressed under the constant pressure to an expansion vessel to exert uniform contact reproducible pressure onto the surface of the semiconductor.
Claim 3
Independent Claim
139 words
A device for producing a reproducible, pressure and surface constant metal to semiconductor contact for voltage capacitance measurements on semiconductor samples with mercury as the metal component comprising a housing containing a mercury electrode, a rear contact mounted above the surface of said housing, a pipe-shaped supply vessel for the mercury disposed in said housing and forming at one end thereof a contact tubule having /an outlet opening which discharges from said housing, an expansion vessel connected to said supply vessel, and thereby to said contact tubule, a balancing pistion movably disposed in said expansion vessel and closing said expansion vessel and-- has been added. a movable pressure piston disposed in the other end of said supply vessel and closing said other end of said supply vessel in pressure communication with said contact tubule, thereby maintaining constant reproducible pressure.
Claim 4
Independent Claim
139 words
A device for producing a reproducible, pressure and surface constant metal to semiconductor contact for voltage capacitance measurements on semiconductor samples with mercury as the metal component comprising a housing containing a mercury electrode, a rear contact mounted above the surface of said housing, a pipe-shaped supply vessel for the mercury disposed in said housing and forming at one end thereof a contact tubule having /an outlet opening which discharges from said housing, an expansion vessel connected to said supply vessel, and thereby to said contact tubule, a balancing pistion movably disposed in said expansion vessel and closing said expansion vessel and-- has been added. a movable pressure piston disposed in the other end of said supply vessel and closing said other end of said supply vessel in pressure communication with said contact tubule, thereby maintaining constant reproducible pressure.
Claim 5
Dependent Claim
48 words
The device according to claim 2 further comprising means for coupling said movable pressure piston to said rear contact for moving said pressure piston only when said outlet opening of said contact tubule is closed by the semiconductor sample with said rear contact holding down the semiconductor sample.
Claim 6
Dependent Claim
31 words
The device according to claim 2 further comprising an electrical screen surrounding said contact tubule and disposed on an upper portion of said housing between said housing and the semiconductor sample.
References Cited (Backward Citations)
US3794912A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-05-02 | 1980-11-01 | 1981-05-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-05-02 | 1984-11-01 | 1985-05-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-05-02 | 1988-11-01 | 1989-05-03 | $7700.00 | Window Closed / Lapsed |