US4007988A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Manufacture of multi-layer structures
Assignee: Nikon Corp
•
Filing: 1974-05-03
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Granted: 1977-02-15
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Expires: 1994-05-03
Abstract
Abstract In the alignment of successive masks relative to a photo-sensitive substrate in the manufacture of multilayers respective fiducial marks on the substrate and on each mask are brought into the correct relative position for exposure of the substrate, without introducing the inaccuracy resulting from the superimposition of successive photographic images of the mask fiducial marks on the substrate. In one method the mask and substrate fiducial marks are arranged to be out of register with each other when the mask and substrate are correctly aligned, the two sets of fiducial marks being brought into register by an optical beam displacing arrangement. In alternative process the substrate fiducial marks are exposed separately from the main exposure of the remainder of the substrate before or after alignment of the substrate with the mask, or, in the case of a positive photo-resist, the substrate fiducial marks are separately masked during the exposures of the substrate after alignment thereof with each successive printing mask.
Inventors
- 👤 Ian Derek Bromfield
- 👤 Peter Seddon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 21:42
CPC Classifications
H; H10; H10P; H10P95/00; G; G03; G03B; G03B17/00; G03B17/24; G03B17/245; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
73 words
Apparatus for use in positioning a succession of masks relative to a photo-sensitive substrate for the manufacture of a multi-layer structure, the substrate and each mask bearing respective fiducial marks which are utilised in such positioning, said apparatus including retractable masking elements which are movable into masking positions above the fiducial marks on the substrate to prevent exposure of the substrate in the vicinity of the said fiducial marks upon exposure of substrate.
Claim 2
Dependent Claim
73 words
Apparatus for use in positioning a succession of masks relative to a photo-sensitive substrate for the manufacture of a multi-layer structure, the substrate and each mask bearing respective fiducial marks which are utilised in such positioning, said apparatus including retractable masking elements which are movable into masking positions above the fiducial marks on the substrate to prevent exposure of the substrate in the vicinity of the said fiducial marks upon exposure of substrate.
Claim 3
Dependent Claim
155 words
Apparatus for use in positioning a succession of masks relative to a photo-sensitive substrate for the manufacture of a multi-layer structure by a series of photographic exposures, the substrate and each mask bearing respective fiducial marks which are utilized in such positioning, said apparatus comprising: a. means for adjusting the position of each mask relative to said substrate; b. first exposure means for exposing said substrate surface through each mask when said adjustment is completed; and c. second exposure means for exposing only the fiducial marks of the substrate and immediately surrounding regions thereof, without interposing the fiducial marks on said masks in the path of said exposure by said second means, upon but not simultaneously with each exposure of the substrate surface through each mask by said first means, so that no photographic images corresponding to the mask fiducial marks are formed on the substrate due to each said exposure by said first means.
Claim 4
Dependent Claim
155 words
Apparatus for use in positioning a succession of masks relative to a photo-sensitive substrate for the manufacture of a multi-layer structure by a series of photographic exposures, the substrate and each mask bearing respective fiducial marks which are utilized in such positioning, said apparatus comprising: a. means for adjusting the position of each mask relative to said substrate; b. first exposure means for exposing said substrate surface through each mask when said adjustment is completed; and c. second exposure means for exposing only the fiducial marks of the substrate and immediately surrounding regions thereof, without interposing the fiducial marks on said masks in the path of said exposure by said second means, upon but not simultaneously with each exposure of the substrate surface through each mask by said first means, so that no photographic images corresponding to the mask fiducial marks are formed on the substrate due to each said exposure by said first means.
Claim 5
Dependent Claim
49 words
The apparatus defined in claim 2, wherein said second means comprises a movable chuck device supporting the substrate for movement relative to a mask support, the chuck device having light admitting and guiding means through which only the fiducial marks and said surround regions of the substrate are exposed.
Claim 6
Dependent Claim
48 words
The apparatus defined in claim 3, wherein the light admitting and guiding means comprise respective tubular sleeves inserted in apertures in said chuck device, and means for adjusting the position of said sleeves in said chuck device for the exposure of the substrate fiducial marks and surrounding regions.
References Cited (Backward Citations)
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US3782942A
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US3490846A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-02-15 | 1980-08-16 | 1981-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-02-15 | 1984-08-16 | 1985-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-02-15 | 1988-08-16 | 1989-02-15 | $7700.00 | Window Closed / Lapsed |